Microlithography: science and technology
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boca Raton, FL
CRC Press
2007
|
| Ausgabe: | 2nd ed. |
| Schriftenreihe: | Optical science and engineering;126
126 |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 Online-Ressource |
Internformat
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| 650 | 4 | |a Integrated circuits |x Masks | |
| 650 | 4 | |a Manufacturing processes | |
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Datensatz im Suchindex
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| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/31 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed. |
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| illustrated | Not Illustrated |
| index_date | 2024-07-02T17:39:52Z |
| indexdate | 2024-07-09T20:58:04Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015667909 |
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| physical | 1 Online-Ressource |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | CRC Press |
| record_format | marc |
| series | Optical science and engineering;126 |
| series2 | Optical science and engineering;126 |
| spelling | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith 2nd ed. Boca Raton, FL CRC Press 2007 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Optical science and engineering;126 Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s Maskentechnik (DE-588)4125845-9 s 1\p DE-604 Suzuki, Kazuaki Sonstige oth Optical science and engineering;126 126 (DE-604)BV021746449 126 http://www.engnetbase.com/books/5515/dk2278_c000.pdf Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Microlithography science and technology Optical science and engineering;126 Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4191584-7 |
| title | Microlithography science and technology |
| title_auth | Microlithography science and technology |
| title_exact_search | Microlithography science and technology |
| title_exact_search_txtP | Microlithography science and technology |
| title_full | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_fullStr | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_full_unstemmed | Microlithography science and technology ed. by Kazuaki Suzuki; Bruce W. Smith |
| title_short | Microlithography |
| title_sort | microlithography science and technology |
| title_sub | science and technology |
| topic | Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Maskentechnik Lithografie Halbleitertechnologie |
| url | http://www.engnetbase.com/books/5515/dk2278_c000.pdf |
| volume_link | (DE-604)BV021746449 |
| work_keys_str_mv | AT suzukikazuaki microlithographyscienceandtechnology |