Vacuum technology: practice for scientific instruments
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2008
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | X, 353 S. Ill., graph. Darst. |
| ISBN: | 9783540744320 3540744320 |
Internformat
MARC
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| 020 | |a 3540744320 |c Pp. : EUR 106.95 (freier Pr.), sfr 174.00 (freier Pr.) |9 3-540-74432-0 | ||
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| 100 | 1 | |a Yoshimura, Nagamitsu |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Vacuum technology |b practice for scientific instruments |c Nagamitsu Yoshimura |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2008 | |
| 300 | |a X, 353 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Scientific apparatus and instruments | |
| 650 | 4 | |a Vacuum technology | |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-016409897 | ||
Datensatz im Suchindex
| _version_ | 1804137512948465664 |
|---|---|
| adam_text | Contents
1
Designing
of Evacuation Systems
................................ 1
Selection of Pumping Speed
...................................... 2
Pumping-down Characteristics
............................... 2
Steady-State Evacuation
..................................... 3
Roughing System
.......................................... 3
Backstreaming
of RP Oil Vapor
................................... 4
Backstreaming
of DP Oil Vapor
................................... 6
Overload in High-Vacuum Evacuation Systems
...................... 8
DP In-Series System
............................................. 14
Ultrahigh Vacuum Electron Microscopes
............................ 27
Know-how Technology in Designing UHV Evacuation Systems
... 31
References
..................................................... 32
2
Vacuum Pumps
................................................ 35
Mechanical Pumps
.............................................. 35
Diffusion Pumps
................................................ 38
Turbomolecular Pumps
.......................................... 41
Dry Vacuum Pumps
............................................. 45
Cryopumps
.................................................... 51
Vapor Pressures for Gases
........................................ 55
Sputter Ion Pumps
.............................................. 56
Noble Pumps for Inert Gases
...................................... 60
Getter Pumps
................................................... 68
Titanium-Sublimation Pumps
................................ 68
Non-Evaporable
Getter
(NEG)
Pumps
......................... 69
Methods for Measuring Pumping Speeds
............................ 70
Orifice Method
............................................. 70
Three-Gauge Method (Pipe Method)
.......................... 71
Three-Point Pressure Method (3PP Method)
.................... 72
References
..................................................... 76
viii Contents
3 Simulation
of
Pressures
in High- Vacuum Systems
.................. 85
Conventional Calculation of System Pressures
....................... 85
ЗА
Vacuum Circuits
............................................. 87
Basic Concept of Vacuum Circuits
............................ 87
Designing of Vacuum Circuits
................................ 89
Simulation of Pressures
..................................... 91
Resistor-Network Simulation Method
.......................... 91
Matrix Calculation of Pressures
............................... 94
3B Molecular-Flow Conductance
..................................108
Conductance
..............................................108
Transmission Probability
....................................109
3C Gas-Flow Patterns
............................................117
References
.....................................................119
4
Outgassing
....................................................123
Process of Outgassing
...........................................123
Diffusion
.................................................124
Recombination-limited Outgassing
............................134
Data of Outgassing
..............................................136
Stainless Steel
.............................................136
Electro-polishing and Vacuum Firing
..........................137
Aluminum Alloy, Copper and Titanium
........................147
Permeation Through Elastomer Seals
..........................148
Evaporation
...............................................156
Methods for Measuring Outgassing Rates
...........................157
Differential Pressure-rise Method
[4-41].......................159
Variable Conductance Method
[4-43]..........................161
Conductance Modulation Method
[4-44].......................164
Two-Point Pressure Method and One-Point Pressure Method
[4-45] 167
References
.....................................................168
5
Phenomena Induced by Electron Irradiation
......................175
5A Electron/Photon Stimulated Desorption (ESD/PSD)
...............176
5B Polymerization of Hydrocarbon Molecules
.......................182
Transport of Hydrocarbon Molecules in High Vacuum
............182
Transport of Hydrocarbon Molecules in LUtrabigh Vacuum
........185
Materials to be Polymerized by Electron Beam Irradiation
........192
5C Darkening in Secondary Electron Images in
SEM.................195
5D Etching of Carbonaceous Specimens
............................198
References
.....................................................199
6
Vacuum Gauges
................................................205
Mechanical Gauges
..............................................207
Capacitance Manometer
.....................................207
Thermal Conductivity Gauges
.....................................209
Contents ix
Pirani
Gauge..............................................
