Rapid thermal processing: science and technology
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Acad. Press [u.a.]
1993
|
| Schlagworte: | |
| Beschreibung: | VIII, 430 S. Ill., graph. Darst. |
| ISBN: | 0122476905 |
Internformat
MARC
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Datensatz im Suchindex
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| illustrated | Illustrated |
| indexdate | 2024-07-09T21:37:16Z |
| institution | BVB |
| isbn | 0122476905 |
| language | English |
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| physical | VIII, 430 S. Ill., graph. Darst. |
| publishDate | 1993 |
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| publisher | Acad. Press [u.a.] |
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| spelling | Rapid thermal processing science and technology ed. by Richard B. Fair Boston [u.a.] Acad. Press [u.a.] 1993 VIII, 430 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Fair, Richard B. edt |
| spellingShingle | Rapid thermal processing science and technology Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)4143413-4 |
| title | Rapid thermal processing science and technology |
| title_auth | Rapid thermal processing science and technology |
| title_exact_search | Rapid thermal processing science and technology |
| title_full | Rapid thermal processing science and technology ed. by Richard B. Fair |
| title_fullStr | Rapid thermal processing science and technology ed. by Richard B. Fair |
| title_full_unstemmed | Rapid thermal processing science and technology ed. by Richard B. Fair |
| title_short | Rapid thermal processing |
| title_sort | rapid thermal processing science and technology |
| title_sub | science and technology |
| topic | Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Halbleiter Fertigung Aufsatzsammlung |
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