APA (7th ed.) Citation

(2007). Microlithography: Science and technology (2nd ed.). CRC Press.

Chicago Style (17th ed.) Citation

Microlithography: Science and Technology. 2nd ed. Boca Raton, FL: CRC Press, 2007.

MLA (9th ed.) Citation

Microlithography: Science and Technology. 2nd ed. CRC Press, 2007.

Warning: These citations may not always be 100% accurate.