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Plasma nanoscience: basic concepts and applications of deterministic nanofabrication

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Bibliographic Details
Main Author:	Ostrikov, Kostya (Author)
Format:	Book
Language:	English
Published:	Weinheim WILEY-VCH 2008
Subjects:	Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie Plasmatechnik Kaltes Plasma
Online Access:	Inhaltstext Inhaltsverzeichnis
Physical Description:	XXV, 538 S. Ill., graph. Darst.
ISBN:	9783527407408 3527407405

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adam_text	VII Contents Preface XI Acronyms XXIII 1 Introduction 1 1.1 Main Concepts and Issues 2 1.2 Self-Organized Nanoworld, Commonsense Science of the Small and Socio-Economie Push 7 1.3 Nature's Plasma Nanofab and Nanotechnology Research Directions 22 1.4 Deterministic Nanofabrication and Plasma Nanoscience 28 1.5 Structure of the Monograph and Advice to the Reader 43 2 What Makes Low-Temperature Plasmas a Versatile Nanotool? 49 2.1 Basic Ideas and Major Issues 50 2.2 Plasma Nanofabrication Concept 55 2.3 Useful Plasma Features for Nanoscale Fabrication 66 2.4 Choice and Generation of Building and Working Units 72 2.5 Effect of the Plasma Sheath 82 2.6 How Plasmas Affect Elementary Surface Processes 97 2.7 Concluding Remarks 105 3 Specific Examples and Practical Framework 107 3.1 Semiconducting Nanofilms and Nanostructures 207 3.2 Carbon-Based Nanofilms and Nanostructures 227 3.3 Practical Framework - Bridging Nine Orders of Magnitude 233 3.4 Concluding Remarks 240 4 Generation of Building and Working Units 145 4.1 Species in Methane-Based Plasmas for Synthesis of Carbon Nanostructures 246 Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication Kostya (Ken) Ostrikov Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim ISBN: 978-3-527-40740-8 VIII Contents 4.1.1 Experimental Details 149 4.1.2 Basic Assumptions of the Model 252 4.1.3 Particle and Power Balance in Plasma Discharge 253 АЛЛ Densities of Neutral and Charged Species 155 4.1.4.1 Effect of RF Power 156 4.1.4.2 Effect of Argon and Methane Dilution 158 4.1.5 Deposited Neutral and Ion Fluxes 159 4.1.6 Most Important Points and Summary 162 4.2 Species in Acetylene-Based Plasmas for Synthesis of Carbon Nanostructures 164 4.2.1 Formulation of the Problem 165 4.2.2 Number Densities of the Main Discharge Species 167 4.2.3 Fluxes of Building and Working Units 171 4.3 Nanocluster and Nanoparticle Building Units 177 4.3.1 Nano-Sized Building Units from Reactive Plasmas 177 4.3.2 Nanoparticle Generation: Other Examples 182 4.4 Concluding Remarks 294 5 Transport, Manipulation and Deposition of Building and Working Units 199 5.1 Microscopic Ion Fluxes During Nanoassembly Processes 200 5.1.1 Formulation and Model 202 5.1.2 Numerical Results 204 5.1.3 Interpretation of Numerical Results 209 5.2 Nanoparticle Manipulation in the Synthesis of Carbon Nanostructures 223 5.2.1 Nanoparticle Manipulation: Experimental Results 225 5.2.2 Nanoparticle Manipulation: Numerical Model 220 5.3 Selected-Area Nanoparticle Deposition Onto Microstructured Surfaces 227 5.3.1 Numerical Model and Simulation Parameters 228 5.3.2 Selected-Area Nanoparticle Deposition 232 5.3.3 Practical Implementation Framework 237 5.4 Electrostatic Nanoparticle Filter 239 5.5 Concluding Remarks 244 6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes 249 K. Ostrifav and I. Levchenko 6.1 Synthesis of Self-Organizing Arrays of Quantum Dots: Objectives and Approach 252 Contents IX 6.2 Initial Stage of Ge/Si Nanodot Formation Using Nanocluster Fluxes 272 6.2.1 Physical Model and Numerical Details 273 6.2.2 Physical Interpretation and Relevant Experimental Data 277 6.3 Binary SixC1.x Quantum Dot Systems: Initial Growth Stage 282 