Far-field beam shaping elements for deep UV lithography:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Allensbach
UFO Atelier für Gestaltung & Verlag
2003
|
| Edition: | 1. Aufl. |
| Series: | UFO-Dissertation
428 |
| Subjects: | |
| Item Description: | Zugl.: Neuchâtel, Univ., Diss., 2003 |
| Physical Description: | IV, 140 S. Ill., graph. Darst. |
| ISBN: | 3935511299 |
Staff View
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV022172671 | ||
| 003 | DE-604 | ||
| 005 | 20040511000000.0 | ||
| 007 | t | ||
| 008 | 040421s2003 ad|| m||| 00||| eng d | ||
| 020 | |a 3935511299 |9 3-935511-29-9 | ||
| 035 | |a (OCoLC)76637360 | ||
| 035 | |a (DE-599)BVBBV022172671 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 082 | 0 | |a 620 | |
| 100 | 1 | |a Ripoll, Olivier |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Far-field beam shaping elements for deep UV lithography |c par Olivier Ripoll |
| 250 | |a 1. Aufl. | ||
| 264 | 1 | |a Allensbach |b UFO Atelier für Gestaltung & Verlag |c 2003 | |
| 300 | |a IV, 140 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a UFO-Dissertation |v 428 | |
| 500 | |a Zugl.: Neuchâtel, Univ., Diss., 2003 | ||
| 650 | 0 | 7 | |a Strahlführung |0 (DE-588)4304177-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fourier-Optik |0 (DE-588)4155108-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Diffraktives optisches Element |0 (DE-588)4603135-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |0 (DE-588)4274823-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Optisches System |0 (DE-588)4126186-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Fotolithografie |0 (DE-588)4274823-9 |D s |
| 689 | 0 | 1 | |a Strahlführung |0 (DE-588)4304177-2 |D s |
| 689 | 0 | 2 | |a Fourier-Optik |0 (DE-588)4155108-4 |D s |
| 689 | 0 | 3 | |a Diffraktives optisches Element |0 (DE-588)4603135-2 |D s |
| 689 | 0 | 4 | |a Optisches System |0 (DE-588)4126186-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a UFO-Dissertation |v 428 |w (DE-604)BV011157546 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015387380 | ||
Record in the Search Index
| _version_ | 1804136147823099904 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Ripoll, Olivier |
| author_facet | Ripoll, Olivier |
| author_role | aut |
| author_sort | Ripoll, Olivier |
| author_variant | o r or |
| building | Verbundindex |
| bvnumber | BV022172671 |
| ctrlnum | (OCoLC)76637360 (DE-599)BVBBV022172671 |
| dewey-full | 620 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620 |
| dewey-search | 620 |
| dewey-sort | 3620 |
| dewey-tens | 620 - Engineering and allied operations |
| edition | 1. Aufl. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01664nam a2200457zcb4500</leader><controlfield tag="001">BV022172671</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040511000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">040421s2003 ad|| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3935511299</subfield><subfield code="9">3-935511-29-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)76637360</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022172671</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ripoll, Olivier</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Far-field beam shaping elements for deep UV lithography</subfield><subfield code="c">par Olivier Ripoll</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. Aufl.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Allensbach</subfield><subfield code="b">UFO Atelier für Gestaltung & Verlag</subfield><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IV, 140 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">UFO-Dissertation</subfield><subfield code="v">428</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zugl.: Neuchâtel, Univ., Diss., 2003</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Strahlführung</subfield><subfield code="0">(DE-588)4304177-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fourier-Optik</subfield><subfield code="0">(DE-588)4155108-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Diffraktives optisches Element</subfield><subfield code="0">(DE-588)4603135-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="0">(DE-588)4274823-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Optisches System</subfield><subfield code="0">(DE-588)4126186-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Fotolithografie</subfield><subfield code="0">(DE-588)4274823-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Strahlführung</subfield><subfield code="0">(DE-588)4304177-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Fourier-Optik</subfield><subfield code="0">(DE-588)4155108-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Diffraktives optisches Element</subfield><subfield code="0">(DE-588)4603135-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Optisches System</subfield><subfield code="0">(DE-588)4126186-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">UFO-Dissertation</subfield><subfield code="v">428</subfield><subfield code="w">(DE-604)BV011157546</subfield><subfield code="9"></subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015387380</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV022172671 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:19:59Z |
| indexdate | 2024-07-09T20:51:47Z |
| institution | BVB |
| isbn | 3935511299 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015387380 |
| oclc_num | 76637360 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | IV, 140 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | UFO Atelier für Gestaltung & Verlag |
| record_format | marc |
| series | UFO-Dissertation |
| series2 | UFO-Dissertation |
| spelling | Ripoll, Olivier Verfasser aut Far-field beam shaping elements for deep UV lithography par Olivier Ripoll 1. Aufl. Allensbach UFO Atelier für Gestaltung & Verlag 2003 IV, 140 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier UFO-Dissertation 428 Zugl.: Neuchâtel, Univ., Diss., 2003 Strahlführung (DE-588)4304177-2 gnd rswk-swf Fourier-Optik (DE-588)4155108-4 gnd rswk-swf Diffraktives optisches Element (DE-588)4603135-2 gnd rswk-swf Fotolithografie (DE-588)4274823-9 gnd rswk-swf Optisches System (DE-588)4126186-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Fotolithografie (DE-588)4274823-9 s Strahlführung (DE-588)4304177-2 s Fourier-Optik (DE-588)4155108-4 s Diffraktives optisches Element (DE-588)4603135-2 s Optisches System (DE-588)4126186-0 s DE-604 UFO-Dissertation 428 (DE-604)BV011157546 |
| spellingShingle | Ripoll, Olivier Far-field beam shaping elements for deep UV lithography UFO-Dissertation Strahlführung (DE-588)4304177-2 gnd Fourier-Optik (DE-588)4155108-4 gnd Diffraktives optisches Element (DE-588)4603135-2 gnd Fotolithografie (DE-588)4274823-9 gnd Optisches System (DE-588)4126186-0 gnd |
| subject_GND | (DE-588)4304177-2 (DE-588)4155108-4 (DE-588)4603135-2 (DE-588)4274823-9 (DE-588)4126186-0 (DE-588)4113937-9 |
| title | Far-field beam shaping elements for deep UV lithography |
| title_auth | Far-field beam shaping elements for deep UV lithography |
| title_exact_search | Far-field beam shaping elements for deep UV lithography |
| title_exact_search_txtP | Far-field beam shaping elements for deep UV lithography |
| title_full | Far-field beam shaping elements for deep UV lithography par Olivier Ripoll |
| title_fullStr | Far-field beam shaping elements for deep UV lithography par Olivier Ripoll |
| title_full_unstemmed | Far-field beam shaping elements for deep UV lithography par Olivier Ripoll |
| title_short | Far-field beam shaping elements for deep UV lithography |
| title_sort | far field beam shaping elements for deep uv lithography |
| topic | Strahlführung (DE-588)4304177-2 gnd Fourier-Optik (DE-588)4155108-4 gnd Diffraktives optisches Element (DE-588)4603135-2 gnd Fotolithografie (DE-588)4274823-9 gnd Optisches System (DE-588)4126186-0 gnd |
| topic_facet | Strahlführung Fourier-Optik Diffraktives optisches Element Fotolithografie Optisches System Hochschulschrift |
| volume_link | (DE-604)BV011157546 |
| work_keys_str_mv | AT ripollolivier farfieldbeamshapingelementsfordeepuvlithography |