Weber, J. (2007). Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices.
Chicago-Zitierstil (17. Ausg.)Weber, Jan. Investigation of the Physical Properties, Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves Excited in Piezoelectric Thin Film Devices. 2007.
MLA-Zitierstil (9. Ausg.)Weber, Jan. Investigation of the Physical Properties, Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves Excited in Piezoelectric Thin Film Devices. 2007.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.