Thin film materials technology: sputtering of compound materials
Gespeichert in:
Hauptverfasser: | , |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Norwich, NY
Andrew [u.a.]
2004
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Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. |
ISBN: | 9781591247548 0815514832 3540211187 |
Internformat
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700 | 1 | |a Adachi, Hideaki |e Verfasser |4 aut | |
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Datensatz im Suchindex
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adam_text | |
adam_txt | |
any_adam_object | |
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author | Kitabatake, Makoto Adachi, Hideaki |
author_facet | Kitabatake, Makoto Adachi, Hideaki |
author_role | aut aut |
author_sort | Kitabatake, Makoto |
author_variant | m k mk h a ha |
building | Verbundindex |
bvnumber | BV023032358 |
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classification_tum | ELT 279f |
collection | ZDB-10-ESC |
ctrlnum | (OCoLC)248964665 (DE-599)BVBBV023032358 |
dewey-full | 621.38152 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.38152 |
dewey-search | 621.38152 |
dewey-sort | 3621.38152 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
discipline_str_mv | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
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id | DE-604.BV023032358 |
illustrated | Illustrated |
index_date | 2024-07-02T19:17:30Z |
indexdate | 2024-07-31T01:09:17Z |
institution | BVB |
isbn | 9781591247548 0815514832 3540211187 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016236205 |
oclc_num | 248964665 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM |
owner_facet | DE-91 DE-BY-TUM |
physical | 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. |
psigel | ZDB-10-ESC |
publishDate | 2004 |
publishDateSearch | 2004 |
publishDateSort | 2004 |
publisher | Andrew [u.a.] |
record_format | marc |
spelling | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi Norwich, NY Andrew [u.a.] 2004 1 Online-Ressource (XIV, 518 S.) Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Sputtern (DE-588)4182614-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s Sputtern (DE-588)4182614-0 s DE-604 Wasa, Kiyotaka Sonstige oth Kitabatake, Makoto Verfasser aut Adachi, Hideaki Verfasser aut http://knovel.com/knovel2/Toc.jsp?BookID=1065 Volltext |
spellingShingle | Kitabatake, Makoto Adachi, Hideaki Thin film materials technology sputtering of compound materials Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
subject_GND | (DE-588)4182614-0 (DE-588)4136339-5 |
title | Thin film materials technology sputtering of compound materials |
title_auth | Thin film materials technology sputtering of compound materials |
title_exact_search | Thin film materials technology sputtering of compound materials |
title_exact_search_txtP | Thin film materials technology sputtering of compound materials |
title_full | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
title_fullStr | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
title_full_unstemmed | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
title_short | Thin film materials technology |
title_sort | thin film materials technology sputtering of compound materials |
title_sub | sputtering of compound materials |
topic | Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
topic_facet | Sputtern Dünnschichttechnik |
url | http://knovel.com/knovel2/Toc.jsp?BookID=1065 |
work_keys_str_mv | AT wasakiyotaka thinfilmmaterialstechnologysputteringofcompoundmaterials AT kitabatakemakoto thinfilmmaterialstechnologysputteringofcompoundmaterials AT adachihideaki thinfilmmaterialstechnologysputteringofcompoundmaterials |