Papers from the ... International Plasma-Based Ion Implantation Workshop: 4 (1998) 2 - 4 June 1998, Dearborn, Michigan
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York
American Inst. of Physics
1999
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| Item Description: | Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 |
| Physical Description: | S. 793 - 901 Ill., graph. Darst. |
Staff View
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| 500 | |a Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 | ||
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:49Z |
| indexdate | 2024-07-09T20:50:30Z |
| institution | BVB |
| institution_GND | (DE-588)16146205-4 |
| language | English |
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| physical | S. 793 - 901 Ill., graph. Darst. |
| publishDate | 1999 |
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| publisher | American Inst. of Physics |
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| spelling | International Plasma-Based Ion Implantation Workshop Verfasser (DE-588)16146205-4 aut Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... New York American Inst. of Physics 1999 S. 793 - 901 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Journal of vacuum science & technology / 2 / B ; 17 (1999),2 Mantese, Joseph V. Sonstige oth (DE-604)BV021860652 2,B,17,1 |
| spellingShingle | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_auth | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_exact_search | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_exact_search_txtP | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_full | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_fullStr | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_full_unstemmed | Papers from the ... International Plasma-Based Ion Implantation Workshop 4 (1998) 2 - 4 June 1998, Dearborn, Michigan ed. for the conference: Joseph V. Mantese ... |
| title_short | Papers from the ... International Plasma-Based Ion Implantation Workshop |
| title_sort | papers from the international plasma based ion implantation workshop 2 4 june 1998 dearborn michigan |
| volume_link | (DE-604)BV021860652 |
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