Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 2006, Baltimore, Maryland
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2006
|
| Schriftenreihe: | Journal of vacuum science & technology : B
24,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | S. 2788 - 3264 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV022245059 | ||
| 003 | DE-604 | ||
| 005 | 20220329 | ||
| 007 | t | ||
| 008 | 070129s2006 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)634958303 | ||
| 035 | |a (DE-599)BVBBV022245059 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-706 | ||
| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 50 |d 2006 |c Baltimore, Md. |j Verfasser |0 (DE-588)6514419-3 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 30 May - 2 June 2006, Baltimore, Maryland |c ed. for the proceedings: Shalom J. Wind |
| 264 | 1 | |a New York, NY |b American Inst. of Physics |c 2006 | |
| 300 | |a S. 2788 - 3264 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B |v 24,6 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a Teilchenstrahl |0 (DE-588)4165339-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 30.05.2006-02.06.2006 |z Baltimore, Md. |2 gnd-content | |
| 689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | 1 | |a Teilchenstrahl |0 (DE-588)4165339-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Wind, Shalom J. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015455933 | ||
Datensatz im Suchindex
| _version_ | 1804136238643412992 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Baltimore, Md |
| author_corporate_role | aut |
| author_facet | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Baltimore, Md |
| author_sort | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Baltimore, Md |
| building | Verbundindex |
| bvnumber | BV022245059 |
| ctrlnum | (OCoLC)634958303 (DE-599)BVBBV022245059 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01491nam a2200349 cb4500</leader><controlfield tag="001">BV022245059</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220329 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">070129s2006 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)634958303</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022245059</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="n">50</subfield><subfield code="d">2006</subfield><subfield code="c">Baltimore, Md.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)6514419-3</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="b">30 May - 2 June 2006, Baltimore, Maryland</subfield><subfield code="c">ed. for the proceedings: Shalom J. Wind</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 2788 - 3264</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology : B</subfield><subfield code="v">24,6</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Teilchenstrahl</subfield><subfield code="0">(DE-588)4165339-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">30.05.2006-02.06.2006</subfield><subfield code="z">Baltimore, Md.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Teilchenstrahl</subfield><subfield code="0">(DE-588)4165339-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wind, Shalom J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015455933</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 30.05.2006-02.06.2006 Baltimore, Md. gnd-content |
| genre_facet | Konferenzschrift 30.05.2006-02.06.2006 Baltimore, Md. |
| id | DE-604.BV022245059 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:37:24Z |
| indexdate | 2024-07-09T20:53:14Z |
| institution | BVB |
| institution_GND | (DE-588)6514419-3 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015455933 |
| oclc_num | 634958303 |
| open_access_boolean | |
| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | S. 2788 - 3264 Ill., graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 50 2006 Baltimore, Md. Verfasser (DE-588)6514419-3 aut Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland ed. for the proceedings: Shalom J. Wind New York, NY American Inst. of Physics 2006 S. 2788 - 3264 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B 24,6 Einzelaufnahme eines Zeitschr.-Heftes Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 30.05.2006-02.06.2006 Baltimore, Md. gnd-content Nanotechnologie (DE-588)4327470-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Wind, Shalom J. Sonstige oth |
| spellingShingle | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)4327470-5 (DE-588)1071861417 |
| title | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland |
| title_auth | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland |
| title_exact_search | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland |
| title_exact_search_txtP | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland |
| title_full | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland ed. for the proceedings: Shalom J. Wind |
| title_fullStr | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland ed. for the proceedings: Shalom J. Wind |
| title_full_unstemmed | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2006, Baltimore, Maryland ed. for the proceedings: Shalom J. Wind |
| title_short | Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 50th international conference on electron ion and photon beam technology and nanofabrication 30 may 2 june 2006 baltimore maryland |
| title_sub | 30 May - 2 June 2006, Baltimore, Maryland |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Teilchenstrahl Nanotechnologie Konferenzschrift 30.05.2006-02.06.2006 Baltimore, Md. |
| work_keys_str_mv | AT internationalconferenceonelectronionandphotonbeamtechnologyandnanofabricationbaltimoremd papersfromthe50thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication30may2june2006baltimoremaryland AT windshalomj papersfromthe50thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication30may2june2006baltimoremaryland |