Ion implantation techniques: lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1982
|
| Schriftenreihe: | Springer series in electrophysics
10 |
| Schlagworte: | |
| Beschreibung: | 372 S. |
| ISBN: | 3540118780 0387118780 |
Internformat
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Datensatz im Suchindex
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| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV022186351 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:21:01Z |
| indexdate | 2024-07-09T20:52:01Z |
| institution | BVB |
| institution_GND | (DE-588)2071468-3 (DE-588)2074140-6 |
| isbn | 3540118780 0387118780 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015401125 |
| oclc_num | 74535424 |
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| physical | 372 S. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in electrophysics |
| series2 | Springer series in electrophysics |
| spelling | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 Berlin [u.a.] Springer 1982 372 S. txt rdacontent n rdamedia nc rdacarrier Springer series in electrophysics 10 Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ryssel, Heiner 1941- Sonstige (DE-588)108187802 oth Ion Implantation School 1982 Berchtesgaden Sonstige (DE-588)2071468-3 oth International Conference on Ion Implantation Equipment and Techniques 4 1982 Berchtesgaden Sonstige (DE-588)2074140-6 oth Springer series in electrophysics 10 (DE-604)BV000000013 10 |
| spellingShingle | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 Springer series in electrophysics Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_auth | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_exact_search | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_exact_search_txtP | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_full | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_fullStr | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_full_unstemmed | Ion implantation techniques lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| title_short | Ion implantation techniques |
| title_sort | ion implantation techniques lectures given at the ion implantation school in connection with the 4 international conference on ion implantation equipment and techniques berchtesgaden federal republic of germany september 13 15 1982 |
| title_sub | lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982 |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift |
| volume_link | (DE-604)BV000000013 |
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