Nano- and micromaterials:
Gespeichert in:
Weitere Verfasser: | |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Berlin [u.a.]
Springer
2008
|
Schriftenreihe: | Advances in materials research
9 |
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | XV, 337 S. Ill., graph. Darst. |
ISBN: | 9783540745563 3540745564 |
Internformat
MARC
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245 | 1 | 0 | |a Nano- and micromaterials |c Kaoru Ohno ... (eds.) |
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300 | |a XV, 337 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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adam_text | GESCANNT DURCH CONTENTS 1 GENERAL INTRODUCTION K. OHNO 1 REFERENCES 15 2
NANOMETER-SCALE STRUCTURE FORMATION ON SOLID SURFACES M. TANAKA, K.
SHUDO, AND S. OHNO 19 2.1 INTRODUCTION 19 2.2 ATOMIC LAYER ETCHING
PROCESSES ON SILICON SURFACES 21 2.2.1 INTRODUCTION 21 2.2.2 REAL-TIME
OPTICAL MEASUREMENTS 24 2.2.3 ADSORPTION OF HALOGEN ATOMS: STICKING
COEFFICIENT AND POTENTIAL BARRIER 2C 2.2.4 SITE-SELECTIVE ADSORPTION 34
2.2.5 DESORPTION OF SILICON HALIDES AND RESTORATION OF THE DAS STRUCTURE
39 2.2.6 SUMMARY 48 2.3 NANOSCALE FABRICATION PROCESSES OF SILICON
SURFACES WITH HALOGENS . 50 2.3.1 INTRODUCTION 50 2.3.2 SCANNING
TUNNELING MICROSCOPY 53 2.3.3 THERMAL DESORPTION PROCESS 56 2.3.4
CLUSTER ALIGNMENT BY PASSIVE FABRICATION 62 2.3.5 ACTIVE FABRICATION 68
2.3.6 SUMMARY 76 2.4 SELF-ORGANIZED NANOPATTERN FORMATION ON COPPER
SURFACES 77 2.4.1 INTRODUCTION 77 2.4.2 EXPERIMENTS 78 2.4.3 NOVEL
PHENOMENA ON CU(001)-C(2X2)N 79 2.4.4 NANOPATTERN FORMATION AT VICINAL
SURFACES 79 2.4.5 STRAIN-DEPENDENT NUCLEATION OF METAL ISLANDS 82 2.4.6
STRAIN-DEPENDENT DISSOCIATION OF OXYGEN MOLECULES 85 2.4.7 SUMMARY 88
REFERENCES 89 BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/985165502
DIGITALISIERT DURCH * * * * * * * * * * * * * * * * 329 XII CONTENTS
12.1.2 ASSEMBLY-FREE, SINGLE-STEP FABRICATION PROCESS OF MOVABLE
MICROPARTS 293 12.2 OPTICALLY DRIVEN MICROMACHINES 296 12.2.1 OPTICAL
TRAPPING 296 12.2.2 OPTICAL DRIVING METHOD OF MULTIPLE MICROMACHINES 298
12.2.3 OPTIMIZATION OF TIME-DIVIDED LASER SCANNING 300 12.2.4
COOPERATIVE CONTROL OF MICROMANIPULATORS 302 12.2.5 OPTICALLY DRIVEN
MICROPUMP 303 12.2.6 CONCEPT OF ALL-OPTICALLY CONTROLLED BIOCHIP 307
12.3 CONCLUSION AND FUTURE PROSPECT 307 REFERENCES 308 13 STUDY OF
COMPLEX PLASMAS M. SHINDO AND O. ISHIHARA 311 13.1 OVERVIEW OF COMPLEX
PLASMA RESEARCH 311 13.2 CHARGING OF A DUST PARTICLE IN A PLASMA 312
13.3 MEASUREMENTS OF THE CHARGE OF DUST PARTICLES LEVITATING IN ELECTRON
BEAM PLASMA [12] 313 13.4 VARIOUS APPROACHES TO PLASMA-AIDED DESIGN OF
MICROPARTICLES SYSTEM IN ION FLOW 315 13.4.1 ANALYSIS OF ION
TRAJECTORIES AROUND A DUST PARTICLE IN ION FLOW [17] 316 13.4.2 WAKE
POTENTIAL FORMATION TO BIND DUST PARTICLES ALIGNED ALONG ION FLOW 318
13.4.3 ATTRACTIVE FORCE BETWEEN DUST PARTICLES ALIGNED PERPENDICULAR TO
ION FLOW [30] 320 13.5 SIMULATION STUDY OF CLUSTER DESIGN OF CHARGED
DUST PARTICLES 321 13.6 COMPLEX PLASMA EXPERIMENT IN CRYOGENIC
ENVIRONMENT [38] 323 13.7 SUMMARY 325 REFERENCES 326 INDEX
|
adam_txt |
GESCANNT DURCH CONTENTS 1 GENERAL INTRODUCTION K. OHNO 1 REFERENCES 15 2
NANOMETER-SCALE STRUCTURE FORMATION ON SOLID SURFACES M. TANAKA, K.