6.3.1 Adatom Fluxes at Initial Growth Stages of SixCa_x Quantum Dots 282 6.3.2 Control of Core-Shell Structure and Elemental Composition of SixC!.x Quantum Dots 294 6.4 Self-Organization in Ge/Si Nanodot Arrays at Advanced Growth Stages 301 6.4.1 Model of Nanopattern Development 303 6.4.2 Ge/Si QD Size and Positional Uniformity 307 6.4.3 Self-Organization in Ge/Si QD Patterns: Driving Forces and Features 320 6.5 Self-Organized Nanodot Arrays: Plasma-Specific Effects 324 6.5.1 Matching Balance and Supply of BUs: a Requirement for Deterministic Nanoassembly 325 6.5.2 Other General Considerations 327 6.5.3 Plasma-Related Effects at Initial Growth Stages 329 6.5.4 Separate Growth of Individual Nanostructures 322 6.5.5 Self-Organization in Large Nanostructure Arrays 327 6.6 Concluding Remarks 332 7 Ion-Focusing Nanoscale Objects 341 7.1 General Considerations and Elementary Processes 343 7.2 Plasma-Specific Effects on the Growth of Carbon Nanotubes and Related Nanostructures 356 7.2.1 Plasma-Related Effects on Carbon Nanofibers 357 7.2.2 Effects of Ions and Atomic Hydrogen on the Growth of SWCNTs 364 7.3 Plasma-Controlled Reshaping of Carbon Nanostructures 373 7.3.1 Self-Sharpening of Platelet-Structured Nanocones 373 7.3.2 Plasma-Based Deterministic Shape Control in Nanotip Assembly 380 7.4 Self-Organization of Large Nanotip Arrays 385 7.5 From Non-Uniform Catalyst Islands to Uniform Nanoarrays 392 7.5.1 Experiment and Film Characterization 393 7.5.2 Growth Model and Numerical Simulations 397 7.6 Other Ion-Focusing Nanostructures 402 7.7 Concluding Remarks 407 X Contents 8 Building and Working Units at Work: Applications 415 8.1 Plasma-Based Post-Processing of Nanoarrays 416 8.1.1 Post-Processing of Nanotube Arrays 418 8.1.2 Functional Monolayer Coating of Nanorod Arrays 422 8.2 i-PVD of Metal Nanodot Arrays Using Nanoporous Templates 427 8.3 Metal Oxide Nanostructures: Plasma-Generated BUs Create Other BUs on the Surface 434 8.4 Biocompatible TiO2 Films: How Building Units Work 440 8.4.1 TiO2 Film Deposition and Characterization 442 8.4.2 In Vitro Apatite Formation 446 8.4.3 Growth Kinetics: Building Units at Work 448 8.4.4 Building Units In Vitro: Inducing Biomimetic Response 453 8.5 Concluding Remarks 456 9 Conclusions and Outlook 461 9.1 Determinism and Higher Complexity 464 9.2 Plasma-Related Features and Areas of Competitive Advantage 467 9.3 Outlook for the Future 470 9.4 Final Remarks 479 10 Appendix A. Reactions and Rate Equations 483 10.1 Plasmas of Ar + H2+ CH4 Gas Mixtures (Section 4.1) 483 10.2 Plasmas of Ar + H2 + C2H2 Gas Mixtures (Section 4.2) 486 11 Appendix B. Why Plasma-based Nanoassembly: Further Reasons 49Í 11.1 Carbon Nanotubes and Related Structures 492 11.2 Semiconductor Nanostructures and Nanomaterials 493 11.3 Other Nanostructures and Nanoscale Objects 494 11.4 Materials with Nanoscale Features 496 11.5 Plasma-Related Issues and Fabrication Techniques 497 References 499 Index 529
adam_txt	VII Contents Preface XI Acronyms XXIII 1 Introduction 1 1.1 Main Concepts and Issues 2 1.2 Self-Organized Nanoworld, Commonsense Science of the Small and Socio-Economie Push 7 1.3 Nature's Plasma Nanofab and Nanotechnology Research Directions 22 1.4 Deterministic Nanofabrication and Plasma Nanoscience 28 1.5 Structure of the Monograph and Advice to the Reader 43 2 What Makes Low-Temperature Plasmas a Versatile Nanotool? 