Ion implantation techniques: lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
1982
|
| Series: | Springer series in electrophysics
10 |
| Subjects: | |
| Physical Description: | 372 S. |
| ISBN: | 3540118780 0387118780 |
Staff View
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV022186351 | ||
| 003 | DE-604 | ||
| 005 | 20120906 | ||
| 007 | t | ||
| 008 | 040929s1982 |||| 10||| eng d | ||
| 020 | |a 3540118780 |9 3-540-11878-0 | ||
| 020 | |a 0387118780 |9 0-387-11878-0 | ||
| 035 | |a (OCoLC)74535424 | ||
| 035 | |a (DE-599)BVBBV022186351 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 |a DE-11 | ||
| 082 | 0 | |a 621.38152 | |
| 245 | 1 | 0 | |a Ion implantation techniques |b lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1982 | |
| 300 | |a 372 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer series in electrophysics |v 10 | |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Ryssel, Heiner |d 1941- |e Sonstige |0 (DE-588)108187802 |4 oth | |
| 711 | 2 | |a Ion Implantation School |d 1982 |c Berchtesgaden |j Sonstige |0 (DE-588)2071468-3 |4 oth | |
| 711 | 2 | |a International Conference on Ion Implantation Equipment and Techniques |n 4 |d 1982 |c Berchtesgaden |j Sonstige |0 (DE-588)2074140-6 |4 oth | |
| 830 | 0 | |a Springer series in electrophysics |v 10 |w (DE-604)BV000000013 |9 10 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015401125 | ||
Record in the Search Index
| _version_ | 1804136162119385088 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_GND | (DE-588)108187802 |
| building | Verbundindex |
| bvnumber | BV022186351 |
| ctrlnum | (OCoLC)74535424 (DE-599)BVBBV022186351 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01551nam a2200373zcb4500</leader><controlfield tag="001">BV022186351</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20120906 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">040929s1982 |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540118780</subfield><subfield code="9">3-540-11878-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0387118780</subfield><subfield code="9">0-387-11878-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)74535424</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022186351</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation techniques</subfield><subfield code="b">lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">1982</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">372 S.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Springer series in electrophysics</subfield><subfield code="v">10</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ryssel, Heiner</subfield><subfield code="d">1941-</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)108187802</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">Ion Implantation School</subfield><subfield code="d">1982</subfield><subfield code="c">Berchtesgaden</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)2071468-3</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Ion Implantation Equipment and Techniques</subfield><subfield code="n">4</subfield><subfield code="d">1982</subfield><subfield code="c">Berchtesgaden</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)2074140-6</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Springer series in electrophysics</subfield><subfield code="v">10</subfield><subfield code="w">(DE-604)BV000000013</subfield><subfield code="9">10</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015401125</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV022186351 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:21:01Z |
| indexdate | 2024-07-09T20:52:01Z |
| institution | BVB |
| institution_GND | (DE-588)2071468-3 (DE-588)2074140-6 |
| isbn | 3540118780 0387118780 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015401125 |
| oclc_num | 74535424 |
| open_access_boolean | |
| owner | DE-706 DE-11 |
| owner_facet | DE-706 DE-11 |
| physical | 372 S. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in electrophysics |
| series2 | Springer series in electrophysics |
| spelling | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 Berlin [u.a.] Springer 1982 372 S. txt rdacontent n rdamedia nc rdacarrier Springer series in electrophysics 10 Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ryssel, Heiner 1941- Sonstige (DE-588)108187802 oth Ion Implantation School 1982 Berchtesgaden Sonstige (DE-588)2071468-3 oth International Conference on Ion Implantation Equipment and Techniques 4 1982 Berchtesgaden Sonstige (DE-588)2074140-6 oth Springer series in electrophysics 10 (DE-604)BV000000013 10 |
| spellingShingle | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 Springer series in electrophysics Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_auth | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_exact_search | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_exact_search_txtP | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_full | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_fullStr | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_full_unstemmed | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_short | Ion implantation techniques |
| title_sort | ion implantation techniques lectures given at the ion implantation school in connection with the 4 international conference on ion implantation equipment and techniques berchtesgaden federal republic of germany september 13 15 1982 |
| title_sub | lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift |
| volume_link | (DE-604)BV000000013 |
| work_keys_str_mv | AT rysselheiner ionimplantationtechniqueslecturesgivenattheionimplantationschoolinconnectionwiththe4internationalconferenceonionimplantationequipmentandtechniquesberchtesgadenfederalrepublicofgermanyseptember13151982 AT ionimplantationschoolberchtesgaden ionimplantationtechniqueslecturesgivenattheionimplantationschoolinconnectionwiththe4internationalconferenceonionimplantationequipmentandtechniquesberchtesgadenfederalrepublicofgermanyseptember13151982 AT internationalconferenceonionimplantationequipmentandtechniquesberchtesgaden ionimplantationtechniqueslecturesgivenattheionimplantationschoolinconnectionwiththe4internationalconferenceonionimplantationequipmentandtechniquesberchtesgadenfederalrepublicofgermanyseptember13151982 |