Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992:
Gespeichert in:
Weitere Verfasser: | |
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Format: | Tagungsbericht Buch |
Sprache: | English |
Veröffentlicht: |
Berlin [u.a.]
VDE-Verl.
1992
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Schlagworte: | |
Beschreibung: | 534 S. Ill., graph. Darst. |
ISBN: | 3800718944 |
Internformat
MARC
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245 | 1 | 0 | |a Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 |c 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992. Herbert Reichl (ed.) |
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650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 21.10.1992-23.10.1992 |z Berlin |2 gnd-content | |
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700 | 1 | |a Reichl, Herbert |d 1945- |0 (DE-588)108658074 |4 edt | |
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Datensatz im Suchindex
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genre_facet | Konferenzschrift 21.10.1992-23.10.1992 Berlin |
id | DE-604.BV023808515 |
illustrated | Illustrated |
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physical | 534 S. Ill., graph. Darst. |
publishDate | 1992 |
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publisher | VDE-Verl. |
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spelling | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992. Herbert Reichl (ed.) Berlin [u.a.] VDE-Verl. 1992 534 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 21.10.1992-23.10.1992 Berlin gnd-content Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Reichl, Herbert 1945- (DE-588)108658074 edt International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components 3 1992 Berlin Sonstige (DE-588)2124513-7 oth |
spellingShingle | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 Mikrosystemtechnik (DE-588)4221617-5 gnd |
subject_GND | (DE-588)4221617-5 (DE-588)1071861417 |
title | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 |
title_auth | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 |
title_exact_search | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 |
title_full | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992. Herbert Reichl (ed.) |
title_fullStr | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992. Herbert Reichl (ed.) |
title_full_unstemmed | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992. Herbert Reichl (ed.) |
title_short | Micro system technologies 92 : 3rd International Conference on Micro-, Electro-, Opto-, Mechanic Systems and Components, Berlin, October 21 - 23, 1992 |
title_sort | micro system technologies 92 3rd international conference on micro electro opto mechanic systems and components berlin october 21 23 1992 |
topic | Mikrosystemtechnik (DE-588)4221617-5 gnd |
topic_facet | Mikrosystemtechnik Konferenzschrift 21.10.1992-23.10.1992 Berlin |
work_keys_str_mv | AT reichlherbert microsystemtechnologies923rdinternationalconferenceonmicroelectrooptomechanicsystemsandcomponentsberlinoctober21231992 AT internationalconferenceonmicroelectrooptomechanicsystemsandcomponentsberlin microsystemtechnologies923rdinternationalconferenceonmicroelectrooptomechanicsystemsandcomponentsberlinoctober21231992 |