APA (7th ed.) Citation

(1993). Handbook of semiconductor wafer cleaning technology: Science, technology, and applications. Noyes.

Chicago Style (17th ed.) Citation

Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Park Ridge, NJ: Noyes, 1993.

MLA (9th ed.) Citation

Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Noyes, 1993.

Warning: These citations may not always be 100% accurate.