Thin film materials technology: sputtering of compound materials
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwich, NY
Andrew [u.a.]
2004
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| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. |
| ISBN: | 9781591247548 0815514832 3540211187 |
Staff View
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| 245 | 1 | 0 | |a Thin film materials technology |b sputtering of compound materials |c by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| 264 | 1 | |a Norwich, NY |b Andrew [u.a.] |c 2004 | |
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| 700 | 1 | |a Kitabatake, Makoto |e Verfasser |4 aut | |
| 700 | 1 | |a Adachi, Hideaki |e Verfasser |4 aut | |
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Record in the Search Index
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| author | Kitabatake, Makoto Adachi, Hideaki |
| author_facet | Kitabatake, Makoto Adachi, Hideaki |
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| author_sort | Kitabatake, Makoto |
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| building | Verbundindex |
| bvnumber | BV023032358 |
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| collection | ZDB-10-ESC |
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| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV023032358 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:17:30Z |
| indexdate | 2024-07-31T01:09:17Z |
| institution | BVB |
| isbn | 9781591247548 0815514832 3540211187 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016236205 |
| oclc_num | 248964665 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. |
| psigel | ZDB-10-ESC |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Andrew [u.a.] |
| record_format | marc |
| spelling | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi Norwich, NY Andrew [u.a.] 2004 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Sputtern (DE-588)4182614-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s Sputtern (DE-588)4182614-0 s DE-604 Wasa, Kiyotaka Sonstige oth Kitabatake, Makoto Verfasser aut Adachi, Hideaki Verfasser aut http://knovel.com/knovel2/Toc.jsp?BookID=1065 Volltext |
| spellingShingle | Kitabatake, Makoto Adachi, Hideaki Thin film materials technology sputtering of compound materials Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4136339-5 |
| title | Thin film materials technology sputtering of compound materials |
| title_auth | Thin film materials technology sputtering of compound materials |
| title_exact_search | Thin film materials technology sputtering of compound materials |
| title_exact_search_txtP | Thin film materials technology sputtering of compound materials |
| title_full | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_fullStr | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_full_unstemmed | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_short | Thin film materials technology |
| title_sort | thin film materials technology sputtering of compound materials |
| title_sub | sputtering of compound materials |
| topic | Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Sputtern Dünnschichttechnik |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=1065 |
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