APA (7th ed.) Citation

(2008). Microelectronic applications of chemical mechanical planarization. Wiley.

Chicago Style (17th ed.) Citation

Microelectronic Applications of Chemical Mechanical Planarization. Hoboken, N.J: Wiley, 2008.

MLA (9th ed.) Citation

Microelectronic Applications of Chemical Mechanical Planarization. Wiley, 2008.

Warning: These citations may not always be 100% accurate.