Verfügbarkeit: Handbook of plasma processing technology

Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

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Bibliographische Detailangaben
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Westwood, NJ Noyes 1990
Schriftenreihe:	Materials science and process technology series
Schlagworte:	Ätzen Dünnschichttechnik Sputtern Halbleiter Plasmastrahlbearbeitung Plasmaätzen Plasma Plasmatechnik Plasmametallurgie
Online-Zugang:	Volltext
Beschreibung:	1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.)
ISBN:	9780815517641 0815512201

Internformat

MARC


LEADER	00000nmm a2200000 c 4500
001	BV023031339
003	DE-604
005	20110607
007	cr\|uuu---uuuuu
008	071203s1990 \|\|\|\| o\|\|u\| \|\|\|\|\|\|engod
020			\|a 9780815517641 \|c Online \|9 978-0-8155-1764-1
020			\|a 0815512201 \|9 0-8155-1220-1
035			\|a (OCoLC)851250387
035			\|a (DE-599)BVBBV023031339
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
084			\|a UP 9350 \|0 (DE-625)146462: \|2 rvk
084			\|a ZM 7680 \|0 (DE-625)160562: \|2 rvk
084			\|a FER 786f \|2 stub
245	1	0	\|a Handbook of plasma processing technology \|b fundamentals, etching, deposition, and surface interactions \|c ed. by Stephen M. Rossnagel ...
264		1	\|a Westwood, NJ \|b Noyes \|c 1990
300			\|a 1 Online-Ressource (XXIII, 523 S. \|b Ill., graph. Darst.)
336			\|b txt \|2 rdacontent
337			\|b c \|2 rdamedia
338			\|b cr \|2 rdacarrier
490	0		\|a Materials science and process technology series
650	0	7	\|a Ätzen \|0 (DE-588)4000648-7 \|2 gnd \|9 rswk-swf
650	0	7	\|a Dünnschichttechnik \|0 (DE-588)4136339-5 \|2 gnd \|9 rswk-swf
650	0	7	\|a Sputtern \|0 (DE-588)4182614-0 \|2 gnd \|9 rswk-swf
650	0	7	\|a Halbleiter \|0 (DE-588)4022993-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Plasmastrahlbearbeitung \|0 (DE-588)4136199-4 \|2 gnd \|9 rswk-swf
650	0	7	\|a Plasmaätzen \|0 (DE-588)4174821-9 \|2 gnd \|9 rswk-swf
650	0	7	\|a Plasma \|0 (DE-588)4046249-3 \|2 gnd \|9 rswk-swf
650	0	7	\|a Plasmatechnik \|0 (DE-588)4140353-8 \|2 gnd \|9 rswk-swf
655		7	\|a Plasmametallurgie \|2 gnd \|9 rswk-swf
689	0	0	\|a Plasmatechnik \|0 (DE-588)4140353-8 \|D s
689	0		\|5 DE-604
689	1	0	\|a Sputtern \|0 (DE-588)4182614-0 \|D s
689	1		\|5 DE-604
689	2	0	\|a Halbleiter \|0 (DE-588)4022993-2 \|D s
689	2	1	\|a Plasmastrahlbearbeitung \|0 (DE-588)4136199-4 \|D s
689	2		\|5 DE-604
689	3	0	\|a Plasmaätzen \|0 (DE-588)4174821-9 \|D s
689	3		\|5 DE-604
689	4	0	\|a Plasmametallurgie \|A f
689	4		\|5 DE-604
689	5	0	\|a Dünnschichttechnik \|0 (DE-588)4136339-5 \|D s
689	5		\|8 1\p \|5 DE-604
689	6	0	\|a Plasma \|0 (DE-588)4046249-3 \|D s
689	6		\|8 2\p \|5 DE-604
689	7	0	\|a Ätzen \|0 (DE-588)4000648-7 \|D s
689	7		\|8 3\p \|5 DE-604
700	1		\|a Rossnagel, Stephen M. \|e Sonstige \|4 oth
856	4	0	\|u http://knovel.com/knovel2/Toc.jsp?BookID=522 \|3 Volltext
883	1		\|8 1\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
883	1		\|8 2\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
883	1		\|8 3\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
912			\|a ZDB-10-ESC
943	1		\|a oai:aleph.bib-bvb.de:BVB01-016235220

