Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1985
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| Schlagworte: |
Internformat
MARC
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| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 090924s1985 |||| 00||| und d | ||
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| 040 | |a DE-604 |b ger |e pi | ||
| 041 | |a und | ||
| 049 | |a DE-83 | ||
| 100 | 1 | |a Germer, Wilfried |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| 264 | 1 | |c 1985 | |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sensor |0 (DE-588)4038824-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Photoresist |0 (DE-588)4174545-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Piezowiderstandseffekt |0 (DE-588)4211489-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |8 1\p |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 655 | 7 | |a Piezoresistive Eigenschaft |2 gnd |9 rswk-swf | |
| 655 | 7 | |a Siliciumdünnschichttechnik |2 gnd |9 rswk-swf | |
| 655 | 7 | |a Silicium-Dünnfilm |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | 2 | |a Sensor |0 (DE-588)4038824-4 |D s |
| 689 | 0 | 3 | |a Piezowiderstandseffekt |0 (DE-588)4211489-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Piezowiderstandseffekt |0 (DE-588)4211489-5 |D s |
| 689 | 1 | 1 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 1 | 2 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Silicium-Dünnfilm |A f |
| 689 | 2 | 1 | |a Sensor |0 (DE-588)4038824-4 |D s |
| 689 | 2 | 2 | |a Piezoresistive Eigenschaft |A f |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Siliciumdünnschichttechnik |A f |
| 689 | 3 | 1 | |a Photoresist |0 (DE-588)4174545-0 |D s |
| 689 | 3 | |5 DE-604 | |
| 940 | 1 | |q TUB-n | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018184768 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804140157987717121 |
|---|---|
| any_adam_object | |
| author | Germer, Wilfried |
| author_facet | Germer, Wilfried |
| author_role | aut |
| author_sort | Germer, Wilfried |
| author_variant | w g wg |
| building | Verbundindex |
| bvnumber | BV024283461 |
| ctrlnum | (OCoLC)916091273 (DE-599)BVBBV024283461 |
| format | Book |
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| genre | 1\p (DE-588)4113937-9 Hochschulschrift gnd-content Piezoresistive Eigenschaft gnd Siliciumdünnschichttechnik gnd Silicium-Dünnfilm gnd |
| genre_facet | Hochschulschrift Piezoresistive Eigenschaft Siliciumdünnschichttechnik Silicium-Dünnfilm |
| id | DE-604.BV024283461 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T21:55:31Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018184768 |
| oclc_num | 916091273 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
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| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| record_format | marc |
| spelling | Germer, Wilfried Verfasser aut Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen 1985 txt rdacontent n rdamedia nc rdacarrier Silicium (DE-588)4077445-4 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Photoresist (DE-588)4174545-0 gnd rswk-swf Piezowiderstandseffekt (DE-588)4211489-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf 1\p (DE-588)4113937-9 Hochschulschrift gnd-content Piezoresistive Eigenschaft gnd rswk-swf Siliciumdünnschichttechnik gnd rswk-swf Silicium-Dünnfilm gnd rswk-swf Silicium (DE-588)4077445-4 s Dünne Schicht (DE-588)4136925-7 s Sensor (DE-588)4038824-4 s Piezowiderstandseffekt (DE-588)4211489-5 s DE-604 Silicium-Dünnfilm f Piezoresistive Eigenschaft f Siliciumdünnschichttechnik f Photoresist (DE-588)4174545-0 s 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Germer, Wilfried Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen Silicium (DE-588)4077445-4 gnd Sensor (DE-588)4038824-4 gnd Photoresist (DE-588)4174545-0 gnd Piezowiderstandseffekt (DE-588)4211489-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4038824-4 (DE-588)4174545-0 (DE-588)4211489-5 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_auth | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_exact_search | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_full | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_fullStr | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_full_unstemmed | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_short | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_sort | piezoresistive eigenschaften von silizium dunnfilmen fur sensor anwendungen |
| topic | Silicium (DE-588)4077445-4 gnd Sensor (DE-588)4038824-4 gnd Photoresist (DE-588)4174545-0 gnd Piezowiderstandseffekt (DE-588)4211489-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Silicium Sensor Photoresist Piezowiderstandseffekt Dünne Schicht Hochschulschrift Piezoresistive Eigenschaft Siliciumdünnschichttechnik Silicium-Dünnfilm |
| work_keys_str_mv | AT germerwilfried piezoresistiveeigenschaftenvonsiliziumdunnfilmenfursensoranwendungen |