Electrical and electromechanical properties of ferroelectric thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2007
|
| Schriftenreihe: | Berichte aus der Halbleitertechnik
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zugl.: Aachen, Techn. Hochsch., Diss., 2007 |
| Beschreibung: | X, 114 S. Ill., graph. Darst. |
| ISBN: | 3832256261 9783832256265 |
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Datensatz im Suchindex
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| adam_text | BERICHTE AUS DER HALBLEITERTECHNIK PETER GERBER ELECTRICAL AND
ELECTROMECHANICAL PROPERTIES OF FERROELECTRIC THIN FILMS D 82 (DISS.
RWTH AACHEN) SHAKER VERLAG AACHEN 2007 CONTENTS 1 INTRODUCTION 1 1.1
MOTIVATION 1 1.2 STATE OF THE ART 2 1.3 OBJECTIVES 5 2 FERROELECTRIC
MATERIALS AND THEIR PROPERTIES 7 2.1 FERROELECTRIC MATERIALS - A
DEFINITION 7 2.2 LEAD TITANATE ZIRCONATE 8 2.3 ELECTRICAL PROPERTIES 10
2.4 ELECTROMECHANICAL PROPERTIES 11 2.5 DOMAIN WALLS 13 2.6
SWITCHING-POLARIZATION REVERSAL 15 2.7 REVERSIBLE AND IRREVERSIBLE
PROCESSES 16 2.8 FAILURE MECHANISMS 18 3 EXPERIMENTAL METHODS 20 3.1
SAMPLE PREPARATION 20 3.1.1 LEAD TITANATE ZIRCONATE THIN FILMS 21 3.2
INTERFACE DAMAGING BY ETCHING 22 3.3 PHYSICAL CHARACTERIZATION METHODS
23 3.3.1 X-RAY DIFFRACTION 23 3.3.2 SCANNING ELECTRON MICROSCOPY 24
3.3.3 PROFILOMETRY 25 3.4 ELECTRICAL CHARACTERIZATION METHODS 25 3.4.1
LARGE-SIGNAL HYSTERESIS P 26 3.4.2 SMALL-SIGNAL CAPACITANCE C 27 3.5
ELECTROMECHANICAL CHARACTERIZATION METHODS 30 3.5.1 DOUBLE-BEAM LASER
INTERFEROMETER (DBLI) 31 OPTICAL COMPONENTS: 33 VI BEAM PATH: 37 3.5.2
LARGE-SIGNAL STRAIN S 38 3.5.3 SMALL-SIGNAL PIEZOELECTRIC ^33 AND
ELECTROSTRICTIVE M 33 COEFFICIENTS . . 39 4 RESULTS AND DISCUSSION 41
4.1 INTERFACE DAMAGE 41 4.1.1 WET ETCHING 41 4.1.2 DRY ETCHING 43 AR
ETCHING: 44 CL 2 ETCHING: 44 AR/CF 4 ETCHING: 47 EKC STRIPPING: 49 4.2
GEOMETRIC EFFECTS 51 4.2.1 MEASUREMENT RESULTS 51 4.2.2 METHODICAL
INVESTIGATION .- 55 4.2.3 NUMERICAL SIMULATION 57 4.3 FERROELECTRIC
SWITCHING FATIGUE 61 4.4 SMALL-SIGNAL INFLUENCES 66 4.4.1 MEASUREMENT
RESULTS 66 4.4.2 THEORETIC DISCUSSION 69 ELECTROSTRICTIVE BEHAVIOR: 69
DECREASE OF E C : 72 FURTHER IMPACTS OF SWITCHING: 73 4.5 ANALYTICAL
MODELING 75 4.5.1 MEASUREMENT RESULTS 76 4.5.2 MODELING OF THE LARGE
SIGNAL STRAIN 80 4.5.3 DISCUSSION 83 4.6 COMPOSITION INFLUENCES *T 85
4.6.1 MEASUREMENT RESULTS 86 STRUCTURAL ANALYSIS: 87 VN ELECTRICAL
BEHAVIOR: 88 ELECTROMECHANICAL BEHAVIOR: 91 4.6.2 MODELING OF THE
LARGE-SIGNAL BEHAVIOR 94 ELECTRICAL BEHAVIOR: 94 ELECTROMECHANICAL
BEHAVIOR: 96 4.6.3 APPLICATION SUITABILITY 98 5 CONCLUSIONS 101 5.1
SUMMARY 101 5.2 OUTLOOK 103 REFERENCES 104
|
| adam_txt |
BERICHTE AUS DER HALBLEITERTECHNIK PETER GERBER ELECTRICAL AND
ELECTROMECHANICAL PROPERTIES OF FERROELECTRIC THIN FILMS D 82 (DISS.
