Working with a scanning electron microscope:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Chislehurst
Lodgemark Press
1986
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 113 S. zahlr. Ill. und graph. Darst. |
| ISBN: | 0850770939 |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV023760605 | ||
| 003 | DE-604 | ||
| 005 | 20070308000000.0 | ||
| 007 | t | ||
| 008 | 950721s1986 ad|| |||| 00||| eng d | ||
| 020 | |a 0850770939 |9 0-850770-93-9 | ||
| 035 | |a (OCoLC)915817783 | ||
| 035 | |a (DE-599)BVBBV023760605 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 | ||
| 245 | 1 | 0 | |a Working with a scanning electron microscope |c words by S. K. Chapman |
| 264 | 1 | |a Chislehurst |b Lodgemark Press |c 1986 | |
| 300 | |a 113 S. |b zahlr. Ill. und graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Elektronenmikroskopie |0 (DE-588)4014327-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Chapman, Steve K. |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m HBZ Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017402848&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-017402848 | ||
Datensatz im Suchindex
| _version_ | 1804138946291040256 |
|---|---|
| adam_text | CONTENTS
• Introduction
1. Electrons and their control
1.1 The basis of SEM imaging
1.2 The electron gun
1.2.1 The Filament
1.2.2 The Gun Bias
1.2.3 The Virtual Source
1.3 Electron control
1.3.1 Electron Lenses
1.3.2 Deflection Coils
1.4 Aberrations
1.4.1 Spherical Aberration
1.4.2 Chromatic Aberration
1.4.3 Astigmatism
1.5 Electron trajectories
1.6 The electron-optical column
1.6.1 Signal to Noise
1.6.2 Depth of Field
1.6.3 Specimen Manipulation
2. The vacuum system
2.1 Vacuum levels
2.1.1 Vacuum Gauges
2.1.1 a Low Vacuum Gauges
2.1.1 b High Vacuum Gauges
2.2 Vacuum pumps
2.2.1 The Rotary Pump
2.2.2 Diffusion Pumps
2.2.2 a The Vacuum Reservoir
2.2.3 The Turbomolecular Pump
2.2.4 Ion Pumps
2.3 Contamination
2.3.1 Anti-contamination Traps
2.4 Operating procedures
2.4.1 Automatic Systems
2.4.2 Manual Systems
2.5 Advanced techniques
2.5.1 24 Hour Vacuum Operation
2.5.2 Dry Gas Introduction
2.5.3 Specimen Handling
2.5.4 Diffusion Pump Temperature
3. Obtaining the electron beam
3.1 Initial instrument adjustment
3.1.1 The controls
3.1.1 a The Electron Gun
3.1.1 b The Signal Control
3.1.1 c The Brightness or Black Level Control
3.1.1 d Interpretations of Brightness and Contrast
3.1.1 eCR.T. Adjustment
3.1.1 f Other Controls
3.1.1 g The Wave Form Monitor or Videoscope
3.2 Saturation and alignment
3.2.1 Applying the High Voltage
3.2.2 Saturation
3.2.3 Gun Alignment
3.3 Advanced techniques
3.3.1 Filament Imaging
3.3.2 Lanthanum Hexaboride
4. Reactions between the electron beam the specimen
4.1 Inelastic scattering
4.2 Elastic scattering
4.2.1 Bremsstrahlung Production
4.2.2 Rutherford Scattering
4.3 Secondary electron (SE) emission
4.3.1 Low Voltage SE Emission
4.4 Backscattered electron (BSE) emission
4.4,1 Secondary Electron Emission by Backscattered Electrons
4.5 X-ray emission
4.5.1 Characteristic X-Rays
4.6 Reaction volumes
4.7 Charge
4.7.1 Charge and Column Components
4.7.2 Charge and the Specimen
5. Signal collection
5.1 Image formation
5. /. 1 Illuminating the Specimen
5.1.2 Topographic Contrast
5.1.3 Atomic Number Contrast
5.2 The secondary electron detector
5.3 Solid state BSE detector
5.4 Scintillator BSE detector
5.4.1 Robinson Style BSE Detector
5.4.2 Philips Multifunction Detector
5.5 Secondary electron signals
5.5.1 Secondary Electrons Type 1
5.5.2 Secondary Electrons Type 2
5.5.3 Secondary Electrons Type 3
5.5.4 Backscattered Electrons Type 1
5.5.5 Backscattered Electrons Type 2
5.6 Advanced techniques
6. Imaging
6.1 Basic instrument operation
6.1 .a Focus
6.1.b Signal
6.1 .c Brightness
6.1 .d Spot Size
6.1 .e XY Stigmators
6.1 .f Amplitude and Rotation Stigmators
6.1.1 Optimising the Image
6.2 Final aperture alignment
6.3 Photography
6.3.1 Calibration of the Photographic System
6.3.1 a Photographic Calibration Procedure
6.3.1 b Calibrating the Wave Form Monitor
6.3.1 c Calibrating a Colour Light System
6.4 Instrument factors
6.4.1 The Accelerating Voltage
6.4.2 Emission Current
6.4.3 Spot Size
6.4.4 Final Aperture
6.4.5 Working Distance (WD)