49 2.1 Basic Ideas and Major Issues 50 2.2 Plasma Nanofabrication Concept 55 2.3 Useful Plasma Features for Nanoscale Fabrication 66 2.4 Choice and Generation of Building and Working Units 72 2.5 Effect of the Plasma Sheath 82 2.6 How Plasmas Affect Elementary Surface Processes 97 2.7 Concluding Remarks 105 3 Specific Examples and Practical Framework 107 3.1 Semiconducting Nanofilms and Nanostructures 207 3.2 Carbon-Based Nanofilms and Nanostructures 227 3.3 Practical Framework - Bridging Nine Orders of Magnitude 233 3.4 Concluding Remarks 240 4 Generation of Building and Working Units 145 4.1 Species in Methane-Based Plasmas for Synthesis of Carbon Nanostructures 246 Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication Kostya (Ken) Ostrikov Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim ISBN: 978-3-527-40740-8 VIII Contents 4.1.1 Experimental Details 149 4.1.2 Basic Assumptions of the Model 252 4.1.3 Particle and Power Balance in Plasma Discharge 253 АЛЛ Densities of Neutral and Charged Species 155 4.1.4.1 Effect of RF Power 156 4.1.4.2 Effect of Argon and Methane Dilution 158 4.1.5 Deposited Neutral and Ion Fluxes 159 4.1.6 Most Important Points and Summary 162 4.2 Species in Acetylene-Based Plasmas for Synthesis of Carbon Nanostructures 164 4.2.1 Formulation of the Problem 165 4.2.2 Number Densities of the Main Discharge Species 167 4.2.3 Fluxes of Building and Working Units 171 4.3 Nanocluster and Nanoparticle Building Units 177 4.3.1 Nano-Sized Building Units from Reactive Plasmas 177 4.3.2 Nanoparticle Generation: Other Examples 182 4.4 Concluding Remarks 294 5 Transport, Manipulation and Deposition of Building and Working Units 199 5.1 Microscopic Ion Fluxes During Nanoassembly Processes 200 5.1.1 Formulation and Model 202 5.1.2 Numerical Results 204 5.1.3 Interpretation of Numerical Results 209 5.2 Nanoparticle Manipulation in the Synthesis of Carbon Nanostructures 223 5.2.1 Nanoparticle Manipulation: Experimental Results 225 5.2.2 Nanoparticle Manipulation: Numerical Model 220 5.3 Selected-Area Nanoparticle Deposition Onto Microstructured Surfaces 227 5.3.1 Numerical Model and Simulation Parameters 228 5.3.2 Selected-Area Nanoparticle Deposition 232 5.3.3 Practical Implementation Framework 237 5.4 Electrostatic Nanoparticle Filter 239 5.5 Concluding Remarks 244 6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes 249 K. Ostrifav and I. Levchenko 6.1 Synthesis of Self-Organizing Arrays of Quantum Dots: Objectives and Approach 252 Contents IX 6.2 Initial Stage of Ge/Si Nanodot Formation Using Nanocluster Fluxes 272 6.2.1 Physical Model and Numerical Details 273 6.2.2 Physical Interpretation and Relevant Experimental Data 277 6.3 Binary SixC1.x Quantum Dot Systems: Initial Growth Stage 282 6.3.1 Adatom Fluxes at Initial Growth Stages of SixCa_x Quantum Dots 282 6.3.2 Control of Core-Shell Structure and Elemental Composition of SixC!.x Quantum Dots 294 6.4 Self-Organization in Ge/Si Nanodot Arrays at Advanced Growth Stages 301 6.4.1 Model of Nanopattern Development 303 6.4.2 Ge/Si QD Size and Positional Uniformity 307 6.4.3 Self-Organization in Ge/Si QD Patterns: Driving Forces and Features 320 6.5 Self-Organized Nanodot Arrays: Plasma-Specific Effects 324 6.5.1 Matching Balance and Supply of BUs: a Requirement for Deterministic Nanoassembly 325 6.5.2 Other General Considerations 327 6.5.3 Plasma-Related Effects at Initial Growth Stages 329 6.5.4 Separate Growth of Individual Nanostructures 322 6.5.5 Self-Organization in Large Nanostructure Arrays 327 6.6 Concluding Remarks 332 7 Ion-Focusing Nanoscale Objects 341 7.1 General Considerations and Elementary Processes 343 7.2 Plasma-Specific Effects on the Growth of Carbon Nanotubes and Related Nanostructures 356 7.2.1 Plasma-Related Effects on Carbon Nanofibers 357 7.2.2 Effects of Ions and Atomic Hydrogen on the Growth of SWCNTs 364 7.3 Plasma-Controlled Reshaping of Carbon Nanostructures 373 7.3.1 Self-Sharpening of Platelet-Structured Nanocones 373 7.3.2 Plasma-Based Deterministic Shape Control in Nanotip Assembly 380 7.4 Self-Organization of Large Nanotip Arrays 385 7.5 From Non-Uniform Catalyst Islands to Uniform Nanoarrays 392 7.5.1 Experiment and