Plasma nanoscience: basic concepts and applications of deterministic nanofabrication
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| Format: | Buch |
| Sprache: | English |
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Weinheim
WILEY-VCH
2008
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| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | XXV, 538 S. Ill., graph. Darst. |
| ISBN: | 9783527407408 3527407405 |
Internformat
MARC
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| 100 | 1 | |a Ostrikov, Kostya |e Verfasser |0 (DE-588)133247171 |4 aut | |
| 245 | 1 | 0 | |a Plasma nanoscience |b basic concepts and applications of deterministic nanofabrication |c Kostya (Ken) Ostrikov |
| 264 | 1 | |a Weinheim |b WILEY-VCH |c 2008 | |
| 300 | |a XXV, 538 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Nanomatériaux | |
| 650 | 4 | |a Plasmas froids | |
| 650 | 4 | |a Plasmas, Technique des | |
| 650 | 4 | |a Low temperature plasmas | |
| 650 | 4 | |a Nanostructured materials | |
| 650 | 4 | |a Plasma engineering | |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
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| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-016586786 | |
Datensatz im Suchindex
| _version_ | 1805090782198104064 |
|---|---|
| adam_text |
VII
Contents
Preface
XI
Acronyms
XXIII
1
Introduction
1
1.1
Main Concepts and Issues
2
1.2
Self-Organized Nanoworld, Commonsense Science of the Small
and
Socio-Economie
Push
7
1.3
Nature's Plasma Nanofab and Nanotechnology Research
Directions
22
1.4
Deterministic Nanofabrication and Plasma Nanoscience
28
1.5
Structure of the Monograph and Advice to the Reader
43
2
What Makes Low-Temperature Plasmas a Versatile Nanotool?
49
2.1
Basic Ideas and Major Issues
50
2.2
Plasma Nanofabrication Concept
55
2.3
Useful Plasma Features for Nanoscale Fabrication
66
2.4
Choice and Generation of Building and Working Units
72
2.5
Effect of the Plasma Sheath
82
2.6
How Plasmas Affect Elementary Surface Processes
97
2.7
Concluding Remarks
105
3
Specific Examples and Practical Framework
107
3.1
Semiconducting Nanofilms and Nanostructures
207
3.2
Carbon-Based Nanofilms and Nanostructures
227
3.3
Practical Framework
-
Bridging Nine Orders of Magnitude
233
3.4
Concluding Remarks
240
4
Generation of Building and Working Units
145
4.1
Species in Methane-Based Plasmas for Synthesis of Carbon
Nanostructures
246
Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication
Kostya (Ken) Ostrikov
Copyright
© 2008
WILEY-VCH
Verlag
GmbH
&
Co. KGaA,
Weinheim
ISBN:
978-3-527-40740-8
VIII Contents
4.1.1
Experimental
Details 149
4.1.2
Basic
Assumptions of the
Model
252
4.1.3
Particle and Power Balance in Plasma Discharge
253
АЛЛ
Densities of Neutral and Charged Species
155
4.1.4.1
Effect of RF Power
156
4.1.4.2
Effect of Argon and Methane Dilution
158
4.1.5
Deposited Neutral and Ion Fluxes
159
4.1.6
Most Important Points and Summary
162
4.2
Species in Acetylene-Based Plasmas for Synthesis of
Carbon Nanostructures
164
4.2.1
Formulation of the Problem
165
4.2.2
Number Densities of the Main Discharge Species
167
4.2.3
Fluxes of Building and Working Units
171
4.3
Nanocluster and Nanoparticle Building Units
177
4.3.1
Nano-Sized Building Units from Reactive Plasmas
177
4.3.2
Nanoparticle Generation: Other Examples
182
4.4
Concluding Remarks
294
5
Transport, Manipulation and Deposition of Building and
Working Units
199
5.1
Microscopic Ion Fluxes During Nanoassembly Processes
200
5.1.1
Formulation and Model