6.4.6 Tilt
6.4.7 Detector Cage Voltage
7. Specimen preparation
7.1 Adhesives
7. /. / Proprietor^ Adhesives
7.1.2 Special Adhesives
7.1.2 a Silver Dag (trade name)
7.1.2 b Carbon Suspension
7.1.3 Adhesive tapes
7.1.4 Specimen Clamps
7.1.5 Free Standing Specimens
7.2 Coating techniques
7.2.1 Sputter Coating
7.2.1 a Tuning a Sputter Coater
7.2.2 Carbon String Coating
7.2.3 Coating Specimens - A Warning
8. Advanced operating techniques
8.1 High resolution operation
8.1 .a The highest accelerating voltage
8.1.b Optimise the electron gun geometry
8.1 .c Align the gun
8.1.d The shortest possible working distance
8.1 .e The smallest final/objective aperture
8.1 .f The smallest spot size
8.1.1 Operating Precautions
8.2 Low magnification
8.2.a To provide protection
8.2.b To provide a strong signal
8.2.1 Working Distance
8.3 Optimising signal levels
8.3.1 Determination of Signal Type
8.3.1 a Viewing the Image
8.3.1 b Viewing the Wave Form Monitor
8.3.1 c Conclusions
8.4 Secondary electron images
8.4.1 Operating Parameters
8.5 Backscattered electron images
8.5.1 Using the Everhart-Thornley Detector
8.5.2 Dedicated Backscattered Electron Detectors
8.6 Unknown specimens
8.7 Imaging problems
8.7.1 Specimen Damage
8.7.2 Resolution Limitation
8.7.3 Instrument Performance Analysis
9. Improving instrument performance
9.1 The electron gun
9.1.1 Filament Modifications
9.1.1 a Sharpened Filaments
9.1.1 b Pointed FHaments
9.1.1 c Lanthanum Hexaboride
9.1.2 Reid Emission
9.2 Signal detection
9.2.1 Field Immersion Microscopes
9.2.1 a Single Stage Double Detection Systems
10. Maintenance procedures
10.1 Changing a filament
10.1.1 Filament Change Procedure
10.1.1 a Types of Filament Break
10.1.1 b Filament Ceramic Evaluation
10.1.2 The Cathode Assembly
10.1.2 a Cleaning by Hand
10.1.2 b Ultrasonic Cleaning
10.2 The electron optical column
10.2.1 Aperture Cleaning
10.2.1 a Cleaning Platinum Apertures
10.2.1 b Cleaning Molybdenum Apertures
10.2.1 c Checking Apertures
10.3 The specimen area
10.4 Scintillator maintenance
10.5 Vacuum system maintenance
10.5.1 Rotary Pump
10.5.2 Diffusion Pump
A. APPENDIX A Operating the vacuum system
A.1 Switching on
A.2 Switching off
A.3 Letting air into the column
B. APPENDIX B Operating procedures -
Instrument Alignment
B.1 Switching on the high voltage and gun alignment
B.2 Closing down
C. APPENDIX C Operating procedures -
Specimen observation
CI Adjusting the image quality
|
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| id | DE-604.BV023760605 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:36:16Z |
| institution | BVB |
| isbn | 0850770939 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017402848 |
| oclc_num | 915817783 |
| open_access_boolean | |
| owner | DE-634 |
| owner_facet | DE-634 |
| physical | 113 S. zahlr. Ill. und graph. Darst. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | Lodgemark Press |
| record_format | marc |
| spelling | Working with a scanning electron microscope words by S. K. Chapman Chislehurst Lodgemark Press 1986 113 S. zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 s DE-604 Chapman, Steve K. Sonstige oth HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017402848&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Working with a scanning electron microscope Elektronenmikroskopie (DE-588)4014327-2 gnd |
| subject_GND | (DE-588)4014327-2 |
| title | Working with a scanning electron microscope |
| title_auth | Working with a scanning electron microscope |
| title_exact_search | Working with a scanning electron microscope |
| title_full | Working with a scanning electron microscope words by S. K. Chapman |
| title_fullStr | Working with a scanning electron microscope words by S. K. Chapman |
| title_full_unstemmed | Working with a scanning electron microscope words by S. K. Chapman |
| title_short | Working with a scanning electron microscope |
| title_sort | working with a scanning electron microscope |
| topic | Elektronenmikroskopie (DE-588)4014327-2 gnd |
| topic_facet | Elektronenmikroskopie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017402848&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT chapmanstevek workingwithascanningelectronmicroscope |