Datensatz im Suchindex

_version_	1806054885105336320
adam_text
adam_txt
any_adam_object
any_adam_object_boolean
building	Verbundindex
bvnumber	BV023031339
classification_rvk	UP 9350 ZM 7680
classification_tum	FER 786f
collection	ZDB-10-ESC
ctrlnum	(OCoLC)851250387 (DE-599)BVBBV023031339
discipline	Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik
discipline_str_mv	Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik
format	Electronic eBook
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000 c 4500</leader><controlfield tag="001">BV023031339</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110607</controlfield><controlfield tag="007">cr\|uuu---uuuuu</controlfield><controlfield tag="008">071203s1990 \|\|\|\| o\|\|u\| \|\|\|\|\|\|engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815517641</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-8155-1764-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815512201</subfield><subfield code="9">0-8155-1220-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)851250387</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023031339</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 9350</subfield><subfield code="0">(DE-625)146462:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7680</subfield><subfield code="0">(DE-625)160562:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 786f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of plasma processing technology</subfield><subfield code="b">fundamentals, etching, deposition, and surface interactions</subfield><subfield code="c">ed. by Stephen M. Rossnagel ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Westwood, NJ</subfield><subfield code="b">Noyes</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XXIII, 523 S.</subfield><subfield code="b">Ill., graph. Darst.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmastrahlbearbeitung</subfield><subfield code="0">(DE-588)4136199-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasma</subfield><subfield code="0">(DE-588)4046249-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Plasmametallurgie</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmatechnik</subfield><subfield code="0">(DE-588)4140353-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Plasmastrahlbearbeitung</subfield><subfield code="0">(DE-588)4136199-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Plasmametallurgie</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="6" ind2="0"><subfield code="a">Plasma</subfield><subfield code="0">(DE-588)4046249-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="6" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="7" ind2="0"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="7" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Rossnagel, Stephen M.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://knovel.com/knovel2/Toc.jsp?BookID=522</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-10-ESC</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016235220</subfield></datafield></record></collection>
genre	Plasmametallurgie gnd
genre_facet	Plasmametallurgie
id	DE-604.BV023031339
illustrated	Illustrated
index_date	2024-07-02T19:17:07Z
indexdate	2024-07-31T01:09:17Z
institution	BVB
isbn	9780815517641 0815512201
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-016235220
oclc_num	851250387
open_access_boolean
owner	DE-91 DE-BY-TUM
owner_facet	DE-91 DE-BY-TUM
physical	1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.)
psigel	ZDB-10-ESC
publishDate	1990
publishDateSearch	1990
publishDateSort	1990
publisher	Noyes
record_format	marc
series2	Materials science and process technology series
spelling	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... Westwood, NJ Noyes 1990 1 Online-Ressource (XXIII, 523 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Ätzen (DE-588)4000648-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmametallurgie gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s DE-604 Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s Plasmastrahlbearbeitung (DE-588)4136199-4 s Plasmaätzen (DE-588)4174821-9 s Plasmametallurgie f Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Plasma (DE-588)4046249-3 s 2\p DE-604 Ätzen (DE-588)4000648-7 s 3\p DE-604 Rossnagel, Stephen M. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=522 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions Ätzen (DE-588)4000648-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasma (DE-588)4046249-3 gnd Plasmatechnik (DE-588)4140353-8 gnd
subject_GND	(DE-588)4000648-7 (DE-588)4136339-5 (DE-588)4182614-0 (DE-588)4022993-2 (DE-588)4136199-4 (DE-588)4174821-9 (DE-588)4046249-3 (DE-588)4140353-8
title	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_auth	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_exact_search	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_exact_search_txtP	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_full	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_fullStr	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_full_unstemmed	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_short	Handbook of plasma processing technology
title_sort	handbook of plasma processing technology fundamentals etching deposition and surface interactions
title_sub	fundamentals, etching, deposition, and surface interactions
topic	Ätzen (DE-588)4000648-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Halbleiter (DE-588)4022993-2 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasma (DE-588)4046249-3 gnd Plasmatechnik (DE-588)4140353-8 gnd
topic_facet	Ätzen Dünnschichttechnik Sputtern Halbleiter Plasmastrahlbearbeitung Plasmaätzen Plasma Plasmatechnik Plasmametallurgie
url	http://knovel.com/knovel2/Toc.jsp?BookID=522
work_keys_str_mv	AT rossnagelstephenm handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions

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