202
5.1.2
Numerical Results
204
5.1.3
Interpretation of Numerical Results
209
5.2
Nanoparticle Manipulation in the Synthesis of Carbon
Nanostructures
223
5.2.1
Nanoparticle Manipulation: Experimental Results
225
5.2.2
Nanoparticle Manipulation: Numerical Model
220
5.3
Selected-Area Nanoparticle Deposition Onto Microstructured
Surfaces
227
5.3.1
Numerical Model and Simulation Parameters
228
5.3.2
Selected-Area Nanoparticle Deposition
232
5.3.3
Practical Implementation Framework
237
5.4
Electrostatic Nanoparticle Filter
239
5.5
Concluding Remarks
244
6
Surface Science of Plasma-Exposed Surfaces and
Self-Organization Processes
249
K. Ostrifav and I. Levchenko
6.1
Synthesis of Self-Organizing Arrays of Quantum Dots:
Objectives and Approach
252
Contents
IX
6.2 Initial
Stage of Ge/Si
Nanodot Formation Using Nanocluster
Fluxes
272
6.2.1
Physical Model and Numerical Details
273
6.2.2
Physical Interpretation and Relevant Experimental Data
277
6.3
Binary SixC1.x Quantum Dot Systems: Initial Growth Stage
282
6.3.1
Adatom
Fluxes at Initial Growth Stages of SixCa_x Quantum
Dots
282
6.3.2
Control of Core-Shell Structure and Elemental Composition
of SixC!.x Quantum Dots
294
6.4
Self-Organization in Ge/Si Nanodot Arrays at Advanced
Growth Stages
301
6.4.1
Model of Nanopattern Development
303
6.4.2
Ge/Si QD
Size and Positional Uniformity
307
6.4.3
Self-Organization in
Ge/Si QD
Patterns: Driving Forces and
Features
320
6.5
Self-Organized Nanodot Arrays: Plasma-Specific Effects
324
6.5.1
Matching Balance and Supply of BUs: a Requirement for
Deterministic Nanoassembly
325
6.5.2
Other General Considerations
327
6.5.3
Plasma-Related Effects at Initial Growth Stages
329
6.5.4
Separate Growth of Individual Nanostructures
322
6.5.5
Self-Organization in Large Nanostructure Arrays
327
6.6
Concluding Remarks
332
7
Ion-Focusing Nanoscale Objects
341
7.1
General Considerations and Elementary Processes
343
7.2
Plasma-Specific Effects on the Growth of Carbon Nanotubes
and Related Nanostructures
356
7.2.1
Plasma-Related Effects on Carbon Nanofibers
357
7.2.2
Effects of Ions and Atomic Hydrogen on the Growth of
SWCNTs
364
7.3
Plasma-Controlled Reshaping of Carbon Nanostructures
373
7.3.1
Self-Sharpening of Platelet-Structured Nanocones
373
7.3.2
Plasma-Based Deterministic Shape Control in Nanotip
Assembly
380
7.4
Self-Organization of Large Nanotip Arrays
385
7.5
From Non-Uniform Catalyst Islands to Uniform
Nanoarrays
392
7.5.1
Experiment and Film Characterization
393
7.5.2
Growth Model and Numerical Simulations
397
7.6
Other Ion-Focusing Nanostructures
402
7.7
Concluding Remarks
407
X
Contents
8 Building
and Working Units at Work:
Applications 415
8.1
Plasma-Based Post-Processing of Nanoarrays
416
8.1.1
Post-Processing of Nanotube Arrays
418
8.1.2
Functional Monolayer Coating of Nanorod Arrays
422
8.2
i-PVD of Metal Nanodot Arrays Using Nanoporous
Templates
427
8.3
Metal Oxide Nanostructures: Plasma-Generated BUs Create
Other BUs on the Surface
434
8.4
Biocompatible TiO2
Films: How Building Units Work
440
8.4.1
TiO2 Film Deposition and Characterization
442
8.4.2
In Vitro Apatite Formation
446
8.4.3
Growth Kinetics: Building Units at Work
448
8.4.4
Building Units In Vitro: Inducing Biomimetic Response
453
8.5
Concluding Remarks
456
9
Conclusions and Outlook
461
9.1
Determinism and Higher Complexity
464
9.2
Plasma-Related Features and Areas of Competitive
Advantage
467
9.3
Outlook for the Future
470
9.4
Final Remarks
479
10
Appendix A. Reactions and Rate Equations
483
10.1
