Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography: 19 - 22 July 1992, San Diego, California
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
1993
|
| Schriftenreihe: | Proceedings / SPIE
1742 |
| Schlagworte: | |
| Beschreibung: | XIII, 702 S. Ill., graph. Darst. |
| ISBN: | 0819409154 |
Internformat
MARC
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| 245 | 1 | 0 | |a Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography |b 19 - 22 July 1992, San Diego, California |c Richard B. Hoover ..., chairs/eds. |
| 264 | 1 | |a Bellingham, Wash. |c 1993 | |
| 300 | |a XIII, 702 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Proceedings / SPIE |v 1742 | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Hoover, Richard B. |4 edt | |
| 810 | 2 | |a SPIE |t Proceedings |v 1742 |w (DE-604)BV000010887 |9 1742 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018359963 | ||
Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author2 | Hoover, Richard B. |
| author2_role | edt |
| author2_variant | r b h rb rbh |
| author_facet | Hoover, Richard B. |
| building | Verbundindex |
| bvnumber | BV024380081 |
| ctrlnum | (OCoLC)636624986 (DE-599)BVBBV024380081 |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024380081 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:24Z |
| institution | BVB |
| isbn | 0819409154 |
| language | Undetermined |
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| physical | XIII, 702 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
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| series2 | Proceedings / SPIE |
| spelling | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California Richard B. Hoover ..., chairs/eds. Bellingham, Wash. 1993 XIII, 702 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 1742 (DE-588)1071861417 Konferenzschrift gnd-content Hoover, Richard B. edt SPIE Proceedings 1742 (DE-604)BV000010887 1742 |
| spellingShingle | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California |
| subject_GND | (DE-588)1071861417 |
| title | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California |
| title_auth | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California |
| title_exact_search | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California |
| title_full | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California Richard B. Hoover ..., chairs/eds. |
| title_fullStr | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California Richard B. Hoover ..., chairs/eds. |
| title_full_unstemmed | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography 19 - 22 July 1992, San Diego, California Richard B. Hoover ..., chairs/eds. |
| title_short | Multilayer and grazing incidence X-ray EUV optics for astronomy and projection lithography |
| title_sort | multilayer and grazing incidence x ray euv optics for astronomy and projection lithography 19 22 july 1992 san diego california |
| title_sub | 19 - 22 July 1992, San Diego, California |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT hooverrichardb multilayerandgrazingincidencexrayeuvopticsforastronomyandprojectionlithography1922july1992sandiegocalifornia |