Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 29 May - 1 June 2007, Denver, Colorado
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2007
|
| Schriftenreihe: | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena
25,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | S. 1952 - 2664 Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 51 |d 2007 |c Denver, Colo. |j Verfasser |0 (DE-588)10192194-9 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 29 May - 1 June 2007, Denver, Colorado |c ed. for the proceedings: Gregory M. Wallraff |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2007 | |
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| 490 | 0 | |a Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |v 25,6 | |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2006 |z Baltimore Md. |2 gnd-content | |
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| genre_facet | Konferenzschrift 2006 Baltimore Md. |
| id | DE-604.BV023100937 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:44:41Z |
| indexdate | 2024-07-09T21:11:02Z |
| institution | BVB |
| institution_GND | (DE-588)10192194-9 |
| language | English |
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| physical | S. 1952 - 2664 Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 51 2007 Denver, Colo. Verfasser (DE-588)10192194-9 aut Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado ed. for the proceedings: Gregory M. Wallraff New York American Inst. of Physics 2007 S. 1952 - 2664 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena 25,6 Einzelaufnahme eines Zeitschr.-Heftes Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2006 Baltimore Md. gnd-content Nanotechnologie (DE-588)4327470-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Wallraff, Gregory M. Sonstige oth |
| spellingShingle | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)4327470-5 (DE-588)1071861417 |
| title | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado |
| title_auth | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado |
| title_exact_search | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado |
| title_exact_search_txtP | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado |
| title_full | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado ed. for the proceedings: Gregory M. Wallraff |
| title_fullStr | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado ed. for the proceedings: Gregory M. Wallraff |
| title_full_unstemmed | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 29 May - 1 June 2007, Denver, Colorado ed. for the proceedings: Gregory M. Wallraff |
| title_short | Papers from the 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 51st international conference on electron ion and photon beam technology and nanofabrication 29 may 1 june 2007 denver colorado |
| title_sub | 29 May - 1 June 2007, Denver, Colorado |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Teilchenstrahl Nanotechnologie Konferenzschrift 2006 Baltimore Md. |
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