Proceedings of SPIE: 771 Advances in resist technology and processing. - 4. 1987
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
1985
|
Internformat
MARC
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Datensatz im Suchindex
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| spelling | Society of Photo-optical Instrumentation Engineers Verfasser (DE-588)3409-5 aut Proceedings of SPIE 771 Advances in resist technology and processing. - 4. 1987 Society of Photo-Optical Instrumentation Engineers 1985 Bellingham, Wash. txt rdacontent n rdamedia nc rdacarrier (DE-604)BV000010887 771 |
| spellingShingle | Proceedings of SPIE |
| title | Proceedings of SPIE |
| title_auth | Proceedings of SPIE |
| title_exact_search | Proceedings of SPIE |
| title_full | Proceedings of SPIE 771 Advances in resist technology and processing. - 4. 1987 Society of Photo-Optical Instrumentation Engineers |
| title_fullStr | Proceedings of SPIE 771 Advances in resist technology and processing. - 4. 1987 Society of Photo-Optical Instrumentation Engineers |
| title_full_unstemmed | Proceedings of SPIE 771 Advances in resist technology and processing. - 4. 1987 Society of Photo-Optical Instrumentation Engineers |
| title_short | Proceedings of SPIE |
| title_sort | proceedings of spie advances in resist technology and processing 4 1987 |
| volume_link | (DE-604)BV000010887 |
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