Holdings: Vacuum technology :: THWS Bibkatalog

Vacuum technology: practice for scientific instruments

Saved in:

Bibliographic Details
Main Author:	Yoshimura, Nagamitsu (Author)
Format:	Book
Language:	English
Published:	Berlin [u.a.] Springer 2008
Subjects:	Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik
Online Access:	Inhaltsverzeichnis
Item Description:	Literaturangaben
Physical Description:	X, 353 S. Ill., graph. Darst.
ISBN:	9783540744320 3540744320

Staff View

MARC


LEADER	00000nam a2200000 c 4500
001	BV023224048
003	DE-604
005	20081211
007	t
008	080319s2008 gw ad\|\| \|\|\|\| 00\|\|\| eng d
015			\|a 07,N33,0541 \|2 dnb
015			\|a 08,A12,1130 \|2 dnb
016	7		\|a 985089326 \|2 DE-101
020			\|a 9783540744320 \|c Pp. : EUR 106.95 (freier Pr.), sfr 174.00 (freier Pr.) \|9 978-3-540-74432-0
020			\|a 3540744320 \|c Pp. : EUR 106.95 (freier Pr.), sfr 174.00 (freier Pr.) \|9 3-540-74432-0
024	3		\|a 9783540744320
028	5	2	\|a 12038749
035			\|a (OCoLC)173807367
035			\|a (DE-599)DNB985089326
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
044			\|a gw \|c XA-DE-BE
049			\|a DE-1050 \|a DE-20 \|a DE-92 \|a DE-355 \|a DE-19 \|a DE-11
050		0	\|a TJ940
082	0		\|a 621.55 \|2 22/ger
082	0		\|a 621.55
084			\|a UX 1500 \|0 (DE-625)146945: \|2 rvk
084			\|a ZL 7300 \|0 (DE-625)156982: \|2 rvk
084			\|a 530 \|2 sdnb
084			\|a 620 \|2 sdnb
100	1		\|a Yoshimura, Nagamitsu \|e Verfasser \|4 aut
245	1	0	\|a Vacuum technology \|b practice for scientific instruments \|c Nagamitsu Yoshimura
264		1	\|a Berlin [u.a.] \|b Springer \|c 2008
300			\|a X, 353 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
500			\|a Literaturangaben
650		4	\|a Scientific apparatus and instruments
650		4	\|a Vacuum technology
650	0	7	\|a Ultrahochvakuumtechnik \|0 (DE-588)4186712-9 \|2 gnd \|9 rswk-swf
689	0	0	\|a Ultrahochvakuumtechnik \|0 (DE-588)4186712-9 \|D s
689	0		\|5 DE-604
856	4	2	\|m Digitalisierung UB Regensburg \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
999			\|a oai:aleph.bib-bvb.de:BVB01-016409897

Record in the Search Index

_version_	1804137512948465664
adam_text	Contents 1 Designing of Evacuation Systems ................................ 1 Selection of Pumping Speed ...................................... 2 Pumping-down Characteristics ............................... 2 Steady-State Evacuation ..................................... 3 Roughing System .......................................... 3 Backstreaming of RP Oil Vapor ................................... 4 Backstreaming of DP Oil Vapor ................................... 6 Overload in High-Vacuum Evacuation Systems ...................... 8 DP In-Series System ............................................. 14 Ultrahigh Vacuum Electron Microscopes ............................ 27 Know-how Technology in Designing UHV Evacuation Systems ... 31 References ..................................................... 32 2 Vacuum Pumps ................................................ 35 Mechanical Pumps .............................................. 35 Diffusion Pumps ................................................ 38 Turbomolecular Pumps .......................................... 41 Dry Vacuum Pumps ............................................. 45 Cryopumps .................................................... 51 Vapor Pressures for Gases ........................................ 55 Sputter Ion Pumps .............................................. 56 Noble Pumps for Inert Gases ...................................... 60 Getter Pumps ................................................... 68 Titanium-Sublimation Pumps ................................ 68 Non-Evaporable Getter (NEG) Pumps ......................... 69 Methods for Measuring Pumping Speeds ............................ 70 Orifice Method ............................................. 70 Three-Gauge Method (Pipe Method) .......................... 71 Three-Point Pressure Method (3PP Method) .................... 72 References ..................................................... 76 viii Contents 3 Simulation of Pressures in High- Vacuum Systems .................. 85 Conventional Calculation of System Pressures ....................... 85 ЗА Vacuum Circuits ............................................. 87 Basic Concept of Vacuum Circuits ............................ 87 Designing of Vacuum Circuits ................................ 89 Simulation of Pressures ..................................... 91 Resistor-Network Simulation Method .......................... 91 Matrix Calculation of Pressures ............................... 94 3B Molecular-Flow Conductance ..................................108 Conductance ..............................................108 Transmission Probability ....................................109 3C Gas-Flow Patterns ............................................117 References .....................................................119 4 Outgassing ....................................................123 Process of Outgassing ...........................................123 Diffusion .................................................124 Recombination-limited Outgassing ............................134 Data of Outgassing ..............................................136 Stainless Steel .............................................136 Electro-polishing and Vacuum Firing ..........................137 Aluminum Alloy, Copper and Titanium ........................147 Permeation Through Elastomer Seals ..........................148 Evaporation ...............................................156 Methods for Measuring Outgassing Rates ...........................157 Differential Pressure-rise Method [4-41].......................159 Variable Conductance Method [4-43]..........................161 Conductance Modulation Method [4-44].......................164 Two-Point Pressure Method and One-Point Pressure Method [4-45] 167 References .....................................................168 5 Phenomena Induced by Electron Irradiation ......................175 5A Electron/Photon Stimulated Desorption (ESD/PSD) ...............176 5B Polymerization of Hydrocarbon Molecules .......................182 Transport of Hydrocarbon Molecules in High Vacuum ............182 Transport of Hydrocarbon Molecules in LUtrabigh Vacuum ........185 Materials to be Polymerized by Electron Beam Irradiation ........192 5C Darkening in Secondary Electron Images in SEM.................195 5D Etching of Carbonaceous Specimens ............................198 References .....................................................199 6 Vacuum Gauges ................................................205 Mechanical Gauges ..............................................207 Capacitance Manometer .....................................207 Thermal Conductivity Gauges .....................................209 Contents ix Pirani Gauge.............................................. 209 Viscosity Gauges ................................................211 Spinning Rotor Gauge ......................................211 Crystal Oscillation Gauge ....................................214 Ionization Gauges ...............................................217 Penning Gauge .............................................217 Sputter Ion Pump as a Pressure Indicator .......................220 Bayard-Alpert Ionization Gauge ..............................221 Extractor Gauge ............................................228 Hot-Cathode Magnetron Ionization Gauge ......................231 Cold-Cathode Ionization Gauge for UHV ......................232 Magnetic Sector [6-24]......................................234 Quadrapole Mass-Filter [6-24] ...............................236 Mass Spectra Cracking Patterns ...............................238 Outgassing from Ionization Gauges with Incandescent Filaments ... 