209
Viscosity Gauges
................................................211
Spinning Rotor Gauge
......................................211
Crystal Oscillation Gauge
....................................214
Ionization Gauges
...............................................217
Penning Gauge
.............................................217
Sputter Ion Pump as a Pressure Indicator
.......................220
Bayard-Alpert Ionization Gauge
..............................221
Extractor Gauge
............................................228
Hot-Cathode Magnetron Ionization Gauge
......................231
Cold-Cathode Ionization Gauge for UHV
......................232
Magnetic Sector
[6-24]......................................234
Quadrapole Mass-Filter
[6-24] ...............................236
Mass Spectra Cracking Patterns
...............................238
Outgassing from Ionization Gauges with Incandescent Filaments
... 239
Gas Species Emitted from Ionization Gauges with Incandescent
Filaments
.................................................244
New Gauges for Measuring Extreme High Vacuum
..............247
References
.....................................................257
7
Microdischarges in High Vacuum
................................265
7A Microdischarges over Insulator Surfaces
.........................266
Factors
...................................................266
Charging of Dielectric Surfaces
...............................266
Gas Molecules on Insulator Surfaces
..........................275
Triple Junction
.............................................278
Surface Flashover in SF6 Gas
................................280
Review
...................................................281
7B Microdischarges between High-Voltage Electrodes
................282
Anode-Initiation Mechanism
.................................282
Ion-Exchange Process and Total-Voltage Effect
.................286
Projection (Whisker) on Cathode
.............................291
Gas Molecules on Electrode Surfaces
..........................291
Аг
-Glow Conditioning
......................................292
High-Voltage Conditioning (HVC)
............................293
Conditioning Effect
.........................................294
Review
...................................................296
References
.....................................................296
8
Emitters for Fine Electron Probes
................................301
Keywords
......................................................301
8A WFEEmitter
...............................................304
Characteristics
.............................................304
Remolding
................................................306
Emission Noise
............................................312
χ
Contents
Build-up Treatment
.........................................317
FE-Initiated Vacuum Arc
....................................318
Morphological Changes of Tip
...............................320
FE-Related Technology
.....................................321
Review
...................................................324
8B ZrO/W Emitter
..............................................325
Characteristics
.............................................325
Surface Geometry
..........................................326
Properties
.................................................329
8C LaB6 Emitter
................................................332
Characteristics
.............................................332
Mounting Methods
.........................................333
Material Loss
..............................................338
Properties
.................................................340
Review
...................................................340
8D Other RE Emitters
............................................341
References
.....................................................341
Index
.............................................................345
|
| adam_txt |
Contents
1
Designing
of Evacuation Systems
. 1
Selection of Pumping Speed
. 2
Pumping-down Characteristics
. 2
Steady-State Evacuation
. 3
Roughing System
. 3
Backstreaming
of RP Oil Vapor
. 4
Backstreaming
of DP Oil Vapor
. 6
Overload in High-Vacuum Evacuation Systems
. 8
DP In-Series System
. 14
Ultrahigh Vacuum Electron Microscopes
. 27
Know-how Technology in Designing UHV Evacuation Systems
. 31
References
. 32
2
Vacuum Pumps
. 35
Mechanical Pumps
. 35
Diffusion Pumps
. 38
Turbomolecular Pumps
. 41
Dry Vacuum Pumps
. 45
Cryopumps
. 51
Vapor Pressures for Gases
. 55
Sputter Ion Pumps
. 56
Noble Pumps for Inert Gases
. 60
Getter Pumps
. 68
Titanium-Sublimation Pumps
. 68
Non-Evaporable
Getter
(NEG)
Pumps
. 69
Methods for Measuring Pumping Speeds
. 70
Orifice Method
. 70
Three-Gauge Method (Pipe Method)
. 71
Three-Point Pressure Method (3PP Method)
. 72
References
. 76
viii Contents
3 Simulation
of
Pressures
in High- Vacuum Systems
. 85
Conventional Calculation of System Pressures
. 85
ЗА
Vacuum Circuits
. 87
Basic Concept of Vacuum Circuits
. 87
Designing of Vacuum Circuits
. 89
Simulation of Pressures
. 91
Resistor-Network Simulation Method
. 91
Matrix Calculation of Pressures
. 94
3B Molecular-Flow Conductance
.108
Conductance
.108
Transmission Probability
.109
3C Gas-Flow Patterns
.117
References
.119
4
Outgassing
.123
Process of Outgassing
.123
Diffusion
.124
Recombination-limited Outgassing
.134
Data of Outgassing
.136
Stainless Steel
.136
Electro-polishing and Vacuum Firing
.137
Aluminum Alloy, Copper and Titanium
.147
Permeation Through Elastomer Seals
.148
Evaporation
.156
Methods for Measuring Outgassing Rates
.157
Differential Pressure-rise Method
[4-41].159
Variable Conductance Method
[4-43].161
Conductance Modulation Method
[4-44].164
Two-Point Pressure Method and One-Point Pressure Method
[4-45] 167
References
.168
5
Phenomena Induced by Electron Irradiation
.175
5A Electron/Photon Stimulated Desorption (ESD/PSD)
.176
5B Polymerization of Hydrocarbon Molecules
.182
Transport of Hydrocarbon Molecules in High Vacuum
.182
Transport of Hydrocarbon Molecules in LUtrabigh Vacuum
.185
Materials to be Polymerized by Electron Beam Irradiation
.192
5C Darkening in Secondary Electron Images in
SEM.195
5D Etching of Carbonaceous Specimens
.198
References
.199
6
Vacuum Gauges
.205
Mechanical Gauges
.207
Capacitance Manometer
.207
Thermal Conductivity Gauges
.209
Contents ix
Pirani
Gauge.
