Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
2007
|
| Schlagworte: | |
| Online-Zugang: | Volltext https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 |
| Beschreibung: | Augsburg, Univ., Diss., 2007 |
| Beschreibung: | 162 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV023234893 | ||
| 003 | DE-604 | ||
| 005 | 20170405 | ||
| 007 | t | ||
| 008 | 080402s2007 ad|| m||| 00||| eng d | ||
| 035 | |a (OCoLC)644225521 | ||
| 035 | |a (DE-599)BVBBV023234893 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-473 |a DE-703 |a DE-1051 |a DE-824 |a DE-29 |a DE-12 |a DE-91 |a DE-19 |a DE-1049 |a DE-92 |a DE-739 |a DE-898 |a DE-355 |a DE-706 |a DE-20 | ||
| 084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
| 084 | |a VG 6877 |0 (DE-625)147198:260 |2 rvk | ||
| 100 | 1 | |a Weber, Jan |d 1974- |e Verfasser |0 (DE-588)133281000 |4 aut | |
| 245 | 1 | 0 | |a Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |c Jan Weber |
| 264 | 1 | |c 2007 | |
| 300 | |a 162 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Augsburg, Univ., Diss., 2007 | ||
| 650 | 0 | 7 | |a Moden |0 (DE-588)4170305-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Akustischer Resonator |0 (DE-588)4120857-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Piezoelektrizität |0 (DE-588)4322722-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | 1 | |a Akustischer Resonator |0 (DE-588)4120857-2 |D s |
| 689 | 0 | 2 | |a Moden |0 (DE-588)4170305-4 |D s |
| 689 | 0 | 3 | |a Piezoelektrizität |0 (DE-588)4322722-3 |D s |
| 689 | 0 | 4 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |o urn:nbn:de:bvb:384-opus-6401 |
| 856 | 4 | 1 | |u http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571 |x Verlag |z kostenfrei |3 Volltext |
| 856 | 4 | |u https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 |x Resolving-System | |
| 912 | |a ebook | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-016420530 | ||
Datensatz im Suchindex
| _version_ | 1804137529407963136 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Weber, Jan 1974- |
| author_GND | (DE-588)133281000 |
| author_facet | Weber, Jan 1974- |
| author_role | aut |
| author_sort | Weber, Jan 1974- |
| author_variant | j w jw |
| building | Verbundindex |
| bvnumber | BV023234893 |
| classification_rvk | UP 7550 VG 6877 |
| collection | ebook |
| ctrlnum | (OCoLC)644225521 (DE-599)BVBBV023234893 |
| discipline | Chemie / Pharmazie Physik |
| discipline_str_mv | Chemie / Pharmazie Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02011nam a2200469 c 4500</leader><controlfield tag="001">BV023234893</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170405 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">080402s2007 ad|| m||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)644225521</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023234893</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-473</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1051</subfield><subfield code="a">DE-824</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-1049</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-739</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VG 6877</subfield><subfield code="0">(DE-625)147198:260</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Weber, Jan</subfield><subfield code="d">1974-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)133281000</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices</subfield><subfield code="c">Jan Weber</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">162 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Augsburg, Univ., Diss., 2007</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Moden</subfield><subfield code="0">(DE-588)4170305-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Akustischer Resonator</subfield><subfield code="0">(DE-588)4120857-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Piezoelektrizität</subfield><subfield code="0">(DE-588)4322722-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Akustischer Resonator</subfield><subfield code="0">(DE-588)4120857-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Moden</subfield><subfield code="0">(DE-588)4170305-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Piezoelektrizität</subfield><subfield code="0">(DE-588)4322722-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="o">urn:nbn:de:bvb:384-opus-6401</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571</subfield><subfield code="x">Verlag</subfield><subfield code="z">kostenfrei</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401</subfield><subfield code="x">Resolving-System</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ebook</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016420530</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV023234893 |
| illustrated | Illustrated |
| index_date | 2024-07-02T20:21:34Z |
| indexdate | 2024-07-09T21:13:45Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016420530 |
| oclc_num | 644225521 |
| open_access_boolean | 1 |
| owner | DE-384 DE-473 DE-BY-UBG DE-703 DE-1051 DE-824 DE-29 DE-12 DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-1049 DE-92 DE-739 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-706 DE-20 |
| owner_facet | DE-384 DE-473 DE-BY-UBG DE-703 DE-1051 DE-824 DE-29 DE-12 DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-1049 DE-92 DE-739 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-706 DE-20 |
| physical | 162 S. Ill., graph. Darst. |
| psigel | ebook |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| record_format | marc |
| spelling | Weber, Jan 1974- Verfasser (DE-588)133281000 aut Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber 2007 162 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Augsburg, Univ., Diss., 2007 Moden (DE-588)4170305-4 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Akustischer Resonator (DE-588)4120857-2 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Piezoelektrizität (DE-588)4322722-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content MEMS (DE-588)4824724-8 s Akustischer Resonator (DE-588)4120857-2 s Moden (DE-588)4170305-4 s Piezoelektrizität (DE-588)4322722-3 s Dünne Schicht (DE-588)4136925-7 s DE-604 Erscheint auch als Online-Ausgabe urn:nbn:de:bvb:384-opus-6401 http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571 Verlag kostenfrei Volltext https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 Resolving-System |
| spellingShingle | Weber, Jan 1974- Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Moden (DE-588)4170305-4 gnd MEMS (DE-588)4824724-8 gnd Akustischer Resonator (DE-588)4120857-2 gnd Dünne Schicht (DE-588)4136925-7 gnd Piezoelektrizität (DE-588)4322722-3 gnd |
| subject_GND | (DE-588)4170305-4 (DE-588)4824724-8 (DE-588)4120857-2 (DE-588)4136925-7 (DE-588)4322722-3 (DE-588)4113937-9 |
| title | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_auth | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_exact_search | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_exact_search_txtP | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_full | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_fullStr | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_full_unstemmed | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_short | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_sort | investigation of the physical properties performance and application of mems sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| topic | Moden (DE-588)4170305-4 gnd MEMS (DE-588)4824724-8 gnd Akustischer Resonator (DE-588)4120857-2 gnd Dünne Schicht (DE-588)4136925-7 gnd Piezoelektrizität (DE-588)4322722-3 gnd |
| topic_facet | Moden MEMS Akustischer Resonator Dünne Schicht Piezoelektrizität Hochschulschrift |
| url | http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571 https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 |
| work_keys_str_mv | AT weberjan investigationofthephysicalpropertiesperformanceandapplicationofmemssensorsbasedonbulkacousticwavesexcitedinpiezoelectricthinfilmdevices |