Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005): 8 - 10 June 2005, Kanazawa, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY [u.a.]
Pergamon
2005
|
| Schriftenreihe: | Vacuum
80,7 : Special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | S. 647 - 840 Ill., graph. Darst. |
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| id | DE-604.BV022422638 |
| illustrated | Illustrated |
| index_date | 2024-07-02T17:26:13Z |
| indexdate | 2024-07-09T20:57:15Z |
| institution | BVB |
| institution_GND | (DE-588)6055121-5 |
| language | English |
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| physical | S. 647 - 840 Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
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| publisher | Pergamon |
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| spelling | International Symposium on Sputtering and Plasma Processes 8 2005 Kanazawa Verfasser (DE-588)6055121-5 aut Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan guest ed. E. Kusano ... New York, NY [u.a.] Pergamon 2005 S. 647 - 840 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 80,7 : Special issue Einzelaufnahme eines Zs.-Heftes Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Kongress - Kanazawa <2005> - Plasma - Sputtern Dünnschichttechnik (DE-588)4136339-5 s Plasmatechnik (DE-588)4140353-8 s DE-604 Kusano, Eisaburo Sonstige oth |
| spellingShingle | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan Dünnschichttechnik (DE-588)4136339-5 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4140353-8 (DE-588)1071861417 |
| title | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan |
| title_auth | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan |
| title_exact_search | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan |
| title_exact_search_txtP | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan |
| title_full | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan guest ed. E. Kusano ... |
| title_fullStr | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan guest ed. E. Kusano ... |
| title_full_unstemmed | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) 8 - 10 June 2005, Kanazawa, Japan guest ed. E. Kusano ... |
| title_short | Selected papers revised from the proceedings of the Eighth International Symposium on Sputtering and Plasma Processes (ISSP 2005) |
| title_sort | selected papers revised from the proceedings of the eighth international symposium on sputtering and plasma processes issp 2005 8 10 june 2005 kanazawa japan |
| title_sub | 8 - 10 June 2005, Kanazawa, Japan |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Dünnschichttechnik Plasmatechnik Konferenzschrift Kongress - Kanazawa <2005> - Plasma - Sputtern |
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