209
Viscosity Gauges
.211
Spinning Rotor Gauge
.211
Crystal Oscillation Gauge
.214
Ionization Gauges
.217
Penning Gauge
.217
Sputter Ion Pump as a Pressure Indicator
.220
Bayard-Alpert Ionization Gauge
.221
Extractor Gauge
.228
Hot-Cathode Magnetron Ionization Gauge
.231
Cold-Cathode Ionization Gauge for UHV
.232
Magnetic Sector
[6-24].234
Quadrapole Mass-Filter
[6-24] .236
Mass Spectra Cracking Patterns
.238
Outgassing from Ionization Gauges with Incandescent Filaments
. 239
Gas Species Emitted from Ionization Gauges with Incandescent
Filaments
.244
New Gauges for Measuring Extreme High Vacuum
.247
References
.257
7
Microdischarges in High Vacuum
.265
7A Microdischarges over Insulator Surfaces
.266
Factors
.266
Charging of Dielectric Surfaces
.266
Gas Molecules on Insulator Surfaces
.275
Triple Junction
.278
Surface Flashover in SF6 Gas
.280
Review
.281
7B Microdischarges between High-Voltage Electrodes
.282
Anode-Initiation Mechanism
.282
Ion-Exchange Process and Total-Voltage Effect
.286
Projection (Whisker) on Cathode
.291
Gas Molecules on Electrode Surfaces
.291
Аг
-Glow Conditioning
.292
High-Voltage Conditioning (HVC)
.293
Conditioning Effect
.294
Review
.296
References
.296
8
Emitters for Fine Electron Probes
.301
Keywords
.301
8A WFEEmitter
.304
Characteristics
.304
Remolding
.306
Emission Noise
.312
χ
Contents
Build-up Treatment
.317
FE-Initiated Vacuum Arc
.318
Morphological Changes of Tip
.320
FE-Related Technology
.321
Review
.324
8B ZrO/W Emitter
.325
Characteristics
.325
Surface Geometry
.326
Properties
.329
8C LaB6 Emitter
.332
Characteristics
.332
Mounting Methods
.333
Material Loss
.338
Properties
.340
Review
.340
8D Other RE Emitters
.341
References
.341
Index
.345 |
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| id | DE-604.BV023224048 |
| illustrated | Illustrated |
| index_date | 2024-07-02T20:17:12Z |
| indexdate | 2024-07-09T21:13:29Z |
| institution | BVB |
| isbn | 9783540744320 3540744320 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016409897 |
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| physical | X, 353 S. Ill., graph. Darst. |
| publishDate | 2008 |
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| publisher | Springer |
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| spelling | Yoshimura, Nagamitsu Verfasser aut Vacuum technology practice for scientific instruments Nagamitsu Yoshimura Berlin [u.a.] Springer 2008 X, 353 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd rswk-swf Ultrahochvakuumtechnik (DE-588)4186712-9 s DE-604 Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Yoshimura, Nagamitsu Vacuum technology practice for scientific instruments Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd |
| subject_GND | (DE-588)4186712-9 |
| title | Vacuum technology practice for scientific instruments |
| title_auth | Vacuum technology practice for scientific instruments |
| title_exact_search | Vacuum technology practice for scientific instruments |
| title_exact_search_txtP | Vacuum technology practice for scientific instruments |
| title_full | Vacuum technology practice for scientific instruments Nagamitsu Yoshimura |
| title_fullStr | Vacuum technology practice for scientific instruments Nagamitsu Yoshimura |
| title_full_unstemmed | Vacuum technology practice for scientific instruments Nagamitsu Yoshimura |
| title_short | Vacuum technology |
| title_sort | vacuum technology practice for scientific instruments |
| title_sub | practice for scientific instruments |
| topic | Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik (DE-588)4186712-9 gnd |
| topic_facet | Scientific apparatus and instruments Vacuum technology Ultrahochvakuumtechnik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016409897&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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