Fundamentals of silicon integrated device technology: 1. Oxidation, diffusion and epitaxy
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Englewood Cliffs, N.J.
Prentice-Hall
[1967]
|
| Schlagworte: | |
| Beschreibung: | XIV, 345 S. Ill., graph.Darst. |
Internformat
MARC
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| id | DE-604.BV023703852 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:32:47Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017204525 |
| oclc_num | 915843624 |
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| owner_facet | DE-11 |
| physical | XIV, 345 S. Ill., graph.Darst. |
| publishDate | 1967 |
| publishDateSearch | 1967 |
| publishDateSort | 1967 |
| publisher | Prentice-Hall |
| record_format | marc |
| spelling | Fundamentals of silicon integrated device technology 1. Oxidation, diffusion and epitaxy ed. by Robert M. Burger Englewood Cliffs, N.J. Prentice-Hall [1967] XIV, 345 S. Ill., graph.Darst. txt rdacontent n rdamedia nc rdacarrier Oxidation (DE-588)4137187-2 gnd rswk-swf Diffusion (DE-588)4012277-3 gnd rswk-swf Epitaxie (DE-588)4152545-0 gnd rswk-swf Oxidation (DE-588)4137187-2 s DE-604 Diffusion (DE-588)4012277-3 s Epitaxie (DE-588)4152545-0 s Burger, Robert M. Sonstige oth (DE-604)BV002407094 1 |
| spellingShingle | Fundamentals of silicon integrated device technology Oxidation (DE-588)4137187-2 gnd Diffusion (DE-588)4012277-3 gnd Epitaxie (DE-588)4152545-0 gnd |
| subject_GND | (DE-588)4137187-2 (DE-588)4012277-3 (DE-588)4152545-0 |
| title | Fundamentals of silicon integrated device technology |
| title_auth | Fundamentals of silicon integrated device technology |
| title_exact_search | Fundamentals of silicon integrated device technology |
| title_full | Fundamentals of silicon integrated device technology 1. Oxidation, diffusion and epitaxy ed. by Robert M. Burger |
| title_fullStr | Fundamentals of silicon integrated device technology 1. Oxidation, diffusion and epitaxy ed. by Robert M. Burger |
| title_full_unstemmed | Fundamentals of silicon integrated device technology 1. Oxidation, diffusion and epitaxy ed. by Robert M. Burger |
| title_short | Fundamentals of silicon integrated device technology |
| title_sort | fundamentals of silicon integrated device technology oxidation diffusion and epitaxy |
| topic | Oxidation (DE-588)4137187-2 gnd Diffusion (DE-588)4012277-3 gnd Epitaxie (DE-588)4152545-0 gnd |
| topic_facet | Oxidation Diffusion Epitaxie |
| volume_link | (DE-604)BV002407094 |
| work_keys_str_mv | AT burgerrobertm fundamentalsofsiliconintegrateddevicetechnology1 |