Reliability of MEMS:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2008
|
| Schriftenreihe: | Advanced micro & nanosystems
6 |
| Schlagworte: | |
| Online-Zugang: | Beschreibung für Leser Inhaltsverzeichnis Inhaltsverzeichnis |
| Beschreibung: | XX, 303 S. Ill., graph. Darst. |
| ISBN: | 9783527314942 |
Internformat
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Datensatz im Suchindex
| _version_ | 1805089868535037952 |
|---|---|
| adam_text |
ADVANCED MICRO & NANOSYSTEMS VOLUME 6 RELIABILITYOFMEMS EDITED BY OSAMU
TABATA AND TOSHIYUKI TSUCHIYA WILEY- VCH WILEY-VCH VERLAG GMBH & CO.
KGAA IX CONTENTS PREFACE V FOREWORD VII LIST OF CONTRIBUTORS XI OVERVIEW
XIII EVALUATION OF MECHANICAL PROPERTIES OF MEMS MATERIALS AND THEIR
STANDARDIZATION 1 TOSHIYUKI TSUCHIYA ELASTOPLASTIC INDENTATION CONTACT
MECHANICS OF HOMOGENEOUS MATERIALS AND COATING-SUBSTRATE SYSTEMS 27
MOTOTSUGU SAKAI THIN-FILM CHARACTERIZATION USING THE BULGE TEST 67
OLIVER PAUL, JOAO CASPAR UNIAXIAL TENSILE TEST FOR MEMS MATERIALS 123
TAKAHIRO NAMAZU ON-CHIP TESTING OF MEMS 163 HAROLD KAHN RELIABILITY OF A
CAPACITIVE PRESSURE SENSOR 185 FUMIHIKO SATO, HIDEAKI WATANABE, SHO
SASAKI INERTIAL SENSORS 205 OSAMU TORAYASHIKI, KENJI KOMAKI ADVANCED
MICRO AND NANOSPTEMS VOL. 6. RELIABILITY OFMEMS. EDITED BY OSAMU TABATA
AND TOSHIYUKI TSUCHIYA COPYRIGHT 2008 WILEY-VCH VERLAG GMBH & CO.
KGAA, WEINHEIM ISBN: 978-3-527-31494-2 X CONTENTS 8 INERTIAL SENSORS 225
NORIYUKI YASUIKE 9 RELIABILITY OF MEMS VARIABLE OPTICAL ATTENUATOR 239
HIROSHI TOSHIYOSHI, KEIJI ISAMOTO, CHANGHO CHONG 10 ECO SCAN MEMS
RESONANT MIRROR 267 YUZURU UEDA, AKIRA YAMAZAKI INDEX 291 |
| adam_txt |
ADVANCED MICRO & NANOSYSTEMS VOLUME 6 RELIABILITYOFMEMS EDITED BY OSAMU
TABATA AND TOSHIYUKI TSUCHIYA WILEY- VCH WILEY-VCH VERLAG GMBH & CO.
KGAA IX CONTENTS PREFACE V FOREWORD VII LIST OF CONTRIBUTORS XI OVERVIEW
XIII EVALUATION OF MECHANICAL PROPERTIES OF MEMS MATERIALS AND THEIR
STANDARDIZATION 1 TOSHIYUKI TSUCHIYA ELASTOPLASTIC INDENTATION CONTACT
MECHANICS OF HOMOGENEOUS MATERIALS AND COATING-SUBSTRATE SYSTEMS 27
MOTOTSUGU SAKAI THIN-FILM CHARACTERIZATION USING THE BULGE TEST 67
OLIVER PAUL, JOAO CASPAR UNIAXIAL TENSILE TEST FOR MEMS MATERIALS 123
TAKAHIRO NAMAZU ON-CHIP TESTING OF MEMS 163 HAROLD KAHN RELIABILITY OF A
CAPACITIVE PRESSURE SENSOR 185 FUMIHIKO SATO, HIDEAKI WATANABE, SHO
SASAKI INERTIAL SENSORS 205 OSAMU TORAYASHIKI, KENJI KOMAKI ADVANCED
MICRO AND NANOSPTEMS VOL. 6. RELIABILITY OFMEMS. EDITED BY OSAMU TABATA
AND TOSHIYUKI TSUCHIYA COPYRIGHT 2008 WILEY-VCH VERLAG GMBH & CO.
KGAA, WEINHEIM ISBN: 978-3-527-31494-2 X CONTENTS 8 INERTIAL SENSORS 225
NORIYUKI YASUIKE 9 RELIABILITY OF MEMS VARIABLE OPTICAL ATTENUATOR 239
HIROSHI TOSHIYOSHI, KEIJI ISAMOTO, CHANGHO CHONG 10 ECO SCAN MEMS
RESONANT MIRROR 267 YUZURU UEDA, AKIRA YAMAZAKI INDEX 291 |
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| series2 | Advanced micro & nanosystems |
| spelling | Reliability of MEMS ed. by Osamu Tabata ... Weinheim Wiley-VCH 2008 XX, 303 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 6 Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Tabata, Osamu edt Advanced micro & nanosystems 6 (DE-604)BV019371555 6 http://deposit.dnb.de/cgi-bin/dokserv?id=2909911&prov=M&dok_var=1&dok_ext=htm Beschreibung für Leser http://www.gbv.de/dms/ilmenau/toc/52387989X.PDF Inhaltsverzeichnis GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016293364&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Reliability of MEMS Advanced micro & nanosystems Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4327470-5 |
| title | Reliability of MEMS |
| title_auth | Reliability of MEMS |
| title_exact_search | Reliability of MEMS |
| title_exact_search_txtP | Reliability of MEMS |
| title_full | Reliability of MEMS ed. by Osamu Tabata ... |
| title_fullStr | Reliability of MEMS ed. by Osamu Tabata ... |
| title_full_unstemmed | Reliability of MEMS ed. by Osamu Tabata ... |
| title_short | Reliability of MEMS |
| title_sort | reliability of mems |
| topic | Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Microelectromechanical systems Reliability Mikrosystemtechnik Nanotechnologie |
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