Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Westwood, NJ
Noyes Publ.
1998
|
| Series: | Noyes publications in materials science, process technology and semiconductors
|
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XXVII, 917 S. Ill., graph. Darst.) |
| ISBN: | 9780815517634 9780815514220 |
Staff View
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Record in the Search Index
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| illustrated | Illustrated |
| index_date | 2024-07-02T19:24:55Z |
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| institution | BVB |
| isbn | 9780815517634 9780815514220 |
| language | English |
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| oclc_num | 632999849 |
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| physical | 1 Online-Ressource (XXVII, 917 S. Ill., graph. Darst.) |
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| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Noyes Publ. |
| record_format | marc |
| series2 | Noyes publications in materials science, process technology and semiconductors |
| spelling | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox Westwood, NJ Noyes Publ. 1998 1 Online-Ressource (XXVII, 917 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Noyes publications in materials science, process technology and semiconductors PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 s DE-604 Mattox, Donald M. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=63 Volltext |
| spellingShingle | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4115673-0 |
| title | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_auth | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_exact_search_txtP | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_full | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control by Donald M. Mattox |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition pvd processing film formation adhesion surface preparation and contamination control |
| title_sub | film formation, adhesion, surface preparation and contamination control |
| topic | PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | PVD-Verfahren |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=63 |
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