Lithography for VLSI:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Orlando, Fla. <<[u.a.]>>
Acad. Pr.
1987
|
| Schriftenreihe: | VLSI electronics, microstructure science
16 |
| Beschreibung: | XI, 361 S. zahlr. graph. Darst. |
| ISBN: | 0122341163 |
Internformat
MARC
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| 008 | 881213s1987 d||| |||| 00||| und d | ||
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| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
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| 245 | 1 | 0 | |a Lithography for VLSI |c ed. by Norman G. Einspruch ... |
| 264 | 1 | |a Orlando, Fla. <<[u.a.]>> |b Acad. Pr. |c 1987 | |
| 300 | |a XI, 361 S. |b zahlr. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a VLSI electronics, microstructure science |v 16 | |
| 700 | 1 | |a Einspruch, Norman G. |4 edt | |
| 830 | 0 | |a VLSI electronics, microstructure science |v 16 |w (DE-604)BV009495884 |9 16 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018345104 | ||
Datensatz im Suchindex
| _version_ | 1804140317711007744 |
|---|---|
| any_adam_object | |
| author2 | Einspruch, Norman G. |
| author2_role | edt |
| author2_variant | n g e ng nge |
| author_facet | Einspruch, Norman G. |
| building | Verbundindex |
| bvnumber | BV024363926 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)246719586 (DE-599)BVBBV024363926 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV024363926 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:04Z |
| institution | BVB |
| isbn | 0122341163 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018345104 |
| oclc_num | 246719586 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XI, 361 S. zahlr. graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Acad. Pr. |
| record_format | marc |
| series | VLSI electronics, microstructure science |
| series2 | VLSI electronics, microstructure science |
| spelling | Lithography for VLSI ed. by Norman G. Einspruch ... Orlando, Fla. <<[u.a.]>> Acad. Pr. 1987 XI, 361 S. zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier VLSI electronics, microstructure science 16 Einspruch, Norman G. edt VLSI electronics, microstructure science 16 (DE-604)BV009495884 16 |
| spellingShingle | Lithography for VLSI VLSI electronics, microstructure science |
| title | Lithography for VLSI |
| title_auth | Lithography for VLSI |
| title_exact_search | Lithography for VLSI |
| title_full | Lithography for VLSI ed. by Norman G. Einspruch ... |
| title_fullStr | Lithography for VLSI ed. by Norman G. Einspruch ... |
| title_full_unstemmed | Lithography for VLSI ed. by Norman G. Einspruch ... |
| title_short | Lithography for VLSI |
| title_sort | lithography for vlsi |
| volume_link | (DE-604)BV009495884 |
| work_keys_str_mv | AT einspruchnormang lithographyforvlsi |