Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Westwood, NJ
Noyes
1990
|
| Series: | Materials science and process technology series
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| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.) |
| ISBN: | 9780815517641 0815512201 |
Staff View
MARC
| LEADER | 00000nmm a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV023031339 | ||
| 003 | DE-604 | ||
| 005 | 20110607 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 071203s1990 |||| o||u| ||||||engod | ||
| 020 | |a 9780815517641 |c Online |9 978-0-8155-1764-1 | ||
| 020 | |a 0815512201 |9 0-8155-1220-1 | ||
| 035 | |a (OCoLC)851250387 | ||
| 035 | |a (DE-599)BVBBV023031339 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
| 084 | |a ZM 7680 |0 (DE-625)160562: |2 rvk | ||
| 084 | |a FER 786f |2 stub | ||
| 245 | 1 | 0 | |a Handbook of plasma processing technology |b fundamentals, etching, deposition, and surface interactions |c ed. by Stephen M. Rossnagel ... |
| 264 | 1 | |a Westwood, NJ |b Noyes |c 1990 | |
| 300 | |a 1 Online-Ressource (XXIII, 523 S. |b Ill., graph. Darst.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmastrahlbearbeitung |0 (DE-588)4136199-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmaätzen |0 (DE-588)4174821-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasma |0 (DE-588)4046249-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasmatechnik |0 (DE-588)4140353-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |a Plasmametallurgie |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Plasmatechnik |0 (DE-588)4140353-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 2 | 1 | |a Plasmastrahlbearbeitung |0 (DE-588)4136199-4 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Plasmaätzen |0 (DE-588)4174821-9 |D s |
| 689 | 3 | |5 DE-604 | |
| 689 | 4 | 0 | |a Plasmametallurgie |A f |
| 689 | 4 | |5 DE-604 | |
| 689 | 5 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 5 | |8 1\p |5 DE-604 | |
| 689 | 6 | 0 | |a Plasma |0 (DE-588)4046249-3 |D s |
| 689 | 6 | |8 2\p |5 DE-604 | |
| 689 | 7 | 0 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 7 | |8 3\p |5 DE-604 | |
| 700 | 1 | |a Rossnagel, Stephen M. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://knovel.com/knovel2/Toc.jsp?BookID=522 |3 Volltext |
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 912 | |a ZDB-10-ESC | ||
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-016235220 | |
Record in the Search Index
| _version_ | 1806054885105336320 |
|---|---|
| adam_text | |
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV023031339 |
| classification_rvk | UP 9350 ZM 7680 |
| classification_tum | FER 786f |
| collection | ZDB-10-ESC |
| ctrlnum | (OCoLC)851250387 (DE-599)BVBBV023031339 |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| discipline_str_mv | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000 c 4500</leader><controlfield tag="001">BV023031339</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110607</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">071203s1990 |||| o||u| ||||||engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815517641</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-8155-1764-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815512201</subfield><subfield code="9">0-8155-1220-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)851250387</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023031339</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 9350</subfield><subfield code="0">(DE-625)146462:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7680</subfield><subfield code="0">(DE-625)160562:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 786f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of plasma processing technology</subfield><subfield code="b">fundamentals, etching, deposition, and surface interactions</subfield><subfield code="c">ed. by Stephen M. Rossnagel ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Westwood, NJ</subfield><subfield code="b">Noyes</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XXIII, 523 S.</subfield><subfield code="b">Ill., graph. Darst.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmastrahlbearbeitung</subfield><subfield code="0">(DE-588)4136199-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasma</subfield><subfield code="0">(DE-588)4046249-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Plasmametallurgie</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Plasmastrahlbearbeitung</subfield><subfield code="0">(DE-588)4136199-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Plasmametallurgie</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="6" ind2="0"><subfield code="a">Plasma</subfield><subfield code="0">(DE-588)4046249-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="6" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="7" ind2="0"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="7" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Rossnagel, Stephen M.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://knovel.com/knovel2/Toc.jsp?BookID=522</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-10-ESC</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016235220</subfield></datafield></record></collection> |
| genre | Plasmametallurgie gnd |
| genre_facet | Plasmametallurgie |
| id | DE-604.BV023031339 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:17:07Z |
| indexdate | 2024-07-31T01:09:17Z |
| institution | BVB |
| isbn | 9780815517641 0815512201 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016235220 |
| oclc_num | 851250387 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.) |
| psigel | ZDB-10-ESC |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... Westwood, NJ Noyes 1990 1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Ätzen (DE-588)4000648-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmametallurgie gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s DE-604 Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s Plasmastrahlbearbeitung (DE-588)4136199-4 s Plasmaätzen (DE-588)4174821-9 s Plasmametallurgie f Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Plasma (DE-588)4046249-3 s 2\p DE-604 Ätzen (DE-588)4000648-7 s 3\p DE-604 Rossnagel, Stephen M. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=522 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions Ätzen (DE-588)4000648-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasma (DE-588)4046249-3 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4136339-5 (DE-588)4182614-0 (DE-588)4022993-2 (DE-588)4136199-4 (DE-588)4174821-9 (DE-588)4046249-3 (DE-588)4140353-8 |
| title | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_auth | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_exact_search | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_exact_search_txtP | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_full | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_fullStr | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_full_unstemmed | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_short | Handbook of plasma processing technology |
| title_sort | handbook of plasma processing technology fundamentals etching deposition and surface interactions |
| title_sub | fundamentals, etching, deposition, and surface interactions |
| topic | Ätzen (DE-588)4000648-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasma (DE-588)4046249-3 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Ätzen Dünnschichttechnik Sputtern Halbleiter Plasmastrahlbearbeitung Plasmaätzen Plasma Plasmatechnik Plasmametallurgie |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=522 |
| work_keys_str_mv | AT rossnagelstephenm handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions |