Excimer laser lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE Opt. Eng. Pr.
1990
|
| Ausgabe: | 2. print. |
| Schlagworte: | |
| Beschreibung: | X, 212 S. graph. Darst., Ill. |
| ISBN: | 0819402729 0819402710 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV024369905 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 910814s1990 ad|| |||| 00||| eng d | ||
| 020 | |a 0819402729 |9 0-8194-0272-9 | ||
| 020 | |a 0819402710 |9 0-8194-0271-0 | ||
| 035 | |a (OCoLC)916315804 | ||
| 035 | |a (DE-599)BVBBV024369905 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 |a DE-188 | ||
| 084 | |a UH 5628 |0 (DE-625)145673: |2 rvk | ||
| 084 | |a UH 5750 |0 (DE-625)145705: |2 rvk | ||
| 100 | 1 | |a Jain, Kanti |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Excimer laser lithography |c Kanti Jain |
| 250 | |a 2. print. | ||
| 264 | 1 | |a Bellingham, Wash. |b SPIE Opt. Eng. Pr. |c 1990 | |
| 300 | |a X, 212 S. |b graph. Darst., Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 0 | 1 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018350539 | ||
Datensatz im Suchindex
| _version_ | 1804140325345689600 |
|---|---|
| any_adam_object | |
| author | Jain, Kanti |
| author_facet | Jain, Kanti |
| author_role | aut |
| author_sort | Jain, Kanti |
| author_variant | k j kj |
| building | Verbundindex |
| bvnumber | BV024369905 |
| classification_rvk | UH 5628 UH 5750 |
| ctrlnum | (OCoLC)916315804 (DE-599)BVBBV024369905 |
| discipline | Physik |
| edition | 2. print. |
| format | Book |
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| id | DE-604.BV024369905 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:11Z |
| institution | BVB |
| isbn | 0819402729 0819402710 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018350539 |
| oclc_num | 916315804 |
| open_access_boolean | |
| owner | DE-83 DE-188 |
| owner_facet | DE-83 DE-188 |
| physical | X, 212 S. graph. Darst., Ill. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | SPIE Opt. Eng. Pr. |
| record_format | marc |
| spelling | Jain, Kanti Verfasser aut Excimer laser lithography Kanti Jain 2. print. Bellingham, Wash. SPIE Opt. Eng. Pr. 1990 X, 212 S. graph. Darst., Ill. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Excimerlaser (DE-588)4153300-8 gnd rswk-swf Excimerlaser (DE-588)4153300-8 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Jain, Kanti Excimer laser lithography Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Excimerlaser (DE-588)4153300-8 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4153300-8 |
| title | Excimer laser lithography |
| title_auth | Excimer laser lithography |
| title_exact_search | Excimer laser lithography |
| title_full | Excimer laser lithography Kanti Jain |
| title_fullStr | Excimer laser lithography Kanti Jain |
| title_full_unstemmed | Excimer laser lithography Kanti Jain |
| title_short | Excimer laser lithography |
| title_sort | excimer laser lithography |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Excimerlaser (DE-588)4153300-8 gnd |
| topic_facet | Lithografie Halbleitertechnologie Excimerlaser |
| work_keys_str_mv | AT jainkanti excimerlaserlithography |