239 Gas Species Emitted from Ionization Gauges with Incandescent Filaments .................................................244 New Gauges for Measuring Extreme High Vacuum ..............247 References .....................................................257 7 Microdischarges in High Vacuum ................................265 7A Microdischarges over Insulator Surfaces .........................266 Factors ...................................................266 Charging of Dielectric Surfaces ...............................266 Gas Molecules on Insulator Surfaces ..........................275 Triple Junction .............................................278 Surface Flashover in SF6 Gas ................................280 Review ...................................................281 7B Microdischarges between High-Voltage Electrodes ................282 Anode-Initiation Mechanism .................................282 Ion-Exchange Process and Total-Voltage Effect .................286 Projection (Whisker) on Cathode .............................291 Gas Molecules on Electrode Surfaces ..........................291 Аг -Glow Conditioning ......................................292 High-Voltage Conditioning (HVC) ............................293 Conditioning Effect .........................................294 Review ...................................................296 References .....................................................296 8 Emitters for Fine Electron Probes ................................301 Keywords ......................................................301 8A WFEEmitter ...............................................304 Characteristics .............................................304 Remolding ................................................306 Emission Noise ............................................312 χ Contents Build-up Treatment .........................................317 FE-Initiated Vacuum Arc ....................................318 Morphological Changes of Tip ...............................320 FE-Related Technology .....................................321 Review ...................................................324 8B ZrO/W Emitter ..............................................325 Characteristics .............................................325 Surface Geometry ..........................................326 Properties .................................................329 8C LaB6 Emitter ................................................332 Characteristics .............................................332 Mounting Methods .........................................333 Material Loss ..............................................338 Properties .................................................340 Review ...................................................340 8D Other RE Emitters ............................................341 References .....................................................341 Index .............................................................345
adam_txt	Contents 1 Designing of Evacuation Systems . 1 Selection of Pumping Speed . 2 Pumping-down Characteristics . 2 Steady-State Evacuation . 3 Roughing System . 3 Backstreaming of RP Oil Vapor . 4 Backstreaming of DP Oil Vapor . 6 Overload in High-Vacuum Evacuation Systems . 8 DP In-Series System . 14 Ultrahigh Vacuum Electron Microscopes . 27 Know-how Technology in Designing UHV Evacuation Systems . 31 References . 32 2 Vacuum Pumps . 35 Mechanical Pumps . 35 Diffusion Pumps . 38 Turbomolecular Pumps . 41 Dry Vacuum Pumps . 45 Cryopumps . 51 Vapor Pressures for Gases . 55 Sputter Ion Pumps . 56 Noble Pumps for Inert Gases . 60 Getter Pumps . 68 Titanium-Sublimation Pumps . 68 Non-Evaporable Getter (NEG) Pumps . 69 Methods for Measuring Pumping Speeds . 70 Orifice Method . 70 Three-Gauge Method (Pipe Method) . 71 Three-Point Pressure Method (3PP Method) . 72 References . 76 viii Contents 3 Simulation of Pressures in High- Vacuum Systems . 85 Conventional Calculation of System Pressures . 85 ЗА Vacuum Circuits . 87 Basic Concept of Vacuum Circuits . 87 Designing of Vacuum Circuits . 89 Simulation of Pressures . 91 Resistor-Network Simulation Method . 91 Matrix Calculation of Pressures . 94 3B Molecular-Flow Conductance .108 Conductance .108 Transmission Probability .109 3C Gas-Flow Patterns .117 References .119 4 Outgassing .123 Process of Outgassing .123 Diffusion .124 Recombination-limited Outgassing .134 Data of Outgassing .136 Stainless Steel .136 Electro-polishing and Vacuum Firing .137 Aluminum Alloy, Copper and Titanium .147 Permeation Through Elastomer Seals .148 Evaporation .156 Methods for Measuring Outgassing Rates .157 Differential Pressure-rise Method [4-41].159 Variable Conductance Method [4-43].161 Conductance Modulation Method [4-44].164 Two-Point Pressure Method and One-Point Pressure Method [4-45] 167 References .168 5 Phenomena Induced by Electron Irradiation .175 5A Electron/Photon Stimulated Desorption (ESD/PSD) .176 5B Polymerization of Hydrocarbon Molecules .182 Transport of Hydrocarbon Molecules in High Vacuum .182 Transport of Hydrocarbon Molecules in LUtrabigh Vacuum .185 Materials to be Polymerized by Electron Beam Irradiation .192 5C Darkening in Secondary Electron Images in SEM.195 5D Etching of Carbonaceous Specimens .198 References .199 6 Vacuum Gauges .205 Mechanical Gauges .207 Capacitance Manometer .207 Thermal Conductivity Gauges .209 Contents ix Pirani Gauge. 209 Viscosity Gauges .211 Spinning Rotor Gauge .211 Crystal Oscillation Gauge .214 Ionization Gauges .217 Penning Gauge .217 Sputter Ion Pump as a Pressure Indicator .220 Bayard-Alpert Ionization Gauge .221 Extractor Gauge .228 Hot-Cathode Magnetron Ionization Gauge .231 Cold-Cathode Ionization Gauge for UHV .232 Magnetic Sector [6-24].234 Quadrapole Mass-Filter [6-24] .236 Mass Spectra Cracking Patterns .238 Outgassing from Ionization Gauges with Incandescent Filaments . 239 Gas Species Emitted from Ionization Gauges with Incandescent Filaments .244 New Gauges for Measuring Extreme High Vacuum .247 References .257 7 Microdischarges in High Vacuum .265 7A Microdischarges over Insulator Surfaces .266 Factors .266 Charging of Dielectric Surfaces .266 Gas Molecules on Insulator Surfaces .275 Triple Junction .278 Surface Flashover in SF6 Gas .280 Review .281 7B Microdischarges between High-Voltage Electrodes .282 Anode-Initiation Mechanism .282 Ion-Exchange Process and Total-Voltage Effect .286 Projection (Whisker) on Cathode .291 Gas Molecules on Electrode Surfaces .291 Аг -Glow Conditioning .292 High-Voltage Conditioning (HVC) .293 Conditioning Effect .294 Review .296 References .296 8 Emitters for Fine Electron Probes .301 Keywords .301 8A WFEEmitter .304 Characteristics .304 Remolding .306 Emission Noise .312 χ Contents Build-up Treatment .317 FE-Initiated Vacuum Arc .318 Morphological Changes of Tip .320 FE-Related Technology .321 Review .324 8B ZrO/W Emitter .325 Characteristics .325 Surface Geometry .326 Properties .329 8C LaB6 Emitter .332 Characteristics .332 Mounting Methods .333 Material Loss .338 Properties .340 Review .340 8D Other RE Emitters .341 References .341 Index .345