Plasmas of
Ar +
H2+ CH4 Gas Mixtures (Section
4.1) 483
10.2
Plasmas of
Ar +
H2
+
C2H2 Gas Mixtures (Section
4.2) 486
11
Appendix B. Why Plasma-based Nanoassembly:
Further Reasons
49Í
11.1
Carbon Nanotubes and Related Structures
492
11.2
Semiconductor Nanostructures and Nanomaterials
493
11.3
Other Nanostructures and Nanoscale Objects
494
11.4
Materials with Nanoscale Features
496
11.5
Plasma-Related Issues and Fabrication Techniques
497
References
499
Index
529 |
| adam_txt |
VII
Contents
Preface
XI
Acronyms
XXIII
1
Introduction
1
1.1
Main Concepts and Issues
2
1.2
Self-Organized Nanoworld, Commonsense Science of the Small
and
Socio-Economie
Push
7
1.3
Nature's Plasma Nanofab and Nanotechnology Research
Directions
22
1.4
Deterministic Nanofabrication and Plasma Nanoscience
28
1.5
Structure of the Monograph and Advice to the Reader
43
2
What Makes Low-Temperature Plasmas a Versatile Nanotool?
49
2.1
Basic Ideas and Major Issues
50
2.2
Plasma Nanofabrication Concept
55
2.3
Useful Plasma Features for Nanoscale Fabrication
66
2.4
Choice and Generation of Building and Working Units
72
2.5
Effect of the Plasma Sheath
82
2.6
How Plasmas Affect Elementary Surface Processes
97
2.7
Concluding Remarks
105
3
Specific Examples and Practical Framework
107
3.1
Semiconducting Nanofilms and Nanostructures
207
3.2
Carbon-Based Nanofilms and Nanostructures
227
3.3
Practical Framework
-
Bridging Nine Orders of Magnitude
233
3.4
Concluding Remarks
240
4
Generation of Building and Working Units
145
4.1
Species in Methane-Based Plasmas for Synthesis of Carbon
Nanostructures
246
Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication
Kostya (Ken) Ostrikov
Copyright
© 2008
WILEY-VCH
Verlag
GmbH
&
Co. KGaA,
Weinheim
ISBN:
978-3-527-40740-8
VIII Contents
4.1.1
Experimental
Details 149
4.1.2
Basic
Assumptions of the
Model
252
4.1.3
Particle and Power Balance in Plasma Discharge
253
АЛЛ
Densities of Neutral and Charged Species
155
4.1.4.1
Effect of RF Power
156
4.1.4.2
Effect of Argon and Methane Dilution
158
4.1.5
Deposited Neutral and Ion Fluxes
159
4.1.6
Most Important Points and Summary
162
4.2
Species in Acetylene-Based Plasmas for Synthesis of
Carbon Nanostructures
164
4.2.1
Formulation of the Problem
165
4.2.2
Number Densities of the Main Discharge Species
167
4.2.3
Fluxes of Building and Working Units
171
4.3
Nanocluster and Nanoparticle Building Units
177
4.3.1
Nano-Sized Building Units from Reactive Plasmas
177
4.3.2
Nanoparticle Generation: Other Examples
182
4.4
Concluding Remarks
294
5
Transport, Manipulation and Deposition of Building and
Working Units
199
5.1
Microscopic Ion Fluxes During Nanoassembly Processes
200
5.1.1
Formulation and Model
202
5.1.2
Numerical Results
204
5.1.3
Interpretation of Numerical Results
209
5.2
Nanoparticle Manipulation in the Synthesis of Carbon
Nanostructures
223
5.2.1
Nanoparticle Manipulation: Experimental Results
225
5.2.2
Nanoparticle Manipulation: Numerical Model
220
5.3
Selected-Area Nanoparticle Deposition Onto Microstructured
Surfaces
227
5.3.1
Numerical Model and Simulation Parameters
228
5.3.2
Selected-Area Nanoparticle Deposition
232
5.3.3
Practical Implementation Framework
237
5.4
Electrostatic Nanoparticle Filter
239
5.5
Concluding Remarks
244
6
Surface Science of Plasma-Exposed Surfaces and
Self-Organization Processes
249
K. Ostrifav and I. Levchenko
6.1
Synthesis of Self-Organizing Arrays of Quantum Dots:
Objectives and Approach
252
Contents
IX
6.2 Initial
Stage of Ge/Si
Nanodot Formation Using Nanocluster
Fluxes
