Holdings: Handbook of semiconductor wafer cleaning technology

Handbook of semiconductor wafer cleaning technology: science, technology, and applications

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Bibliographic Details
Format:	Electronic eBook
Language:	English
Published:	Park Ridge, NJ Noyes 1993
Series:	Materials science and process technology series
Subjects:	Halbleiter Scheibe Reinigung Oberflächenreinigung Wafer Aufsatzsammlung
Online Access:	Volltext
Physical Description:	1 Online-Ressource (XX, 623 S. Ill., graph. Darst.)
ISBN:	9781591240938 9780815513315 9780815517726

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MARC


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Record in the Search Index

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index_date	2024-07-02T19:18:50Z
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isbn	9781591240938 9780815513315 9780815517726
language	English
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publishDate	1993
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publisher	Noyes
record_format	marc
series2	Materials science and process technology series
spelling	Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern Park Ridge, NJ Noyes 1993 1 Online-Ressource (XX, 623 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Halbleiter (DE-588)4022993-2 gnd rswk-swf Scheibe (DE-588)4052190-4 gnd rswk-swf Reinigung (DE-588)4049250-3 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Wafer (DE-588)4294605-0 s Reinigung (DE-588)4049250-3 s DE-604 Oberflächenreinigung (DE-588)4204243-4 s Halbleiter (DE-588)4022993-2 s 1\p DE-604 Scheibe (DE-588)4052190-4 s 2\p DE-604 Kern, Werner Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=132 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Handbook of semiconductor wafer cleaning technology science, technology, and applications Halbleiter (DE-588)4022993-2 gnd Scheibe (DE-588)4052190-4 gnd Reinigung (DE-588)4049250-3 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd
subject_GND	(DE-588)4022993-2 (DE-588)4052190-4 (DE-588)4049250-3 (DE-588)4204243-4 (DE-588)4294605-0 (DE-588)4143413-4
title	Handbook of semiconductor wafer cleaning technology science, technology, and applications
title_auth	Handbook of semiconductor wafer cleaning technology science, technology, and applications
title_exact_search	Handbook of semiconductor wafer cleaning technology science, technology, and applications
title_exact_search_txtP	Handbook of semiconductor wafer cleaning technology science, technology, and applications
title_full	Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern
title_fullStr	Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern
title_full_unstemmed	Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern
title_short	Handbook of semiconductor wafer cleaning technology
title_sort	handbook of semiconductor wafer cleaning technology science technology and applications
title_sub	science, technology, and applications
topic	Halbleiter (DE-588)4022993-2 gnd Scheibe (DE-588)4052190-4 gnd Reinigung (DE-588)4049250-3 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd
topic_facet	Halbleiter Scheibe Reinigung Oberflächenreinigung Wafer Aufsatzsammlung
url	http://knovel.com/knovel2/Toc.jsp?BookID=132
work_keys_str_mv	AT kernwerner handbookofsemiconductorwafercleaningtechnologysciencetechnologyandapplications

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