RWTH AACHEN) SHAKER VERLAG AACHEN 2007 CONTENTS 1 INTRODUCTION 1 1.1
MOTIVATION 1 1.2 STATE OF THE ART 2 1.3 OBJECTIVES 5 2 FERROELECTRIC
MATERIALS AND THEIR PROPERTIES 7 2.1 FERROELECTRIC MATERIALS - A
DEFINITION 7 2.2 LEAD TITANATE ZIRCONATE 8 2.3 ELECTRICAL PROPERTIES 10
2.4 ELECTROMECHANICAL PROPERTIES 11 2.5 DOMAIN WALLS 13 2.6
SWITCHING-POLARIZATION REVERSAL 15 2.7 REVERSIBLE AND IRREVERSIBLE
PROCESSES 16 2.8 FAILURE MECHANISMS 18 3 EXPERIMENTAL METHODS 20 3.1
SAMPLE PREPARATION 20 3.1.1 LEAD TITANATE ZIRCONATE THIN FILMS 21 3.2
INTERFACE DAMAGING BY ETCHING 22 3.3 PHYSICAL CHARACTERIZATION METHODS
23 3.3.1 X-RAY DIFFRACTION 23 3.3.2 SCANNING ELECTRON MICROSCOPY 24
3.3.3 PROFILOMETRY 25 3.4 ELECTRICAL CHARACTERIZATION METHODS 25 3.4.1
LARGE-SIGNAL HYSTERESIS P 26 3.4.2 SMALL-SIGNAL CAPACITANCE C 27 3.5
ELECTROMECHANICAL CHARACTERIZATION METHODS 30 3.5.1 DOUBLE-BEAM LASER
INTERFEROMETER (DBLI) 31 OPTICAL COMPONENTS: 33 VI BEAM PATH: 37 3.5.2
LARGE-SIGNAL STRAIN S 38 3.5.3 SMALL-SIGNAL PIEZOELECTRIC ^33 AND
ELECTROSTRICTIVE M 33 COEFFICIENTS . . 39 4 RESULTS AND DISCUSSION 41
4.1 INTERFACE DAMAGE 41 4.1.1 WET ETCHING 41 4.1.2 DRY ETCHING 43 AR
ETCHING: 44 CL 2 ETCHING: 44 AR/CF 4 ETCHING: 47 EKC STRIPPING: 49 4.2
GEOMETRIC EFFECTS 51 4.2.1 MEASUREMENT RESULTS 51 4.2.2 METHODICAL
INVESTIGATION .- 55 4.2.3 NUMERICAL SIMULATION 57 4.3 FERROELECTRIC
SWITCHING FATIGUE 61 4.4 SMALL-SIGNAL INFLUENCES 66 4.4.1 MEASUREMENT
RESULTS 66 4.4.2 THEORETIC DISCUSSION 69 ELECTROSTRICTIVE BEHAVIOR: 69
DECREASE OF E C : 72 FURTHER IMPACTS OF SWITCHING: 73 4.5 ANALYTICAL
MODELING 75 4.5.1 MEASUREMENT RESULTS 76 4.5.2 MODELING OF THE LARGE
SIGNAL STRAIN 80 4.5.3 DISCUSSION 83 4.6 COMPOSITION INFLUENCES *T 85
4.6.1 MEASUREMENT RESULTS 86 STRUCTURAL ANALYSIS: 87 VN ELECTRICAL
BEHAVIOR: 88 ELECTROMECHANICAL BEHAVIOR: 91 4.6.2 MODELING OF THE
LARGE-SIGNAL BEHAVIOR 94 ELECTRICAL BEHAVIOR: 94 ELECTROMECHANICAL
BEHAVIOR: 96 4.6.3 APPLICATION SUITABILITY 98 5 CONCLUSIONS 101 5.1
SUMMARY 101 5.2 OUTLOOK 103 REFERENCES 104 |
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| dewey-search | 621.38152 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| illustrated | Illustrated |
| index_date | 2024-07-02T18:58:51Z |
| indexdate | 2024-07-09T21:08:13Z |
| institution | BVB |
| isbn | 3832256261 9783832256265 |
| language | English |
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| physical | X, 114 S. Ill., graph. Darst. |
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| spelling | Gerber, Peter 1975- Verfasser (DE-588)13286620X aut Electrical and electromechanical properties of ferroelectric thin films Peter Gerber Aachen Shaker 2007 X, 114 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berichte aus der Halbleitertechnik Zugl.: Aachen, Techn. Hochsch., Diss., 2007 Dünne Schicht swd Ferroelektrikum swd PZT swd Stoffeigenschaft swd System-in-Package swd Ätzen swd (DE-588)4113937-9 Hochschulschrift gnd-content HEBIS Datenaustausch Darmstadt application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016147900&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Gerber, Peter 1975- Electrical and electromechanical properties of ferroelectric thin films Dünne Schicht swd Ferroelektrikum swd PZT swd Stoffeigenschaft swd System-in-Package swd Ätzen swd |
| subject_GND | (DE-588)4113937-9 |
| title | Electrical and electromechanical properties of ferroelectric thin films |
| title_auth | Electrical and electromechanical properties of ferroelectric thin films |
| title_exact_search | Electrical and electromechanical properties of ferroelectric thin films |
| title_exact_search_txtP | Electrical and electromechanical properties of ferroelectric thin films |
| title_full | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_fullStr | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_full_unstemmed | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_short | Electrical and electromechanical properties of ferroelectric thin films |
| title_sort | electrical and electromechanical properties of ferroelectric thin films |
| topic | Dünne Schicht swd Ferroelektrikum swd PZT swd Stoffeigenschaft swd System-in-Package swd Ätzen swd |
| topic_facet | Dünne Schicht Ferroelektrikum PZT Stoffeigenschaft System-in-Package Ätzen Hochschulschrift |
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