272
6.2.1
Physical Model and Numerical Details
273
6.2.2
Physical Interpretation and Relevant Experimental Data
277
6.3
Binary SixC1.x Quantum Dot Systems: Initial Growth Stage
282
6.3.1
Adatom
Fluxes at Initial Growth Stages of SixCa_x Quantum
Dots
282
6.3.2
Control of Core-Shell Structure and Elemental Composition
of SixC!.x Quantum Dots
294
6.4
Self-Organization in Ge/Si Nanodot Arrays at Advanced
Growth Stages
301
6.4.1
Model of Nanopattern Development
303
6.4.2
Ge/Si QD
Size and Positional Uniformity
307
6.4.3
Self-Organization in
Ge/Si QD
Patterns: Driving Forces and
Features
320
6.5
Self-Organized Nanodot Arrays: Plasma-Specific Effects
324
6.5.1
Matching Balance and Supply of BUs: a Requirement for
Deterministic Nanoassembly
325
6.5.2
Other General Considerations
327
6.5.3
Plasma-Related Effects at Initial Growth Stages
329
6.5.4
Separate Growth of Individual Nanostructures
322
6.5.5
Self-Organization in Large Nanostructure Arrays
327
6.6
Concluding Remarks
332
7
Ion-Focusing Nanoscale Objects
341
7.1
General Considerations and Elementary Processes
343
7.2
Plasma-Specific Effects on the Growth of Carbon Nanotubes
and Related Nanostructures
356
7.2.1
Plasma-Related Effects on Carbon Nanofibers
357
7.2.2
Effects of Ions and Atomic Hydrogen on the Growth of
SWCNTs
364
7.3
Plasma-Controlled Reshaping of Carbon Nanostructures
373
7.3.1
Self-Sharpening of Platelet-Structured Nanocones
373
7.3.2
Plasma-Based Deterministic Shape Control in Nanotip
Assembly
380
7.4
Self-Organization of Large Nanotip Arrays
385
7.5
From Non-Uniform Catalyst Islands to Uniform
Nanoarrays
392
7.5.1
Experiment and Film Characterization
393
7.5.2
Growth Model and Numerical Simulations
397
7.6
Other Ion-Focusing Nanostructures
402
7.7
Concluding Remarks
407
X
Contents
8 Building
and Working Units at Work:
Applications 415
8.1
Plasma-Based Post-Processing of Nanoarrays
416
8.1.1
Post-Processing of Nanotube Arrays
418
8.1.2
Functional Monolayer Coating of Nanorod Arrays
422
8.2
i-PVD of Metal Nanodot Arrays Using Nanoporous
Templates
427
8.3
Metal Oxide Nanostructures: Plasma-Generated BUs Create
Other BUs on the Surface
434
8.4
Biocompatible TiO2
Films: How Building Units Work
440
8.4.1
TiO2 Film Deposition and Characterization
442
8.4.2
In Vitro Apatite Formation
446
8.4.3
Growth Kinetics: Building Units at Work
448
8.4.4
Building Units In Vitro: Inducing Biomimetic Response
453
8.5
Concluding Remarks
456
9
Conclusions and Outlook
461
9.1
Determinism and Higher Complexity
464
9.2
Plasma-Related Features and Areas of Competitive
Advantage
467
9.3
Outlook for the Future
470
9.4
Final Remarks
479
10
Appendix A. Reactions and Rate Equations
483
10.1
Plasmas of
Ar +
H2+ CH4 Gas Mixtures (Section
4.1) 483
10.2
Plasmas of
Ar +
H2
+
C2H2 Gas Mixtures (Section
4.2) 486
11
Appendix B. Why Plasma-based Nanoassembly:
Further Reasons
49Í
11.1
Carbon Nanotubes and Related Structures
492
11.2
Semiconductor Nanostructures and Nanomaterials
493
11.3
Other Nanostructures and Nanoscale Objects
494
11.4
Materials with Nanoscale Features
496
11.5
Plasma-Related Issues and Fabrication Techniques
497
References
499
Index
529 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Ostrikov, Kostya |
| author_GND | (DE-588)133247171 |
| author_facet | Ostrikov, Kostya |
| author_role | aut |
| author_sort | Ostrikov, Kostya |
| author_variant | k o ko |
| building | Verbundindex |
| bvnumber | BV023404058 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.N35 |
| callnumber-search | TA418.9.N35 |
