Microlithography: science and technology
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Boca Raton, FL
CRC Press
2007
|
| Edition: | 2nd ed. |
| Series: | Optical science and engineering;126
126 |
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource |
Staff View
MARC
| LEADER | 00000nmm a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV022460216 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 070612s2007 |||| o||u| ||||||eng d | ||
| 035 | |a (OCoLC)137293053 | ||
| 035 | |a (DE-599)BVBBV022460216 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 050 | 0 | |a TK7836 | |
| 082 | 0 | |a 621.3815/31 |2 22 | |
| 084 | |a ZN 4150 |0 (DE-625)157360: |2 rvk | ||
| 245 | 1 | 0 | |a Microlithography |b science and technology |c ed. by Kazuaki Suzuki; Bruce W. Smith |
| 250 | |a 2nd ed. | ||
| 264 | 1 | |a Boca Raton, FL |b CRC Press |c 2007 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 1 | |a Optical science and engineering;126 | |
| 650 | 4 | |a Integrated circuits |x Masks | |
| 650 | 4 | |a Manufacturing processes | |
| 650 | 4 | |a Metal oxide semiconductors, Complementary |x Design and construction | |
| 650 | 4 | |a Microlithography |x Industrial applications | |
| 650 | 0 | 7 | |a Maskentechnik |0 (DE-588)4125845-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | 1 | |a Maskentechnik |0 (DE-588)4125845-9 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Suzuki, Kazuaki |e Sonstige |4 oth | |
| 830 | 0 | |a Optical science and engineering;126 |v 126 |w (DE-604)BV021746449 |9 126 | |
| 856 | 4 | 0 | |u http://www.engnetbase.com/books/5515/dk2278_c000.pdf |x Verlag |3 Volltext |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015667909 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Record in the Search Index
| _version_ | 1804136543111086080 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV022460216 |
| callnumber-first | T - Technology |
| callnumber-label | TK7836 |
| callnumber-raw | TK7836 |
| callnumber-search | TK7836 |
| callnumber-sort | TK 47836 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4150 |
| ctrlnum | (OCoLC)137293053 (DE-599)BVBBV022460216 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed. |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01634nmm a2200433 cb4500</leader><controlfield tag="001">BV022460216</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">070612s2007 |||| o||u| ||||||eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)137293053</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022460216</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7836</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/31</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4150</subfield><subfield code="0">(DE-625)157360:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microlithography</subfield><subfield code="b">science and technology</subfield><subfield code="c">ed. by Kazuaki Suzuki; Bruce W. Smith</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2nd ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boca Raton, FL</subfield><subfield code="b">CRC Press</subfield><subfield code="c">2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Optical science and engineering;126</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Masks</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Manufacturing processes</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metal oxide semiconductors, Complementary</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Maskentechnik</subfield><subfield code="0">(DE-588)4125845-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Maskentechnik</subfield><subfield code="0">(DE-588)4125845-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Suzuki, Kazuaki</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Optical science and engineering;126</subfield><subfield code="v">126</subfield><subfield code="w">(DE-604)BV021746449</subfield><subfield code="9">126</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.engnetbase.com/books/5515/dk2278_c000.pdf</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015667909</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| id | DE-604.BV022460216 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T17:39:52Z |
| indexdate | 2024-07-09T20:58:04Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015667909 |
| oclc_num | 137293053 |
| open_access_boolean | |
| physical | 1 Online-Ressource |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | CRC Press |
| record_format | marc |
| series | Optical science and engineering;126 |
| series2 | Optical science and engineering;126 |
| spelling | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith 2nd ed. Boca Raton, FL CRC Press 2007 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Optical science and engineering;126 Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s Maskentechnik (DE-588)4125845-9 s 1\p DE-604 Suzuki, Kazuaki Sonstige oth Optical science and engineering;126 126 (DE-604)BV021746449 126 http://www.engnetbase.com/books/5515/dk2278_c000.pdf Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Microlithography science and technology Optical science and engineering;126 Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4191584-7 |
| title | Microlithography science and technology |
| title_auth | Microlithography science and technology |
| title_exact_search | Microlithography science and technology |
| title_exact_search_txtP | Microlithography science and technology |
| title_full | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_fullStr | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_full_unstemmed | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_short | Microlithography |
| title_sort | microlithography science and technology |
| title_sub | science and technology |
| topic | Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik Lithografie Halbleitertechnologie |
| url | http://www.engnetbase.com/books/5515/dk2278_c000.pdf |
| volume_link | (DE-604)BV021746449 |
| work_keys_str_mv | AT suzukikazuaki microlithographyscienceandtechnology |