Nano-scale patterning of aluminium films by water and light:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2003
|
| Schriftenreihe: | Berichte aus der Mikrosystemtechnik
|
| Schlagworte: | |
| Beschreibung: | VII, 101 S. Ill., graph. Darst. 21 cm |
| ISBN: | 3832220364 |
Internformat
MARC
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| 100 | 1 | |a Häfliger, Daniel |d 1974- |e Verfasser |0 (DE-588)128502371 |4 aut | |
| 245 | 1 | 0 | |a Nano-scale patterning of aluminium films by water and light |c Daniel Häfliger |
| 264 | 1 | |a Aachen |b Shaker |c 2003 | |
| 300 | |a VII, 101 S. |b Ill., graph. Darst. |c 21 cm | ||
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Datensatz im Suchindex
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| author | Häfliger, Daniel 1974- |
| author_GND | (DE-588)128502371 |
| author_facet | Häfliger, Daniel 1974- |
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| author_sort | Häfliger, Daniel 1974- |
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| bvnumber | BV023794856 |
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| id | DE-604.BV023794856 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:36:58Z |
| institution | BVB |
| isbn | 3832220364 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017437061 |
| oclc_num | 722917745 |
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| physical | VII, 101 S. Ill., graph. Darst. 21 cm |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Mikrosystemtechnik |
| spelling | Häfliger, Daniel 1974- Verfasser (DE-588)128502371 aut Nano-scale patterning of aluminium films by water and light Daniel Häfliger Aachen Shaker 2003 VII, 101 S. Ill., graph. Darst. 21 cm txt rdacontent n rdamedia nc rdacarrier Berichte aus der Mikrosystemtechnik Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 2003 Laserlithografie (DE-588)4240927-5 gnd rswk-swf Aluminium (DE-588)4001573-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Aluminium (DE-588)4001573-7 s Laserlithografie (DE-588)4240927-5 s Dünnschichttechnik (DE-588)4136339-5 s DE-604 |
| spellingShingle | Häfliger, Daniel 1974- Nano-scale patterning of aluminium films by water and light Laserlithografie (DE-588)4240927-5 gnd Aluminium (DE-588)4001573-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4240927-5 (DE-588)4001573-7 (DE-588)4136339-5 (DE-588)4113937-9 |
| title | Nano-scale patterning of aluminium films by water and light |
| title_auth | Nano-scale patterning of aluminium films by water and light |
| title_exact_search | Nano-scale patterning of aluminium films by water and light |
| title_full | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_fullStr | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_full_unstemmed | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_short | Nano-scale patterning of aluminium films by water and light |
| title_sort | nano scale patterning of aluminium films by water and light |
| topic | Laserlithografie (DE-588)4240927-5 gnd Aluminium (DE-588)4001573-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Laserlithografie Aluminium Dünnschichttechnik Hochschulschrift |
| work_keys_str_mv | AT hafligerdaniel nanoscalepatterningofaluminiumfilmsbywaterandlight |