SHUDO, AND S. OHNO 19 2.1 INTRODUCTION 19 2.2 ATOMIC LAYER ETCHING
PROCESSES ON SILICON SURFACES 21 2.2.1 INTRODUCTION 21 2.2.2 REAL-TIME
OPTICAL MEASUREMENTS 24 2.2.3 ADSORPTION OF HALOGEN ATOMS: STICKING
COEFFICIENT AND POTENTIAL BARRIER 2C 2.2.4 SITE-SELECTIVE ADSORPTION 34
2.2.5 DESORPTION OF SILICON HALIDES AND RESTORATION OF THE DAS STRUCTURE
39 2.2.6 SUMMARY 48 2.3 NANOSCALE FABRICATION PROCESSES OF SILICON
SURFACES WITH HALOGENS . 50 2.3.1 INTRODUCTION 50 2.3.2 SCANNING
TUNNELING MICROSCOPY 53 2.3.3 THERMAL DESORPTION PROCESS 56 2.3.4
CLUSTER ALIGNMENT BY PASSIVE FABRICATION 62 2.3.5 ACTIVE FABRICATION 68
2.3.6 SUMMARY 76 2.4 SELF-ORGANIZED NANOPATTERN FORMATION ON COPPER
SURFACES 77 2.4.1 INTRODUCTION 77 2.4.2 EXPERIMENTS 78 2.4.3 NOVEL
PHENOMENA ON CU(001)-C(2X2)N 79 2.4.4 NANOPATTERN FORMATION AT VICINAL
SURFACES 79 2.4.5 STRAIN-DEPENDENT NUCLEATION OF METAL ISLANDS 82 2.4.6
STRAIN-DEPENDENT DISSOCIATION OF OXYGEN MOLECULES 85 2.4.7 SUMMARY 88
REFERENCES 89 BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/985165502
DIGITALISIERT DURCH * * * * * * * * * * * * * * * * 329 XII CONTENTS
12.1.2 ASSEMBLY-FREE, SINGLE-STEP FABRICATION PROCESS OF MOVABLE
MICROPARTS 293 12.2 OPTICALLY DRIVEN MICROMACHINES 296 12.2.1 OPTICAL
TRAPPING 296 12.2.2 OPTICAL DRIVING METHOD OF MULTIPLE MICROMACHINES 298
12.2.3 OPTIMIZATION OF TIME-DIVIDED LASER SCANNING 300 12.2.4
COOPERATIVE CONTROL OF MICROMANIPULATORS 302 12.2.5 OPTICALLY DRIVEN
MICROPUMP 303 12.2.6 CONCEPT OF ALL-OPTICALLY CONTROLLED BIOCHIP 307
12.3 CONCLUSION AND FUTURE PROSPECT 307 REFERENCES 308 13 STUDY OF
COMPLEX PLASMAS M. SHINDO AND O. ISHIHARA 311 13.1 OVERVIEW OF COMPLEX
PLASMA RESEARCH 311 13.2 CHARGING OF A DUST PARTICLE IN A PLASMA 312
13.3 MEASUREMENTS OF THE CHARGE OF DUST PARTICLES LEVITATING IN ELECTRON
BEAM PLASMA [12] 313 13.4 VARIOUS APPROACHES TO PLASMA-AIDED DESIGN OF
MICROPARTICLES SYSTEM IN ION FLOW 315 13.4.1 ANALYSIS OF ION
TRAJECTORIES AROUND A DUST PARTICLE IN ION FLOW [17] 316 13.4.2 WAKE
POTENTIAL FORMATION TO BIND DUST PARTICLES ALIGNED ALONG ION FLOW 318
13.4.3 ATTRACTIVE FORCE BETWEEN DUST PARTICLES ALIGNED PERPENDICULAR TO
ION FLOW [30] 320 13.5 SIMULATION STUDY OF CLUSTER DESIGN OF CHARGED
DUST PARTICLES 321 13.6 COMPLEX PLASMA EXPERIMENT IN CRYOGENIC
ENVIRONMENT [38] 323 13.7 SUMMARY 325 REFERENCES 326 INDEX |
any_adam_object | 1 |
any_adam_object_boolean | 1 |
author2 | Ohno, Kaoru 1955- |
author2_role | edt |
author2_variant | k o ko |
author_GND | (DE-588)121026760 |
author_facet | Ohno, Kaoru 1955- |
building | Verbundindex |
bvnumber | BV023090331 |
callnumber-first | T - Technology |
callnumber-label | TA418 |
callnumber-raw | TA418.9.N35 |
callnumber-search | TA418.9.N35 |
callnumber-sort | TA 3418.9 N35 |
callnumber-subject | TA - General and Civil Engineering |
