Electrochemical conditioning of silicon: surface analyses and electronic implications
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Berlin
Hahn-Meitner-Inst.
1998
|
Beschreibung: | Sonderdr. aus: Semiconductor micromachining ; 1 |
Beschreibung: | [111] S. in getr. Zählung |
Internformat
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100 | 1 | |a Lewerenz, Hans-Joachim |e Verfasser |4 aut | |
245 | 1 | 0 | |a Electrochemical conditioning of silicon |b surface analyses and electronic implications |c H.-J. Lewerenz and H. Jungblut |
264 | 1 | |a Berlin |b Hahn-Meitner-Inst. |c 1998 | |
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500 | |a Sonderdr. aus: Semiconductor micromachining ; 1 | ||
700 | 1 | |a Jungblut, Helmut |e Verfasser |4 aut | |
999 | |a oai:aleph.bib-bvb.de:BVB01-017438354 |
Datensatz im Suchindex
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any_adam_object | |
author | Lewerenz, Hans-Joachim Jungblut, Helmut |
author_facet | Lewerenz, Hans-Joachim Jungblut, Helmut |
author_role | aut aut |
author_sort | Lewerenz, Hans-Joachim |
author_variant | h j l hjl h j hj |
building | Verbundindex |
bvnumber | BV023796149 |
ctrlnum | (OCoLC)915966756 (DE-599)BVBBV023796149 |
format | Book |
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illustrated | Not Illustrated |
indexdate | 2024-07-09T21:37:00Z |
institution | BVB |
language | English |
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physical | [111] S. in getr. Zählung |
publishDate | 1998 |
publishDateSearch | 1998 |
publishDateSort | 1998 |
publisher | Hahn-Meitner-Inst. |
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spelling | Lewerenz, Hans-Joachim Verfasser aut Electrochemical conditioning of silicon surface analyses and electronic implications H.-J. Lewerenz and H. Jungblut Berlin Hahn-Meitner-Inst. 1998 [111] S. in getr. Zählung txt rdacontent n rdamedia nc rdacarrier Sonderdr. aus: Semiconductor micromachining ; 1 Jungblut, Helmut Verfasser aut |
spellingShingle | Lewerenz, Hans-Joachim Jungblut, Helmut Electrochemical conditioning of silicon surface analyses and electronic implications |
title | Electrochemical conditioning of silicon surface analyses and electronic implications |
title_auth | Electrochemical conditioning of silicon surface analyses and electronic implications |
title_exact_search | Electrochemical conditioning of silicon surface analyses and electronic implications |
title_full | Electrochemical conditioning of silicon surface analyses and electronic implications H.-J. Lewerenz and H. Jungblut |
title_fullStr | Electrochemical conditioning of silicon surface analyses and electronic implications H.-J. Lewerenz and H. Jungblut |
title_full_unstemmed | Electrochemical conditioning of silicon surface analyses and electronic implications H.-J. Lewerenz and H. Jungblut |
title_short | Electrochemical conditioning of silicon |
title_sort | electrochemical conditioning of silicon surface analyses and electronic implications |
title_sub | surface analyses and electronic implications |
work_keys_str_mv | AT lewerenzhansjoachim electrochemicalconditioningofsiliconsurfaceanalysesandelectronicimplications AT jungbluthelmut electrochemicalconditioningofsiliconsurfaceanalysesandelectronicimplications |