APA (7th ed.) Citation

Sakai, A. (2007). Dielectric thin films for future ULSI devices: Science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006]. Japan Soc. of Applied Physics.

Chicago Style (17th ed.) Citation

Sakai, Akira. Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [... Papers Presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), Which Was Held in Kanagawa, from November 8 Through 10, 2006]. Tokyo: Japan Soc. of Applied Physics, 2007.

MLA (9th ed.) Citation

Sakai, Akira. Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [... Papers Presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), Which Was Held in Kanagawa, from November 8 Through 10, 2006]. Japan Soc. of Applied Physics, 2007.