classification_rvk | UP 7500 VE 9850 |
ctrlnum | (OCoLC)191890012 (DE-599)DNB985165502 |
dewey-full | 620.5 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.5 |
dewey-search | 620.5 |
dewey-sort | 3620.5 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Chemie / Pharmazie Maschinenbau / Maschinenwesen Physik |
discipline_str_mv | Chemie / Pharmazie Maschinenbau / Maschinenwesen Physik |
format | Book |
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illustrated | Illustrated |
index_date | 2024-07-02T19:40:41Z |
indexdate | 2024-07-09T21:10:47Z |
institution | BVB |
isbn | 9783540745563 3540745564 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016293210 |
oclc_num | 191890012 |
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owner_facet | DE-703 DE-19 DE-BY-UBM |
physical | XV, 337 S. Ill., graph. Darst. |
publishDate | 2008 |
publishDateSearch | 2008 |
publishDateSort | 2008 |
publisher | Springer |
record_format | marc |
series | Advances in materials research |
series2 | Advances in materials research |
spelling | Nano- and micromaterials Kaoru Ohno ... (eds.) Berlin [u.a.] Springer 2008 XV, 337 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advances in materials research 9 Nanostructured materials Nanostructures Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Nanostrukturiertes Material (DE-588)4342626-8 s DE-604 Nanotechnologie (DE-588)4327470-5 s Ohno, Kaoru 1955- (DE-588)121026760 edt Advances in materials research 9 (DE-604)BV012271346 9 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016293210&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Nano- and micromaterials Advances in materials research Nanostructured materials Nanostructures Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanotechnologie (DE-588)4327470-5 gnd |
subject_GND | (DE-588)4342626-8 (DE-588)4327470-5 (DE-588)4143413-4 |
title | Nano- and micromaterials |
title_auth | Nano- and micromaterials |
title_exact_search | Nano- and micromaterials |
title_exact_search_txtP | Nano- and micromaterials |
title_full | Nano- and micromaterials Kaoru Ohno ... (eds.) |
title_fullStr | Nano- and micromaterials Kaoru Ohno ... (eds.) |
title_full_unstemmed | Nano- and micromaterials Kaoru Ohno ... (eds.) |
title_short | Nano- and micromaterials |
title_sort | nano and micromaterials |
topic | Nanostructured materials Nanostructures Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanotechnologie (DE-588)4327470-5 gnd |
topic_facet | Nanostructured materials Nanostructures Nanostrukturiertes Material Nanotechnologie Aufsatzsammlung |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016293210&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV012271346 |
work_keys_str_mv | AT ohnokaoru nanoandmicromaterials |