| callnumber-sort | TA 3418.9 N35 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | VE 9850 ZM 7680 ZN 3700 |
| ctrlnum | (OCoLC)226976496 (DE-599)DNB987555723 |
| dewey-full | 621.044 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics 620 - Engineering and allied operations |
| dewey-raw | 621.044 620.5 |
| dewey-search | 621.044 620.5 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie / Pharmazie Maschinenbau / Maschinenwesen Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Chemie / Pharmazie Maschinenbau / Maschinenwesen Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV023404058 |
| illustrated | Illustrated |
| index_date | 2024-07-02T21:24:48Z |
| indexdate | 2024-07-20T09:45:17Z |
| institution | BVB |
| isbn | 9783527407408 3527407405 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016586786 |
| oclc_num | 226976496 |
| open_access_boolean | |
| owner | DE-20 DE-703 DE-11 DE-29T |
| owner_facet | DE-20 DE-703 DE-11 DE-29T |
| physical | XXV, 538 S. Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | WILEY-VCH |
| record_format | marc |
| spelling | Ostrikov, Kostya Verfasser (DE-588)133247171 aut Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov Weinheim WILEY-VCH 2008 XXV, 538 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Kaltes Plasma (DE-588)4248658-0 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s Kaltes Plasma (DE-588)4248658-0 s Plasmatechnik (DE-588)4140353-8 s DE-604 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3070181&prov=M&dok_var=1&dok_ext=htm Inhaltstext Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016586786&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Ostrikov, Kostya Plasma nanoscience basic concepts and applications of deterministic nanofabrication Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd Plasmatechnik (DE-588)4140353-8 gnd Kaltes Plasma (DE-588)4248658-0 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4140353-8 (DE-588)4248658-0 |
| title | Plasma nanoscience basic concepts and applications of deterministic nanofabrication |
| title_auth | Plasma nanoscience basic concepts and applications of deterministic nanofabrication |
| title_exact_search | Plasma nanoscience basic concepts and applications of deterministic nanofabrication |
| title_exact_search_txtP | Plasma nanoscience basic concepts and applications of deterministic nanofabrication |
| title_full | Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov |
| title_fullStr | Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov |
| title_full_unstemmed | Plasma nanoscience basic concepts and applications of deterministic nanofabrication Kostya (Ken) Ostrikov |
| title_short | Plasma nanoscience |
| title_sort | plasma nanoscience basic concepts and applications of deterministic nanofabrication |
| title_sub | basic concepts and applications of deterministic nanofabrication |
| topic | Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie (DE-588)4327470-5 gnd Plasmatechnik (DE-588)4140353-8 gnd Kaltes Plasma (DE-588)4248658-0 gnd |
| topic_facet | Nanomatériaux Plasmas froids Plasmas, Technique des Low temperature plasmas Nanostructured materials Plasma engineering Nanotechnologie Plasmatechnik Kaltes Plasma |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=3070181&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016586786&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT ostrikovkostya plasmananosciencebasicconceptsandapplicationsofdeterministicnanofabrication |