any_adam_object	1
any_adam_object_boolean	1
author	Yoshimura, Nagamitsu
author_facet	Yoshimura, Nagamitsu
author_role	aut
author_sort	Yoshimura, Nagamitsu
author_variant	n y ny
building	Verbundindex
bvnumber	BV023224048
callnumber-first	T - Technology
callnumber-label	TJ940
callnumber-raw	TJ940
callnumber-search	TJ940
callnumber-sort	TJ 3940
callnumber-subject	TJ - Mechanical Engineering and Machinery
classification_rvk	UX 1500 ZL 7300
ctrlnum	(OCoLC)173807367 (DE-599)DNB985089326
dewey-full	621.55
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.55
dewey-search	621.55
dewey-sort	3621.55
dewey-tens	620 - Engineering and allied operations
discipline	Maschinenbau / Maschinenwesen Physik
discipline_str_mv	Maschinenbau / Maschinenwesen Physik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01873nam a2200505 c 4500</leader><controlfield tag="001">BV023224048</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20081211 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">080319s2008 gw ad\|\| \|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">07,N33,0541</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">08,A12,1130</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">985089326</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783540744320</subfield><subfield code="c">Pp. : EUR 106.95 (freier Pr.), sfr 174.00 (freier Pr.)</subfield><subfield code="9">978-3-540-74432-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540744320</subfield><subfield code="c">Pp. : EUR 106.95 (freier Pr.), sfr 174.00 (freier Pr.)</subfield><subfield code="9">3-540-74432-0</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783540744320</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">12038749</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)173807367</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB985089326</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1050</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ940</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.55</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.55</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UX 1500</subfield><subfield code="0">(DE-625)146945:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZL 7300</subfield><subfield code="0">(DE-625)156982:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">530</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">620</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Yoshimura, Nagamitsu</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Vacuum technology</subfield><subfield code="b">practice for scientific instruments</subfield><subfield code="c">Nagamitsu Yoshimura</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2008</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 353 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Scientific apparatus and instruments</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vacuum technology</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ultrahochvakuumtechnik</subfield><subfield code="0">(DE-588)4186712-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ultrahochvakuumtechnik</subfield><subfield code="0">(DE-588)4186712-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Regensburg</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016409897</subfield></datafield></record></collection>
id	DE-604.BV023224048
illustrated	Illustrated
index_date	2024-07-02T20:17:12Z
indexdate	2024-07-09T21:13:29Z
institution	BVB
isbn	9783540744320 3540744320
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-016409897
oclc_num	173807367
open_access_boolean
owner	DE-1050 DE-20 DE-92 DE-355 DE-BY-UBR DE-19 DE-BY-UBM DE-11
owner_facet	DE-1050 DE-20 DE-92 DE-355 DE-BY-UBR DE-19 DE-BY-UBM DE-11
physical	X, 353 S. Ill., graph. Darst.
publishDate	2008
publishDateSearch	2008
publishDateSort	2008
publisher	Springer
record_format	marc
spelling	Yoshimura, Nagamitsu Verfasser aut Vacuum technology practice for scientific instruments Nagamitsu Yoshimura Berlin [u.a.] Springer 2008 X, 353 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd rswk-swf Ultrahochvakuumtechnik (DE-588)4186712-9 s DE-604 Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Yoshimura, Nagamitsu Vacuum technology practice for scientific instruments Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd
subject_GND	(DE-588)4186712-9
title	Vacuum technology practice for scientific instruments
title_auth	Vacuum technology practice for scientific instruments
title_exact_search	Vacuum technology practice for scientific instruments
title_exact_search_txtP	Vacuum technology practice for scientific instruments
title_full	Vacuum technology practice for scientific instruments Nagamitsu Yoshimura
title_fullStr	Vacuum technology practice for scientific instruments Nagamitsu Yoshimura
title_full_unstemmed	Vacuum technology practice for scientific instruments Nagamitsu Yoshimura
title_short	Vacuum technology
title_sort	vacuum technology practice for scientific instruments
title_sub	practice for scientific instruments
topic	Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd
topic_facet	Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT yoshimuranagamitsu vacuumtechnologypracticeforscientificinstruments

Holdings

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection! Indexes

MARC

Record in the Search Index

There is no print copy available.

Similar Items