Diffusion phenomena in the chemically amplified CARL resist system:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
München
Utz, Wiss.
2000
|
| Schriftenreihe: | Physikalische Chemie
|
| Schlagworte: | |
| Beschreibung: | VII, 68 S. Ill., graph. Darst. 21 cm |
| ISBN: | 3896758454 |
Internformat
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Datensatz im Suchindex
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| author | Richter, Ernst-Christian 1969- |
| author_GND | (DE-588)122435044 |
| author_facet | Richter, Ernst-Christian 1969- |
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| author_sort | Richter, Ernst-Christian 1969- |
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| id | DE-604.BV023785705 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:36:46Z |
| institution | BVB |
| isbn | 3896758454 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017427913 |
| oclc_num | 915874870 |
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| physical | VII, 68 S. Ill., graph. Darst. 21 cm |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Utz, Wiss. |
| record_format | marc |
| series2 | Physikalische Chemie |
| spelling | Richter, Ernst-Christian 1969- Verfasser (DE-588)122435044 aut Diffusion phenomena in the chemically amplified CARL resist system Ernst-Christian Richter München Utz, Wiss. 2000 VII, 68 S. Ill., graph. Darst. 21 cm txt rdacontent n rdamedia nc rdacarrier Physikalische Chemie Zugl.: Regensburg, Univ., Diss., 2000 Excimerlaser (DE-588)4153300-8 gnd rswk-swf Photoresist (DE-588)4174545-0 gnd rswk-swf Laserlithografie (DE-588)4240927-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Photoresist (DE-588)4174545-0 s Laserlithografie (DE-588)4240927-5 s Excimerlaser (DE-588)4153300-8 s DE-604 |
| spellingShingle | Richter, Ernst-Christian 1969- Diffusion phenomena in the chemically amplified CARL resist system Excimerlaser (DE-588)4153300-8 gnd Photoresist (DE-588)4174545-0 gnd Laserlithografie (DE-588)4240927-5 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4174545-0 (DE-588)4240927-5 (DE-588)4113937-9 |
| title | Diffusion phenomena in the chemically amplified CARL resist system |
| title_auth | Diffusion phenomena in the chemically amplified CARL resist system |
| title_exact_search | Diffusion phenomena in the chemically amplified CARL resist system |
| title_full | Diffusion phenomena in the chemically amplified CARL resist system Ernst-Christian Richter |
| title_fullStr | Diffusion phenomena in the chemically amplified CARL resist system Ernst-Christian Richter |
| title_full_unstemmed | Diffusion phenomena in the chemically amplified CARL resist system Ernst-Christian Richter |
| title_short | Diffusion phenomena in the chemically amplified CARL resist system |
| title_sort | diffusion phenomena in the chemically amplified carl resist system |
| topic | Excimerlaser (DE-588)4153300-8 gnd Photoresist (DE-588)4174545-0 gnd Laserlithografie (DE-588)4240927-5 gnd |
| topic_facet | Excimerlaser Photoresist Laserlithografie Hochschulschrift |
| work_keys_str_mv | AT richterernstchristian diffusionphenomenainthechemicallyamplifiedcarlresistsystem |