MST news: international magazine on smart systems technologies No. 21(1997). Materials for microsystems
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Teltow
VDI/VDE Innovation und Technik GmbH
1997
Teltow VDI/VDE Technologiezentrum Informationstechnik GmbH 1997 Berlin NEXUS, Fraunhofer-Inst. für Siliziumtechnologie 1997 |
Schlagworte: | |
Beschreibung: | 48 S. Ill., graph. Darst. 30 cm |
Internformat
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Datensatz im Suchindex
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id | DE-604.BV023702271 |
illustrated | Illustrated |
indexdate | 2025-01-10T13:15:14Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017202944 |
oclc_num | 915841741 |
open_access_boolean | |
owner | DE-522 |
owner_facet | DE-522 |
physical | 48 S. Ill., graph. Darst. 30 cm |
publishDate | 1997 |
publishDateSearch | 1997 |
publishDateSort | 1997 |
publisher | VDI/VDE Innovation und Technik GmbH VDI/VDE Technologiezentrum Informationstechnik GmbH NEXUS, Fraunhofer-Inst. für Siliziumtechnologie |
record_format | marc |
spelling | MST news international magazine on smart systems technologies No. 21(1997). Materials for microsystems Teltow VDI/VDE Innovation und Technik GmbH 1997 Teltow VDI/VDE Technologiezentrum Informationstechnik GmbH 1997 Berlin NEXUS, Fraunhofer-Inst. für Siliziumtechnologie 1997 48 S. Ill., graph. Darst. 30 cm txt rdacontent n rdamedia nc rdacarrier Material (DE-588)4169078-3 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s DE-604 Material (DE-588)4169078-3 s (DE-604)BV017451263 21 |
spellingShingle | MST news international magazine on smart systems technologies Material (DE-588)4169078-3 gnd Mikroelektronik (DE-588)4039207-7 gnd |
subject_GND | (DE-588)4169078-3 (DE-588)4039207-7 |
title | MST news international magazine on smart systems technologies |
title_auth | MST news international magazine on smart systems technologies |
title_exact_search | MST news international magazine on smart systems technologies |
title_full | MST news international magazine on smart systems technologies No. 21(1997). Materials for microsystems |
title_fullStr | MST news international magazine on smart systems technologies No. 21(1997). Materials for microsystems |
title_full_unstemmed | MST news international magazine on smart systems technologies No. 21(1997). Materials for microsystems |
title_short | MST news |
title_sort | mst news international magazine on smart systems technologies materials for microsystems |
title_sub | international magazine on smart systems technologies |
topic | Material (DE-588)4169078-3 gnd Mikroelektronik (DE-588)4039207-7 gnd |
topic_facet | Material Mikroelektronik |
volume_link | (DE-604)BV017451263 |