VLSI metallization:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Orlando, Fla. <<[u.a.]>>
Acad. Pr.
1987
|
| Schriftenreihe: | VLSI electronics, microstructure science
15 |
| Beschreibung: | X, 480 S. Ill., graph. Darst. |
| ISBN: | 0122341155 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV024370878 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 911105s1987 ad|| |||| 00||| und d | ||
| 020 | |a 0122341155 |9 0-12-234115-5 | ||
| 035 | |a (OCoLC)635809875 | ||
| 035 | |a (DE-599)BVBBV024370878 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-83 | ||
| 084 | |a ZN 4154 |0 (DE-625)157362: |2 rvk | ||
| 245 | 1 | 0 | |a VLSI metallization |c ed. by Norman G. Einspruch ... |
| 264 | 1 | |a Orlando, Fla. <<[u.a.]>> |b Acad. Pr. |c 1987 | |
| 300 | |a X, 480 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a VLSI electronics, microstructure science |v 15 | |
| 700 | 1 | |a Einspruch, Norman G. |4 edt | |
| 830 | 0 | |a VLSI electronics, microstructure science |v 15 |w (DE-604)BV009495884 |9 15 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018351443 | ||
Datensatz im Suchindex
| _version_ | 1804140326643826688 |
|---|---|
| any_adam_object | |
| author2 | Einspruch, Norman G. |
| author2_role | edt |
| author2_variant | n g e ng nge |
| author_facet | Einspruch, Norman G. |
| building | Verbundindex |
| bvnumber | BV024370878 |
| classification_rvk | ZN 4154 |
| ctrlnum | (OCoLC)635809875 (DE-599)BVBBV024370878 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00907nam a2200289 cb4500</leader><controlfield tag="001">BV024370878</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">911105s1987 ad|| |||| 00||| und d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0122341155</subfield><subfield code="9">0-12-234115-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)635809875</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024370878</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4154</subfield><subfield code="0">(DE-625)157362:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">VLSI metallization</subfield><subfield code="c">ed. by Norman G. Einspruch ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Orlando, Fla. <<[u.a.]>></subfield><subfield code="b">Acad. Pr.</subfield><subfield code="c">1987</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 480 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">VLSI electronics, microstructure science</subfield><subfield code="v">15</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Einspruch, Norman G.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">VLSI electronics, microstructure science</subfield><subfield code="v">15</subfield><subfield code="w">(DE-604)BV009495884</subfield><subfield code="9">15</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018351443</subfield></datafield></record></collection> |
| id | DE-604.BV024370878 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:12Z |
| institution | BVB |
| isbn | 0122341155 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018351443 |
| oclc_num | 635809875 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | X, 480 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Acad. Pr. |
| record_format | marc |
| series | VLSI electronics, microstructure science |
| series2 | VLSI electronics, microstructure science |
| spelling | VLSI metallization ed. by Norman G. Einspruch ... Orlando, Fla. <<[u.a.]>> Acad. Pr. 1987 X, 480 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier VLSI electronics, microstructure science 15 Einspruch, Norman G. edt VLSI electronics, microstructure science 15 (DE-604)BV009495884 15 |
| spellingShingle | VLSI metallization VLSI electronics, microstructure science |
| title | VLSI metallization |
| title_auth | VLSI metallization |
| title_exact_search | VLSI metallization |
| title_full | VLSI metallization ed. by Norman G. Einspruch ... |
| title_fullStr | VLSI metallization ed. by Norman G. Einspruch ... |
| title_full_unstemmed | VLSI metallization ed. by Norman G. Einspruch ... |
| title_short | VLSI metallization |
| title_sort | vlsi metallization |
| volume_link | (DE-604)BV009495884 |
| work_keys_str_mv | AT einspruchnormang vlsimetallization |