Dielectric thin films for future ULSI devices: science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006]
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
2007
|
| Schriftenreihe: | Japanese journal of applied physics : Part 1, Regular papers, brief communications & review papers
46,5B : Special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | S. 3167 - 3282, 13 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Dielectric thin films for future ULSI devices |b science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |c ed. by Akira Sakai ... |
| 264 | 1 | |a Tokyo |b Japan Soc. of Applied Physics |c 2007 | |
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| 490 | 0 | |a Japanese journal of applied physics : Part 1, Regular papers, brief communications & review papers |v 46,5B : Special issue | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2006 |z Yokohama |2 gnd-content | |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | 1 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |D s |
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| 700 | 1 | |a Sakai, Akira |4 edt | |
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Datensatz im Suchindex
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| author2 | Sakai, Akira |
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| genre_facet | Konferenzschrift 2006 Yokohama |
| id | DE-604.BV023326676 |
| illustrated | Illustrated |
| index_date | 2024-07-02T20:55:50Z |
| indexdate | 2024-07-09T21:15:57Z |
| institution | BVB |
| language | English |
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| physical | S. 3167 - 3282, 13 S. Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| series2 | Japanese journal of applied physics : Part 1, Regular papers, brief communications & review papers |
| spelling | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] ed. by Akira Sakai ... Tokyo Japan Soc. of Applied Physics 2007 S. 3167 - 3282, 13 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics : Part 1, Regular papers, brief communications & review papers 46,5B : Special issue Einzelaufnahme eines Zeitschr.-Heftes Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2006 Yokohama gnd-content ULSI (DE-588)4226286-0 s Dielektrische Schicht (DE-588)4194257-7 s DE-604 Sakai, Akira edt |
| spellingShingle | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] Dielektrische Schicht (DE-588)4194257-7 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4194257-7 (DE-588)4226286-0 (DE-588)1071861417 |
| title | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |
| title_auth | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |
| title_exact_search | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |
| title_exact_search_txtP | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |
| title_full | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] ed. by Akira Sakai ... |
| title_fullStr | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] ed. by Akira Sakai ... |
| title_full_unstemmed | Dielectric thin films for future ULSI devices science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] ed. by Akira Sakai ... |
| title_short | Dielectric thin films for future ULSI devices |
| title_sort | dielectric thin films for future ulsi devices science and technology papers presented at the 2006 international workshop on dielectric thin films for future ulsi devices science and technology iwdtf 6 which was held in kanagawa from november 8 through 10 2006 |
| title_sub | science and technology ; [... papers presented at the 2006 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology (IWDTF-6), which was held in Kanagawa, from November 8 through 10, 2006] |
| topic | Dielektrische Schicht (DE-588)4194257-7 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Dielektrische Schicht ULSI Konferenzschrift 2006 Yokohama |
| work_keys_str_mv | AT sakaiakira dielectricthinfilmsforfutureulsidevicesscienceandtechnologypaperspresentedatthe2006internationalworkshopondielectricthinfilmsforfutureulsidevicesscienceandtechnologyiwdtf6whichwasheldinkanagawafromnovember8through102006 |