Differenzdrucksensor in Dünnschicht-Mikromechanik:
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Bibliographic Details
Main Author: Brunsch, Dietmar (Author)
Format: Thesis Book
Language:German
Published: Göttingen Cuvillier 2002
Edition:1. Aufl.
Subjects:
Physical Description:XVI, 120 S. Ill., graph. Darst.
ISBN:3898735877

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!