Gettering and defect engineering in semiconductor technology: GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Uetikon-Zurich
Scitec Publ.
2004
|
| Schriftenreihe: | Diffusion and defect data, solid state data
B, Solid state phenomena ; 95/96 |
| Schlagworte: | |
| Beschreibung: | XVI, 682 S. Ill., graph. Darst. |
| ISBN: | 3908450829 |
Internformat
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV023835482 | ||
| 003 | DE-604 | ||
| 005 | 20090401000000.0 | ||
| 007 | t | ||
| 008 | 060428s2004 ad|| |||| 00||| eng d | ||
| 020 | |a 3908450829 |9 3-908450-82-9 | ||
| 035 | |a (OCoLC)249022008 | ||
| 035 | |a (DE-599)BVBBV023835482 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 |a DE-706 | ||
| 245 | 1 | 0 | |a Gettering and defect engineering in semiconductor technology |b GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 |c ed. by M. Kittler ... |
| 264 | 1 | |a Uetikon-Zurich |b Scitec Publ. |c 2004 | |
| 300 | |a XVI, 682 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Diffusion and defect data, solid state data : B, Solid state phenomena |v 95/96 | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Getterung |0 (DE-588)4157223-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2003 |z Zeuthen |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | 1 | |a Getterung |0 (DE-588)4157223-3 |D s |
| 689 | 0 | 2 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Kittler, Martin |4 edt | |
| 711 | 2 | |a GADEST |n 10 |d 2003 |c Zeuthen |j Sonstige |0 (DE-588)5559411-6 |4 oth | |
| 830 | 0 | |a Diffusion and defect data, solid state data |v B, Solid state phenomena ; 95/96 |w (DE-604)BV021637351 |9 95/96 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-017477616 | ||
Datensatz im Suchindex
| _version_ | 1804139036550365184 |
|---|---|
| any_adam_object | |
| author2 | Kittler, Martin |
| author2_role | edt |
| author2_variant | m k mk |
| author_facet | Kittler, Martin |
| building | Verbundindex |
| bvnumber | BV023835482 |
| ctrlnum | (OCoLC)249022008 (DE-599)BVBBV023835482 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01717nam a2200385zcb4500</leader><controlfield tag="001">BV023835482</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090401000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">060428s2004 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3908450829</subfield><subfield code="9">3-908450-82-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)249022008</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023835482</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Gettering and defect engineering in semiconductor technology</subfield><subfield code="b">GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003</subfield><subfield code="c">ed. by M. Kittler ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Uetikon-Zurich</subfield><subfield code="b">Scitec Publ.</subfield><subfield code="c">2004</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVI, 682 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Diffusion and defect data, solid state data : B, Solid state phenomena</subfield><subfield code="v">95/96</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2003</subfield><subfield code="z">Zeuthen</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kittler, Martin</subfield><subfield code="4">edt</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">GADEST</subfield><subfield code="n">10</subfield><subfield code="d">2003</subfield><subfield code="c">Zeuthen</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5559411-6</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Diffusion and defect data, solid state data</subfield><subfield code="v">B, Solid state phenomena ; 95/96</subfield><subfield code="w">(DE-604)BV021637351</subfield><subfield code="9">95/96</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-017477616</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2003 Zeuthen gnd-content |
| genre_facet | Konferenzschrift 2003 Zeuthen |
| id | DE-604.BV023835482 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:37:42Z |
| institution | BVB |
| institution_GND | (DE-588)5559411-6 |
| isbn | 3908450829 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017477616 |
| oclc_num | 249022008 |
| open_access_boolean | |
| owner | DE-634 DE-706 |
| owner_facet | DE-634 DE-706 |
| physical | XVI, 682 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Scitec Publ. |
| record_format | marc |
| series | Diffusion and defect data, solid state data |
| series2 | Diffusion and defect data, solid state data : B, Solid state phenomena |
| spelling | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 ed. by M. Kittler ... Uetikon-Zurich Scitec Publ. 2004 XVI, 682 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data, solid state data : B, Solid state phenomena 95/96 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 Zeuthen gnd-content Halbleitertechnologie (DE-588)4158814-9 s Getterung (DE-588)4157223-3 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Kittler, Martin edt GADEST 10 2003 Zeuthen Sonstige (DE-588)5559411-6 oth Diffusion and defect data, solid state data B, Solid state phenomena ; 95/96 (DE-604)BV021637351 95/96 |
| spellingShingle | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 Diffusion and defect data, solid state data Halbleitertechnologie (DE-588)4158814-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd Getterung (DE-588)4157223-3 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4125030-8 (DE-588)4157223-3 (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 |
| title_auth | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 |
| title_exact_search | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 |
| title_full | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 ed. by M. Kittler ... |
| title_fullStr | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 ed. by M. Kittler ... |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 ed. by M. Kittler ... |
| title_short | Gettering and defect engineering in semiconductor technology |
| title_sort | gettering and defect engineering in semiconductor technology gadest 2003 proceedings of the 10th international autumn meeting gettering and defect engineering in semiconductor technology seehotel zeuthen suburb of berlin state of brandenburg germany september 21 26 2003 |
| title_sub | GADEST 2003 ; proceedings of the 10th International Autumn Meeting ["Gettering and Defect Engineering in Semiconductor Technology"], Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany September 21-26, 2003 |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Gitterbaufehler (DE-588)4125030-8 gnd Getterung (DE-588)4157223-3 gnd |
| topic_facet | Halbleitertechnologie Gitterbaufehler Getterung Konferenzschrift 2003 Zeuthen |
| volume_link | (DE-604)BV021637351 |
| work_keys_str_mv | AT kittlermartin getteringanddefectengineeringinsemiconductortechnologygadest2003proceedingsofthe10thinternationalautumnmeetinggetteringanddefectengineeringinsemiconductortechnologyseehotelzeuthensuburbofberlinstateofbrandenburggermanyseptember21262003 AT gadestzeuthen getteringanddefectengineeringinsemiconductortechnologygadest2003proceedingsofthe10thinternationalautumnmeetinggetteringanddefectengineeringinsemiconductortechnologyseehotelzeuthensuburbofberlinstateofbrandenburggermanyseptember21262003 |