Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2006
|
| Schriftenreihe: | Materials chemistry dissertation
No. 7 |
| Schlagworte: | |
| Online-Zugang: | kostenfrei http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/ http://d-nb.info/982281218/34 https://nbn-resolving.org/urn:nbn:de:hbz:82-opus-16632 |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9783832255220 3832255222 |
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Datensatz im Suchindex
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| spelling | Mráz, Stanislav 1977- Verfasser (DE-588)132247429 aut Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films vorgelegt von Stanislav Mráz Aachen Shaker 2006 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Materials chemistry dissertation No. 7 Zugl.: Aachen, Techn. Hochsch., Diss., 2006 Langzeitarchivierung in der Deutschen Nationalbibliothek gewährleistet Übergangsmetalloxide (DE-588)4186583-2 gnd rswk-swf Partialdruck (DE-588)4173433-6 gnd rswk-swf Magnetronsputtern (DE-588)4208514-7 gnd rswk-swf Sauerstoff (DE-588)4051803-6 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Oxidschicht (DE-588)4044242-1 gnd rswk-swf Plasmachemie (DE-588)4254737-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Oxidschicht (DE-588)4044242-1 s Sputtern (DE-588)4182614-0 s Plasmachemie (DE-588)4254737-4 s DE-604 Übergangsmetalloxide (DE-588)4186583-2 s Dünne Schicht (DE-588)4136925-7 s Magnetronsputtern (DE-588)4208514-7 s Sauerstoff (DE-588)4051803-6 s Partialdruck (DE-588)4173433-6 s 1\p DE-604 Materials chemistry dissertation No. 7 (DE-604)BV021323383 7 ca. 1,4 MB http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/pdf/Mraz_Stanislav.pdf Verlag kostenfrei http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/ Verlag http://d-nb.info/982281218/34 Langzeitarchivierung Nationalbibliothek https://nbn-resolving.org/urn:nbn:de:hbz:82-opus-16632 Resolving-System 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mráz, Stanislav 1977- Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films Materials chemistry dissertation Übergangsmetalloxide (DE-588)4186583-2 gnd Partialdruck (DE-588)4173433-6 gnd Magnetronsputtern (DE-588)4208514-7 gnd Sauerstoff (DE-588)4051803-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Sputtern (DE-588)4182614-0 gnd Oxidschicht (DE-588)4044242-1 gnd Plasmachemie (DE-588)4254737-4 gnd |
| subject_GND | (DE-588)4186583-2 (DE-588)4173433-6 (DE-588)4208514-7 (DE-588)4051803-6 (DE-588)4136925-7 (DE-588)4182614-0 (DE-588)4044242-1 (DE-588)4254737-4 (DE-588)4113937-9 |
| title | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| title_auth | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| title_exact_search | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| title_exact_search_txtP | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| title_full | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films vorgelegt von Stanislav Mráz |
| title_fullStr | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films vorgelegt von Stanislav Mráz |
| title_full_unstemmed | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films vorgelegt von Stanislav Mráz |
| title_short | Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| title_sort | influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films |
| topic | Übergangsmetalloxide (DE-588)4186583-2 gnd Partialdruck (DE-588)4173433-6 gnd Magnetronsputtern (DE-588)4208514-7 gnd Sauerstoff (DE-588)4051803-6 gnd Dünne Schicht (DE-588)4136925-7 gnd Sputtern (DE-588)4182614-0 gnd Oxidschicht (DE-588)4044242-1 gnd Plasmachemie (DE-588)4254737-4 gnd |
| topic_facet | Übergangsmetalloxide Partialdruck Magnetronsputtern Sauerstoff Dünne Schicht Sputtern Oxidschicht Plasmachemie Hochschulschrift |
| url | http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/pdf/Mraz_Stanislav.pdf http://darwin.bth.rwth-aachen.de/opus3/volltexte/2006/1663/ http://d-nb.info/982281218/34 https://nbn-resolving.org/urn:nbn:de:hbz:82-opus-16632 |
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