(1982). Ion implantation techniques: Lectures given at the Ion Implantation School in connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982. Springer.
Chicago-Zitierstil (17. Ausg.)Ion Implantation Techniques: Lectures Given at the Ion Implantation School in Connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982. Berlin [u.a.]: Springer, 1982.
MLA-Zitierstil (9. Ausg.)Ion Implantation Techniques: Lectures Given at the Ion Implantation School in Connection with the 4. International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Federal Republic of Germany, September 13 - 15, 1982. Springer, 1982.