(1993). Handbook of semiconductor wafer cleaning technology: Science, technology, and applications. Noyes.
Chicago Style (17th ed.) CitationHandbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Park Ridge, NJ: Noyes, 1993.
MLA (9th ed.) CitationHandbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Noyes, 1993.
Warning: These citations may not always be 100% accurate.