Emerging lithographic technologies IV:
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2000
|
| Schriftenreihe: | SPIE proceedings series
3997 |
| Schlagworte: | |
| Beschreibung: | XV, 900 S. Ill., graph. Darst. |
| ISBN: | 0819436151 |
Internformat
MARC
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift Santa Clara <Calif., 2000> |
| id | DE-604.BV023699194 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:32:44Z |
| institution | BVB |
| institution_GND | (DE-588)6018928-9 |
| isbn | 0819436151 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017199797 |
| oclc_num | 247335897 |
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| physical | XV, 900 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series | SPIE proceedings series |
| series2 | SPIE proceedings series |
| spelling | Emerging lithographic technologies IV [Emerging Lithographic Technologies IV Conference], 28 February - 1 March 2000, Santa Clara, USA. Sponsored by SPIE, the International Society for Optical Engineering. Elizabeth A. Dobisz, chair/ed Bellingham, Wash. SPIE 2000 XV, 900 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier SPIE proceedings series 3997 Röntgenlithografie (DE-588)4178314-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Santa Clara <Calif., 2000> gnd rswk-swf Röntgenlithografie (DE-588)4178314-1 s DE-604 Santa Clara <Calif., 2000> f Dobisz, Elizabeth A. Sonstige oth Emerging Lithographic Technologies Conference 4 2000 Santa Clara, Calif. Sonstige (DE-588)6018928-9 oth SPIE proceedings series 3997 (DE-604)BV000010887 3997 |
| spellingShingle | Emerging lithographic technologies IV SPIE proceedings series Röntgenlithografie (DE-588)4178314-1 gnd |
| subject_GND | (DE-588)4178314-1 (DE-588)1071861417 |
| title | Emerging lithographic technologies IV |
| title_auth | Emerging lithographic technologies IV |
| title_exact_search | Emerging lithographic technologies IV |
| title_full | Emerging lithographic technologies IV [Emerging Lithographic Technologies IV Conference], 28 February - 1 March 2000, Santa Clara, USA. Sponsored by SPIE, the International Society for Optical Engineering. Elizabeth A. Dobisz, chair/ed |
| title_fullStr | Emerging lithographic technologies IV [Emerging Lithographic Technologies IV Conference], 28 February - 1 March 2000, Santa Clara, USA. Sponsored by SPIE, the International Society for Optical Engineering. Elizabeth A. Dobisz, chair/ed |
| title_full_unstemmed | Emerging lithographic technologies IV [Emerging Lithographic Technologies IV Conference], 28 February - 1 March 2000, Santa Clara, USA. Sponsored by SPIE, the International Society for Optical Engineering. Elizabeth A. Dobisz, chair/ed |
| title_short | Emerging lithographic technologies IV |
| title_sort | emerging lithographic technologies iv |
| topic | Röntgenlithografie (DE-588)4178314-1 gnd |
| topic_facet | Röntgenlithografie Konferenzschrift Santa Clara <Calif., 2000> |
| volume_link | (DE-604)BV000010887 |
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