Handbook of semiconductor wafer cleaning technology: science, technology, and applications
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, NJ
Noyes
1993
|
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 Online-Ressource (XX, 623 S. Ill., graph. Darst.) |
| ISBN: | 9781591240938 9780815513315 9780815517726 |
Internformat
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Datensatz im Suchindex
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| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV023035718 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:18:50Z |
| indexdate | 2024-07-31T01:10:23Z |
| institution | BVB |
| isbn | 9781591240938 9780815513315 9780815517726 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016239500 |
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| physical | 1 Online-Ressource (XX, 623 S. Ill., graph. Darst.) |
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| publishDate | 1993 |
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| publisher | Noyes |
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| series2 | Materials science and process technology series |
| spelling | Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern Park Ridge, NJ Noyes 1993 1 Online-Ressource (XX, 623 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Halbleiter (DE-588)4022993-2 gnd rswk-swf Scheibe (DE-588)4052190-4 gnd rswk-swf Reinigung (DE-588)4049250-3 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Wafer (DE-588)4294605-0 s Reinigung (DE-588)4049250-3 s DE-604 Oberflächenreinigung (DE-588)4204243-4 s Halbleiter (DE-588)4022993-2 s 1\p DE-604 Scheibe (DE-588)4052190-4 s 2\p DE-604 Kern, Werner Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=132 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of semiconductor wafer cleaning technology science, technology, and applications Halbleiter (DE-588)4022993-2 gnd Scheibe (DE-588)4052190-4 gnd Reinigung (DE-588)4049250-3 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4052190-4 (DE-588)4049250-3 (DE-588)4204243-4 (DE-588)4294605-0 (DE-588)4143413-4 |
| title | Handbook of semiconductor wafer cleaning technology science, technology, and applications |
| title_auth | Handbook of semiconductor wafer cleaning technology science, technology, and applications |
| title_exact_search | Handbook of semiconductor wafer cleaning technology science, technology, and applications |
| title_exact_search_txtP | Handbook of semiconductor wafer cleaning technology science, technology, and applications |
| title_full | Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern |
| title_fullStr | Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern |
| title_full_unstemmed | Handbook of semiconductor wafer cleaning technology science, technology, and applications ed. by Werner Kern |
| title_short | Handbook of semiconductor wafer cleaning technology |
| title_sort | handbook of semiconductor wafer cleaning technology science technology and applications |
| title_sub | science, technology, and applications |
| topic | Halbleiter (DE-588)4022993-2 gnd Scheibe (DE-588)4052190-4 gnd Reinigung (DE-588)4049250-3 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | Halbleiter Scheibe Reinigung Oberflächenreinigung Wafer Aufsatzsammlung |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=132 |
| work_keys_str_mv | AT kernwerner handbookofsemiconductorwafercleaningtechnologysciencetechnologyandapplications |