Film Characterization 393 7.5.2 Growth Model and Numerical Simulations 397 7.6 Other Ion-Focusing Nanostructures 402 7.7 Concluding Remarks 407 X Contents 8 Building and Working Units at Work: Applications 415 8.1 Plasma-Based Post-Processing of Nanoarrays 416 8.1.1 Post-Processing of Nanotube Arrays 418 8.1.2 Functional Monolayer Coating of Nanorod Arrays 422 8.2 i-PVD of Metal Nanodot Arrays Using Nanoporous Templates 427 8.3 Metal Oxide Nanostructures: Plasma-Generated BUs Create Other BUs on the Surface 434 8.4 Biocompatible TiO2 Films: How Building Units Work 440 8.4.1 TiO2 Film Deposition and Characterization 442 8.4.2 In Vitro Apatite Formation 446 8.4.3 Growth Kinetics: Building Units at Work 448 8.4.4 Building Units In Vitro: Inducing Biomimetic Response 453 8.5 Concluding Remarks 456 9 Conclusions and Outlook 461 9.1 Determinism and Higher Complexity 464 9.2 Plasma-Related Features and Areas of Competitive Advantage 467 9.3 Outlook for the Future 470 9.4 Final Remarks 479 10 Appendix A. Reactions and Rate Equations 483 10.1 Plasmas of Ar + H2+ CH4 Gas Mixtures (Section 4.1) 483 10.2 Plasmas of Ar + H2 + C2H2 Gas Mixtures (Section 4.2) 486 11 Appendix B. Why Plasma-based Nanoassembly: Further Reasons 49Í 11.1 Carbon Nanotubes and Related Structures 492 11.2 Semiconductor Nanostructures and Nanomaterials 493 11.3 Other Nanostructures and Nanoscale Objects 494 11.4 Materials with Nanoscale Features 496 11.5 Plasma-Related Issues and Fabrication Techniques 497 References 499 Index 529
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spelling	Ostrikov, Kostya Verfasser (DE-588)133247171 aut Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov Weinheim WILEY-VCH 2008 XXV, 538 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Kaltes Plasma (DE-588)4248658-0 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s Kaltes Plasma (DE-588)4248658-0 s Plasmatechnik (DE-588)4140353-8 s DE-604 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3070181&prov=M&dok_var=1&dok_ext=htm Inhaltstext Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016586786&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Ostrikov, Kostya Plasma nanoscience basic concepts and applications of deterministic nanofabrication Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd Plasmatechnik (DE-588)4140353-8 gnd Kaltes Plasma (DE-588)4248658-0 gnd
subject_GND	(DE-588)4327470-5 (DE-588)4140353-8 (DE-588)4248658-0
title	Plasma nanoscience basic concepts and applications of deterministic nanofabrication
title_auth	Plasma nanoscience basic concepts and applications of deterministic nanofabrication
title_exact_search	Plasma nanoscience basic concepts and applications of deterministic nanofabrication
title_exact_search_txtP	Plasma nanoscience basic concepts and applications of deterministic nanofabrication
title_full	Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov
title_fullStr	Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov
title_full_unstemmed	Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov
title_short	Plasma nanoscience
title_sort	plasma nanoscience basic concepts and applications of deterministic nanofabrication
title_sub	basic concepts and applications of deterministic nanofabrication
topic	Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd Plasmatechnik (DE-588)4140353-8 gnd Kaltes Plasma (DE-588)4248658-0 gnd
topic_facet	Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie Plasmatechnik Kaltes Plasma
url	http://deposit.dnb.de/cgi-bin/dokserv?id=3070181&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016586786&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT ostrikovkostya plasmananosciencebasicconceptsandapplicationsofdeterministicnanofabrication

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