Focused ion beam systems: basics and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Cambridge [u.a.]
Cambridge Univ. Press
2007
|
| Ausgabe: | 1. publ. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XI, 395 S. Ill., graph. Darst. |
| ISBN: | 9780521831994 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804137000097284096 |
|---|---|
| adam_text | Titel: Focused ion beam systems
Autor: Yao, Nan
Jahr: 2007
Contents
List of contributors page vii
Preface xi
1 Introduction to the focused ion beam system 1
Nan Yao
2 Interaction of ions with matter 31
Nobutsugu Imanishi
3 Gas assisted ion beam etching and deposition 67
Hyoung Ho (Chris) Kang, Clive Chandler, and Matthew Weschler
4 Imaging using electrons and ion beams 87
Kaoru Ohya and Tohru Ishitani
5 Characterization methods using FIB/SEM DualBeam
instrumentation 126
Steve Reyntjens and Lucille A. Giannuzzi
6 High-density FIB-SEM 3D nanotomography: with applications
of real-time imaging during FIB milling 146
E. L. Principe
1 Fabrication of nanoscale structures using ion beams 187
Ampere A. Tseng
8 Preparation for physico-chemical analysis 215
Richard Langford
9 In-situ sample manipulation and imaging 250
T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani
vi Contents
10 Micro-machining and mask repair 268
Mark Utlaut
11 Three-dimensional visualization of nanostractured materials
using focused ion beam tomography 295
Derren Dunn, Alan J. Kubis, and Robert Hull
12 Ion beam implantation of surface layers 318
Daniel Recht and Nan Yao
13 Applications for biological materials 337
Kirk Hou and Nan Yao
14 Focused ion beam systems as a multifunctional tool for
nanotechnology 355
Toshiaki Fujii, Tatsuya Asahata, and Takashi Kaito
Index 391
|
| adam_txt |
Titel: Focused ion beam systems
Autor: Yao, Nan
Jahr: 2007
Contents
List of contributors page vii
Preface xi
1 Introduction to the focused ion beam system 1
Nan Yao
2 Interaction of ions with matter 31
Nobutsugu Imanishi
3 Gas assisted ion beam etching and deposition 67
Hyoung Ho (Chris) Kang, Clive Chandler, and Matthew Weschler
4 Imaging using electrons and ion beams 87
Kaoru Ohya and Tohru Ishitani
5 Characterization methods using FIB/SEM DualBeam
instrumentation 126
Steve Reyntjens and Lucille A. Giannuzzi
6 High-density FIB-SEM 3D nanotomography: with applications
of real-time imaging during FIB milling 146
E. L. Principe
1 Fabrication of nanoscale structures using ion beams 187
Ampere A. Tseng
8 Preparation for physico-chemical analysis 215
Richard Langford
9 In-situ sample manipulation and imaging 250
T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani
vi Contents
10 Micro-machining and mask repair 268
Mark Utlaut
11 Three-dimensional visualization of nanostractured materials
using focused ion beam tomography 295
Derren Dunn, Alan J. Kubis, and Robert Hull
12 Ion beam implantation of surface layers 318
Daniel Recht and Nan Yao
13 Applications for biological materials 337
Kirk Hou and Nan Yao
14 Focused ion beam systems as a multifunctional tool for
nanotechnology 355
Toshiaki Fujii, Tatsuya Asahata, and Takashi Kaito
Index 391 |
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| spelling | Focused ion beam systems basics and applications ed. by Nan Yao 1. publ. Cambridge [u.a.] Cambridge Univ. Press 2007 XI, 395 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Focused ion beams Focused ion beams Industrial applications Ionenstrahl (DE-588)4162347-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Ionenstrahl (DE-588)4162347-2 s DE-604 Yao, Nan Sonstige oth HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015959477&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Focused ion beam systems basics and applications Focused ion beams Focused ion beams Industrial applications Ionenstrahl (DE-588)4162347-2 gnd |
| subject_GND | (DE-588)4162347-2 (DE-588)4143413-4 |
| title | Focused ion beam systems basics and applications |
| title_auth | Focused ion beam systems basics and applications |
| title_exact_search | Focused ion beam systems basics and applications |
| title_exact_search_txtP | Focused ion beam systems basics and applications |
| title_full | Focused ion beam systems basics and applications ed. by Nan Yao |
| title_fullStr | Focused ion beam systems basics and applications ed. by Nan Yao |
| title_full_unstemmed | Focused ion beam systems basics and applications ed. by Nan Yao |
| title_short | Focused ion beam systems |
| title_sort | focused ion beam systems basics and applications |
| title_sub | basics and applications |
| topic | Focused ion beams Focused ion beams Industrial applications Ionenstrahl (DE-588)4162347-2 gnd |
| topic_facet | Focused ion beams Focused ion beams Industrial applications Ionenstrahl Aufsatzsammlung |
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